Granted Patent B2

US 8,822,124 · App. 13/253,012 · Granted Sep 2, 2014

Abstract

Claims (20)

1. A method of forming a pattern, comprising:

diffusing

an acid, generated in a photosensitive layer comprising a photoacid generator, by irradiating a portion of the photosensitive layer; into

an adjacent portion of a underlayer comprising an acid sensitive copolymer comprising an acid decomposable group, an attachment group, and a functional group, the attachment group being covalently bonded to a hydrophilic surface of a substrate, crosslinked to form an interpolymer crosslink, or both covalently bonded to the surface of the substrate and crosslinked to form an interpolymer crosslink, where the functional group is operative to adjust the neutrality of the acid-sensitive copolymer;

wherein the photosensitive layer is disposed on a surface of the underlayer, diffusing comprises heating the underlayer and photosensitive layer, and the acid sensitive group of the acid sensitive copolymer in the underlayer reacts with the diffused acid to form a polar region at the surface of the underlayer, the polar region having a shape of the pattern;

removing the photosensitive layer;

forming a self-assembling layer on the surface of the underlayer, the self-assembling layer comprising a block copolymer having a first block with an affinity for the polar region, and a second block having less affinity for the polar region than the first block,

wherein first block forms a first domain aligned to the polar region, and the second block forms a second domain aligned adjacent to the first domain, and

removing either the first or second domain to expose an underlying portion of the underlayer.

2. The method of claim 1 , wherein the photosensitive layer is a positive tone photoresist.

3. The method of claim 1 , wherein forming the underlayer comprises contacting a solution of the acid sensitive copolymer to the surface of the substrate by spin coating, dip coating, roll coating, spray coating, or doctor blading,

heating to remove solvent and form covalent bonds between the attachment group of the acid sensitive copolymer and the hydrophilic surface, and

washing the surface of the underlayer with solvent to remove any unbonded brush copolymer.

4. The method of claim 3 , wherein forming the self-assembling layer comprises contacting a solution of the block copolymer to the surface of the underlayer by spin coating, dip coating, roll coating, spray coating, or doctor blading, and

annealing to remove solvent and form the first and second domains.

5. The method of claim 1 , wherein selective irradiation is accomplished by exposure of the photosensitive layer with actinic radiation through a reticle, or by direct writing of a pattern onto the photosensitive layer by e-beam radiation.

6. The method of claim 1 wherein the irradiated portion of the underlayer form a sparse pattern having an interval greater than an interval spacing of the first and second domains.

7. The method of claim 6 , further comprising additional first and second domains formed on the underlayer to fill the interval spacing of the sparse pattern, wherein the additional first domains are aligned to the second domain but not to a polar region, and the additional second domain is aligned to the additional first domain.

8. The method of claim 1 wherein the acid sensitive copolymer has the formula:

wherein R 1 is a C 1-30 acid decomposable group comprising a tertiary alkyl ester group, R 3 is a C 1-30 attachment group comprising a hydroxy group, R 5 and R 7 are independently a C 1-30 functional group comprising an aromatic group or ester group, R 2 , R 4 , R 6 , and R 8 are independently H or a C 1-10 organic group, mole fractions w and x are 0.001 to 0.999, mole fractions y and z are 0 to 0.9, and the sum of mole fractions w, x, y, and z is 1.

Assignments (6)