Transistors with different threshold voltages
View Patent ↗A first transistor and a second transistor are formed with different threshold voltages. A first gate is formed over the first region of a substrate for a first transistor and a second gate over the second region for a second transistor. The first region is masked. A threshold voltage of the second transistor is adjusted by implanting through the second gate while masking the first region. Current electrode regions are formed on opposing sides of the first gate and current electrode regions on opposing sides of the second gate.
1. A method of forming a first transistor and a second transistor, comprising:
forming a first gate for the first transistor over a first region of a substrate and a second gate for the second transistor over a second region of the substrate;
masking the first region with a mask after forming the first gate and the second gate;
implanting conductivity dopants through the second gate into the substrate to adjust a threshold voltage of the second transistor while the first region is masked with the mask so as to inhibit the conductivity dopants from affecting the threshold voltage of the first transistor;
wherein the first transistor and the second transistor are of the same conductivity type;
forming a first pair of current electrode regions on opposing sides of the first gate;
forming a second pair of current electrode regions on opposing sides of the second gate;
wherein forming the second pair includes implanting conductivity dopants into portions the second region of the substrate while the mask is masking the first region.
2. The method of claim 1 comprising:
prior to forming the first gate and the second gate, implanting well region conductivity dopants simultaneously into the first region and the second region, wherein the well region conductivity dopants are implanted into a channel region of the first transistor and into a channel region of the second transistor.
3. The method of claim 2 wherein the well region conductivity dopants are implanted at a concentration and energy to set the threshold voltage of the first transistor at a desired value.
4. The method of claim 1 wherein the implanting conductivity dopants in forming the second pair includes implanting dopants of a first conductivity type, wherein the conductivity dopants implanted through the second gate are of a second conductivity type, opposite the first conductivity type.
5. The method of claim 1 wherein the implanting conductivity dopants in forming the second pair includes implanting dopants of a first conductivity type, wherein the dopants implanted through the second gate are of the first conductivity type.
6. The method of claim 1 wherein the implanting conductivity dopants into portions of the second region is characterized as implanting conductivity dopants into the substrate to form extension regions of the second pair of current electrode regions.
7. The method of claim 1 wherein the forming the first pair of current electrode regions on opposing sides of the first gate includes implanting conductivity dopants for forming deep current electrode portions of the first pair and the forming the second pair of second current electrode regions on opposing sides of the second gate includes implanting conductivity dopants for forming deep current electrode portions of the second pair, wherein the implanting conductivity dopants for forming the deep current electrode portions of the first pair and the implanting conductivity dopants for forming the deep current electrode portions of the second pair are performed simultaneously while the mask is not masking the first region.
8. The method of claim 7 , further comprising after implanting conductivity dopants through the second gate, forming a first sidewall spacer around the first gate and a second sidewall spacer around the second gate prior to implanting conductivity dopants for forming the deep current electrode portions of the first pair and simultaneously implanting conductivity dopants for forming the deep current electrode portions of the second pair.
9. The method of claim 1 wherein the forming a first pair of current electrode regions on opposing sides of the first gate includes implanting conductivity dopants into a portion of the first region of the substrate while a second mask is masking the second region.
10. The method of claim 1 wherein implanting conductivity dopants through the second gate into the substrate including implanting the conductivity dopants into a channel region of the second transistor wherein the conductivity dopants are not simultaneously implanted into a channel region of the first transistor.
11. The method of claim 1 further comprising:
forming a first dielectric on the first region of the substrate, wherein the first gate is formed on the first dielectric;
forming a second dielectric on the second region of the substrate, wherein the second gate is formed on the second dielectric, wherein the second dielectric is thicker than the first dielectric.
12. The method of claim 1 comprising:
prior to forming the first gate and the second gate, implanting well region conductivity dopants simultaneously into the first region and the second region, wherein the well region conductivity dopants are implanted into a channel region of the first transistor and into a channel region of the second transistor;
wherein the well region conductivity dopants and the conductivity dopants implanted through the second gate are of the same conductivity type.
13. A method, comprising:
implanting conductivity dopants simultaneously into a first region and a second region of a substrate to a level for obtaining a first threshold voltage for transistors of a first conductivity type;
forming a first gate on the first region and a second gate on the second region;
implanting conductivity dopants through the second gate but not through the first gate to adjust a threshold voltage of a transistor of the second gate to a second threshold voltage, wherein a transistor of the first gate has the first threshold voltage, wherein the transistor of the first gate and the transistor of the second gate are of the first conductivity type
implanting conductivity dopants into the second region to form current electrode extension regions while the first region is masked with a mask, wherein implanting conductivity dopants through the second gate is performed while the first region is masked with the mask.
14. The method of claim 13 wherein the implanting conductivity dopants through the second gate increases the threshold voltage of the transistor of the second gate from the first threshold voltage to the second threshold voltage.
15. A method of making a first transistor having a first threshold voltage and a second transistor having a second threshold voltage, comprising:
implanting conductivity dopants simultaneously into a first region and a second region of a substrate;
after the implanting, forming a first gate over the first region for the first transistor and a second gate over the second region for the second transistor wherein the conductivity dopants were implanted in a first channel region below the first gate and into a second channel region below the second gate;
after forming the first gate and the second gate, implanting conductivity dopants in the first region for forming current electrode extensions in the first region on opposing sides of the first gate while the second region is masked;
after forming the first gate and the second gate, implanting conductivity dopants in the second region for forming current electrode extensions in the second region on opposing sides of the second gate while the first region is masked with a mask;
implanting conductivity dopants through the second gate into the second channel region to adjust a threshold voltage of the second transistor while the first region is masked with the mask;
after the implanting conductivity dopants through the second gate, simultaneously implanting conductivity dopants to form a first pair of deep current electrode regions for the first transistor and implanting conductivity dopants to form a second pair of deep current electrode regions for the second transistor.
16. The method of claim 15 wherein the conductivity dopants implanted for forming the current electrode extensions in the first region and the conductivity dopant implanted for forming the current electrode extensions in the second region are of an opposite conductivity type to the conductivity dopants implanted through the second gate.
17. The method of claim 15 wherein:
implanting conductivity dopants simultaneously includes implanting conductivity dopants of a first conductivity type;
implanting conductivity dopants in the first region for forming current electrode extensions includes implanting conductivity dopants of a second conductivity type opposite the first conductivity type;
implanting conductivity dopants in the second region for forming current electrode extensions includes implanting conductivity dopants of the second conductivity type;
implanting conductivity dopants through the second gate into the second channel region includes implanting conductivity dopants of the first conductivity type.