Semiconductor device with parasitic bipolar transistor
View Patent ↗The invention enhances resistance to a surge in a semiconductor device having a semiconductor die mounted on a lead frame. An N type embedded layer, an epitaxial layer and a P type semiconductor layer are disposed on the front surface of a P type semiconductor substrate forming an IC die. A metal thin film is disposed on the back surface of the semiconductor substrate, and a conductive paste containing silver particles and so on is disposed between the metal thin film and a metal island. When a surge is applied to a pad electrode disposed on the front surface of the semiconductor layer, the surge current flowing from the semiconductor layer into the semiconductor substrate runs toward the metal island through the metal thin film.
1. A semiconductor die comprising:
a semiconductor substrate of a first conductive type;
a first semiconductor layer of a second conductive type disposed on a front surface of the semiconductor substrate;
a second semiconductor layer of the first conductive type disposed on the first semiconductor layer;
a first electrode and a second electrode that are in contact with the second semiconductor layer so that a current runs between the two electrodes through the second semiconductor layer under a normal input current condition;
a metal film disposed on a back surface of the semiconductor substrate so as to be in a direct physical contact with the back surface, wherein the semiconductor die is bonded to an island of a lead frame by a conductive paste so that the metal film is attached to the island through the conductive paste, and the semiconductor substrate and the first and second semiconductor layers are configured to operate as a parasitic bipolar transistor so as to release a first portion of an input current along a second path to the island in response to a surge event, wherein the semiconductor substrate, the first semiconductor layer, the second semiconductor laver, the first electrode, and the metal film cooperate to form the second path;
an isolation layer in contact with the semiconductor substrate; and
a third electrode, the third electrode in contact with the isolation layer, wherein the substrate, the isolation layer, and the third electrode serve as a first path along which a second portion of the input current is released in response to the surge event.
2. The semiconductor die of claim 1 , wherein the metal film comprises an aluminum layer, a chromium layer, a copper layer and a gold layer that are sequentially layered on the back surface side of the semiconductor substrate.
3. The semiconductor die of claim 2 , wherein the aluminum layer, the chromium layer, the copper layer and the gold layer are sequentially layered in this order from the back surface of the semiconductor die and to the island of the frame.
4. The semiconductor die of claim 3 , wherein a thickness of the metal film is 0.5 to 1.5 μm.
5. The semiconductor die of claim 1 , wherein the conductive paste is a silver paste comprising silver particles.
6. The semiconductor die of claim 1 , wherein the first electrode is connected to a power supply.
7. The semiconductor die of claim 1 , wherein the semiconductor die is a semiconductor device for a vehicle.
8. The semiconductor die of claim 1 , wherein the semiconductor die is a semiconductor device for an igniter.
9. The semiconductor die of claim 1 , wherein naturally formed oxide does not exist between the back surface of the semiconductor die and the metal.
10. The semiconductor die of claim 9 , wherein a native oxide has been removed from the back of the semiconductor die by plasma etching.
11. A semiconductor die comprising:
a semiconductor substrate of a first conductive type;
a first semiconductor layer of a second conductive type disposed on a front surface of the semiconductor substrate;
a second semiconductor layer of the first conductive type disposed on the first semiconductor layer;
a first electrode and a second electrode that are in contact with the second semiconductor layer so that a current runs between the two electrodes through the second semiconductor layer under a normal input current condition;
a third semiconductor layer of the first conductivity type disposed on the front surface of the semiconductor substrate and adjacent the first semiconductor layer, and a third electrode that is in contact with the third semiconductor layer so as to connect the third semiconductor layer to a ground; and
a metal film disposed on a back surface of the semiconductor substrate so as to be in a direct physical contact with the back surface, wherein the semiconductor die is bonded to an island of a lead frame by a conductive paste so that the metal film is attached to the island through the conductive paste, and the semiconductor substrate and the first and second semiconductor layers are configured to operate as a parasitic bipolar transistor so as to release an input current to the island when the parasitic bipolar transistor breaks down under a surge event.
12. The semiconductor die of claim 11 , wherein the semiconductor die is a semiconductor device for a vehicle.
13. A semiconductor device comprising:
a lead frame comprising a first island, a second island and a lead, the lead receiving a power voltage;
a semiconductor die disposed on the first island so as to be electrically connected to the first island;
a conductive paste disposed on the first island so as to be electrically connected to the first island;
a conductive paste disposed between the semiconductor die and the first island; and
a switching element disposed on the second island;
wherein the semiconductor die comprises;
a semiconductor substrate of a first conductivity type;
a first semiconductor layer of a second conductivity type disposed on a front surface of the semiconductor substrate;
a second semiconductor layer of the first conductivity type disposed on the first semiconductor layer;
a first electrode and a second electrode that are in contact with the second semiconductor layer so that a current runs between the two electrodes through the second semiconductor layer under a normal input current condition, the first electrode being connected to the lead; and
a metal film disposed on a back surface of the semiconductor substrate so as to be in contact with the back surface; and
wherein the semiconductor substrate and the first and second semiconductor layers are configured to operate as a parasitic bipolar transistor so as to release an input current to the first island when the parasitic bipolar transistor breaks down under a surge event.
14. The semiconductor die of claim 13 , wherein the switching element is an IGBT die.
15. The semiconductor die of claim 13 , further comprising a capacitor connecting the first island and the second island.
16. The semiconductor die of claim 13 , wherein the conductive paste comprises silver.
17. The semiconductor die of claim 13 , further including:
an isolation layer in contact with the semiconductor substrate; and
a third electrode, the third electrode in contact with the isolation layer, the substrate, the isolation layer, and the third electrode serving as a first path along which a portion of the input current is released in response to the surge event.
18. The semiconductor die of claim 17 , wherein the isolation structure comprises semiconductor material of the first conductivity type.
19. The semiconductor die of claim 18 , further comprising a semiconductor material of the second conductivity type, the semiconductor material of the second conductivity type between the first and second layers of semiconductor material of the first conductivity type and the isolation structure.
20. The semiconductor die of claim 19 , wherein the metal layer is coupled for receiving a first source of potential and the third electrode is coupled for receiving a second source of potential, the first and second sources of potential at the same level.