IP Library Granted Patent US 8,427,858
Granted Patent B2
US 8,427,858 · App. 13/294,224 · Granted Apr 23, 2013

Large array of upward pointinig p-i-n diodes having large and uniform current

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Quick Facts
Patent No.
US 8,427,858
App. No.
13/294,224
Granted
Apr 23, 2013
Kind
B2
Abstract

A circuit is provided that includes a plurality of vertically oriented p-i-n diodes. Each p-i-n diode is coupled to a resistivity-switching element and includes a bottom heavily doped p-type region. When a voltage between about 1.5 volts and about 3.0 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes. Numerous other aspects are also provided.

Claims (34)

1. A circuit comprising:

a plurality of vertically oriented p-i-n diodes, wherein each p-i-n diode is coupled to a resistivity-switching element and comprises a bottom heavily doped p-type region,

wherein when a voltage between about 1.5 volts and about 3.0 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes.

2. The circuit of claim 1 , wherein when a voltage between about 1.8 volts and about 2.2 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes.

3. The circuit of claim 1 , wherein the resistivity-switching element comprises a binary metal oxide or a carbon nanotube fabric.

4. The memory of claim 1 , wherein the resistivity-switching element comprises one or more of Ni x O y , Nb x O y , Ti x O y , Hf x O y , Al x O y , Mg x O y , Co x O y , Cr x O y , V x O y , Zn x O y , Zr x O y , B x N y and Al x N y .

5. The circuit of claim 1 , wherein each p-i-n diode is in contact with a silicide, germanide, or silicide-germanide layer.

6. The circuit of claim 1 , further comprising:

a first plurality of substantially parallel, substantially coplanar rail-shaped conductors formed above a substrate; and

a second plurality of substantially parallel, substantially coplanar rail-shaped conductors formed above the first plurality of substantially parallel, substantially coplanar rail-shaped conductors,

wherein each p-i-n diode is vertically disposed between one of the first plurality of substantially parallel, substantially coplanar rail-shaped conductors and one of the second plurality of substantially parallel, substantially coplanar rail-shaped conductors.

7. The circuit of claim 1 , wherein the plurality of vertically oriented p-i-n diodes are formed above a substrate.

8. A monolithic three-dimensional circuit comprising:

a first circuit level comprising a plurality of vertically oriented p-i-n diodes, wherein each p-i-n diode is coupled to a resistivity-switching element and comprises a bottom heavily doped p-type region, and wherein when a voltage between about 1.5 volts and about 3.0 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes; and

a second circuit level monolithically formed above the first circuit level.

9. The monolithic three-dimensional circuit of claim 8 , wherein when a voltage between about 1.8 volts and about 2.2 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes.

10. The monolithic three-dimensional circuit of claim 8 , wherein the resistivity-switching element comprises a binary metal oxide or a carbon nanotube fabric.

11. The monolithic three-dimensional circuit of claim 8 , wherein the resistivity-switching element comprises one or more of Ni x O y , Nb x O y , Ti x O y , Hf x O y , Al x O y , Mg x O y ,Co x O y , Cr x O y , V x O y , Zn x O y , Zr x O y , B x N y and Al x N y .

12. The monolithic three-dimensional circuit of claim 8 , wherein each p-i-n diode is in contact with a silicide, germanide, or silicide-germanide layer.

13. The monolithic three-dimensional circuit of claim 8 , further comprising:

a first plurality of substantially parallel, substantially coplanar rail-shaped conductors formed above a substrate; and

a second plurality of substantially parallel, substantially coplanar rail-shaped conductors formed above the first plurality of substantially parallel, substantially coplanar rail-shaped conductors,

wherein each vertically oriented p-i-n diode in the first circuit level is vertically disposed between one of the first plurality of substantially parallel, substantially coplanar rail-shaped conductors and one of the second plurality of substantially parallel, substantially coplanar rail-shaped conductors.

14. A method comprising:

forming a plurality of vertically oriented p-i-n diodes, wherein each p-i-n diode is coupled to a resistivity-switching element and comprises a bottom heavily doped p-type region,

wherein when a voltage between about 1.5 volts and about 3.0 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes.

15. The method of claim 14 , wherein when a voltage between about 1.8 volts and about 2.2 volts is applied across each p-i-n diode, a current of at least 1.5 microamps flows through 99 percent of the p-i-n diodes.

16. The method of claim 14 , wherein the resistivity-switching element comprises a binary metal oxide or a carbon nanotube fabric.

17. The method of claim 14 , wherein the resistivity-switching element comprises one or more of Ni x O y , Nb x O y , Ti x O y , Hf x O y , Al x O y , Mg x O y , Co x O y , Cr x O y , V x O y , Zn x O y , Zr x O y , B x N y and Al x N y .

18. The method of claim 14 , further comprising forming each p-i-n diode in contact with a silicide, germanide, or silicide-germanide layer.

19. The method of claim 14 , further comprising:

forming a first plurality of substantially parallel, substantially coplanar rail-shaped conductors formed above a substrate; and

forming a second plurality of substantially parallel, substantially coplanar rail-shaped conductors formed above the first plurality of substantially parallel, substantially coplanar rail-shaped conductors,

vertically disposing each p-i-n diode between one of the first plurality of substantially parallel, substantially coplanar rail-shaped conductors and one of the second plurality of substantially parallel, substantially coplanar rail-shaped conductors.

Assignments (3)
CHANGE OF NAME Recorded May 25, 2016
From: SANDISK TECHNOLOGIES INC
To: SANDISK TECHNOLOGIES LLC
Reel/Frame 038807/0898 →
CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECT LISTED PATENT NUMBER 8853569 TO THE CORRECT PATENT NUMBER 8883569 PREVIOUSLY RECORDED ON REEL 038300 FRAME 0665. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Apr 25, 2016
From: SANDISK 3D LLC
To: SANDISK TECHNOLOGIES INC.
Reel/Frame 038520/0552 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 30, 2016
From: SANDISK 3D LLC.
To: SANDISK TECHNOLOGIES INC.
Reel/Frame 038300/0665 →