Semiconductor structure
A method of forming a semiconductor structure is provided. A substrate having a cell area and a periphery area is provided. A stacked structure including a gate oxide layer, a floating gate and a first spacer is formed on the substrate in the cell area and a resistor is formed on the substrate in the periphery area. At least two doped regions are formed in the substrate beside the stacked structure. A dielectric material layer and a conductive material layer are sequentially formed on the substrate. A patterned photoresist layer is formed on the substrate to cover the stacked structure and a portion of the resistor. The dielectric material layer and the conductive material layer not covered by the patterned photoresist layer are removed, so as to form an inter-gate dielectric layer and a control gate on the stacked structure, and simultaneously form a salicide block layer on the resistor.
1. A semiconductor structure, comprising:
a substrate, having a cell area and a periphery area;
a charge storage structure, disposed on the substrate in the cell area, wherein the charge storage structure comprises a gate oxide layer, a floating gate, an inter-gate dielectric layer and a control gate sequentially disposed on the substrate;
a resistor, disposed on the substrate in the periphery area, wherein the resistor comprises an oxide layer and a first conductive layer sequentially disposed on the substrate;
a dielectric layer and a second conductive layer, sequentially disposed on the resistor, wherein the dielectric layer and the second conductive layer constitutes a salicide block (SAB) layer, and wherein the second conductive layer and the control gate are made of the same material;
a shallow trench isolation structure, disposed in the substrate below the resistor;
a first spacer, disposed on a sidewall of the charge storage structure;
a second spacer, disposed on a sidewall of the resistor;
a third spacer, disposed on a sidewall of the SAB layer; and
at least two doped regions, disposed in the substrate beside the charge storage structure.
2. The semiconductor structure of claim 1 , further comprising a salicide layer disposed on a surface of the control gate of the charge storage structure, on surfaces of the doped regions, on a surface of the second conductive layer of the SAB layer, and on a surface of the first conductive layer of the resistor not covered by the second conductive layer and the third spacer.
3. The semiconductor structure of claim 2 , wherein a material of the salicide layer comprises cobalt silicide.
4. The semiconductor structure of claim 1 , further comprising a select transistor disposed on the substrate in the cell area and located at a side of the charge storage structure.
5. The semiconductor structure of claim 4 , wherein the select transistor comprises a select gate oxide layer and a select gate sequentially disposed on the substrate.
6. The semiconductor structure of claim 4 , further comprising:
a fourth spacer, disposed on a sidewall of the select transistor,
wherein the at least two doped regions are further disposed beside the select transistor, and the charge storage structure and the select transistor share one doped region.
7. The semiconductor structure of claim 6 , further comprising a salicide layer disposed on a surface of the control gate of the charge storage structure, on a surface of the select transistor, on surfaces of the doped regions, on a surface of the second conductive layer of the SAB layer, and on a surface of the first conductive layer of the resistor not covered by the second conductive layer and the third spacer.
8. The semiconductor structure of claim 7 , wherein a material of the salicide layer comprises cobalt silicide.
9. The semiconductor structure of claim 1 , wherein a material of the first conductive layer and the second conductive layer comprises doped polysilicon.