Three-dimensional solar cell having increased efficiency
View Patent ↗A nano-scale tower structure array having increased surface area on each tower for gathering incident light is provided for use in three-dimensional solar cells. Embodiments enhance surface roughness of each tower structure to increase the surface area available for light gathering. Enhanced roughness can be provided by manipulating passivation layer etching parameters used during a formation process of the nano-scale tower structures, in order to affect surface roughness of a photoresist layer used for the etch. Manipulable etching parameters can include power, gas pressure, and etching compound chemistry.
1. A method for forming a three-dimensional photovoltaic cell, the method comprising:
forming a conductive layer over a substrate;
forming a passivation layer over the conductive layer;
forming a photoresist layer over the passivation layer;
patterning the photoresist layer for one or more holes;
etching the passivation layer to form the one or more holes, wherein
said etching is performed such that a sidewall of each of the one or more holes through the photoresist layer has a surface roughness;
forming a conductive material in a hole of the one or more holes; and
removing the photoresist layer, wherein
sidewalls of the conductive material have the surface roughness, and
said etching the passivation layer is performed such that the sidewall surface roughness of the conductive material provides a selected level of scattering of light incident on the sidewalls.
2. The method of claim 1 wherein said forming the conductive material comprises electroplating.
3. The method of claim 2 wherein the conductive material in the hole comprises one of a metal or a metal alloy.
4. The method of claim 3 wherein the conductive material comprises nickel or zinc.
5. The method of claim 1 wherein said etching the passivation layer is performed using an aggressive dry etch process having an increased power as compared with a non-aggressive dry etch process, resulting in an increased surface roughness of the hole sidewalls through the photoresist layer.
6. The method of claim 1 wherein said etching the passivation layer is performed using an aggressive dry etch process having a decreased pressure of gasses as compared with a non-aggressive dry etch process, resulting in an increased surface roughness of the hole sidewalls through the photoresist layer.
7. The method of claim 1 wherein said etching the passivation layer is performed using an aggressive dry etch process having an increased flow rate of one or more gasses as compared with a non-aggressive dry etch process, resulting in an increased surface roughness of the hole sidewalls through the photoresist layer.
8. The method of claim 1 further comprising:
performing said etching to selectively provide a surface roughness of the hole sidewalls through the photoresist layer of between 0.1 μm and 1.6 μm, wherein the surface roughness is a mean of absolute values of profile heights measured from a mean line averaged over the profile.