Removable transparent membrane for a pellicle
View Patent ↗According to one embodiment, a pellicle includes first and second frame members that are selectively removable from one another. The second frame member has an annular shape similar to and is physically coupled to an outer periphery of a transparent membrane. The second frame member configured to be selectively coupled to the first frame member from a engaged position adjacent to the first frame member to a disengaged position in which the second frame member is separated from the first frame member.
1. A pellicle comprising:
a transparent membrane having an outer periphery;
a frame comprising:
a first frame member configured to be physically coupled to a surface of a reticle; and
a second frame member that is coupled to the outer periphery of the transparent membrane, the second frame having an annular shape similar to the first frame member and the outer periphery of the membrane, the second frame member configured to be selectively coupled to the first frame member from an engaged position adjacent to the first frame member to a disengaged position in which the second frame member is separated from the first frame member.
2. The pellicle of claim 1 , further comprising at least one snap fastener configured to selectively couple the first frame member to the second frame member.
3. The pellicle of claim 1 , further comprising at least one deformable hooking mechanism configured to selectively couple to the first frame member to the second frame member.
4. The pellicle of claim 1 , wherein the second frame member is selectively coupled to the frame member using at least one of a clip, a clamp, or a releasable pressure sensitive adhesive (PSA) material.
5. The pellicle of claim 1 , wherein the reticle comprises a chrome side and a glass side, the first frame member physically coupled to the chrome side of the reticle.
6. The pellicle of claim 5 , wherein the first frame member is physically coupled to the chrome side using an adhesive.
7. The pellicle of claim 5 , wherein at least one of the first frame member and the second frame member includes an adhesive along its inner periphery for trapping airborne debris.
8. The pellicle of claim 1 , wherein at least one of the first frame member and the second frame member includes a vent hole configured to provide movement of air to and from a cavity formed between the transparent membrane and the reticle.
9. A method comprising:
providing a first pellicle having a first and second frame members that are selectably removable from one another, the second frame member physically coupled to an outer periphery of a transparent membrane;
securing the first frame member to a reticle;
removably securing the second frame member to the first frame member; and
using the reticle and the first pellicle to manufacture one or more integrated circuit (IC) devices.
10. The method of claim 9 , further comprising:
providing a second pellicle;
securing the first frame member of the second pellicle to the reticle on an opposing side from which the first pellicle was secured to the reticle.
11. The method of claim 10 , wherein the reticle comprises a chrome side and a glass side, the first pellicle being physically secured to the chrome side of the reticle and the second pellicle being physically secured to the glass side of the reticle.
12. The method of claim 9 , further comprising:
removing the second frame member from the first frame member;
cleaning the transparent membrane coupled to the first frame member; and
removably securing the second frame member to the first frame member.
13. The method of claim 9 , further comprising:
removing the second frame member from the first frame member; and
removably securing another second frame member to the first frame member.
14. The method of claim 9 , further comprising:
Removably securing the second frame member to the first frame member using a snap fastener.
15. The method of claim 9 , further comprising:
removably securing the second frame member to the first frame member using a deformable hooking mechanism.
16. The method of claim 9 , further comprising:
Selectively coupling the second frame member to the frame member using at least one of a clip, a clamp, or a releasable pressure sensitive adhesive (PSA) material.
17. A photolithography system comprising:
a reticle configured to selectively block a light beam for manufacturing an integrated circuit (IC) device;
a transparent membrane having an outer periphery;
a frame comprising:
a first frame member configured to be physically coupled to a surface of the reticle; and
a second frame member that is coupled to the outer periphery of the transparent membrane, the second frame having an annular shape similar to the first frame member and the outer periphery of the membrane, the second frame member configured to be selectively coupled to the first frame member from an engaged position adjacent to the first frame member to a disengaged position in which the second frame member is separated from the first frame member.
18. The photolithography system of claim 17 , further comprising at least one snap fastener for selectively coupling the first frame member to the second frame member.
19. The photolithography system of claim 17 , further comprising at least one deformable hooking mechanism configured to selectively couple to the first frame member to the second frame member.
20. The photolithography system of claim 17 , wherein the reticle comprises a chrome side and a glass side, the first frame member being physically coupled to the chrome side of the reticle.