Nonvolatile memory device
View Patent ↗A nonvolatile memory device includes a channel protruding in a vertical direction from a substrate, a plurality of interlayer dielectric layers and gate electrode layers which are alternately stacked over the substrate along the channel, and a memory layer formed between the channel and a stacked structure of the interlayer dielectric layers and gate electrode layers. Two or more gate electrode layers of the plurality of gate electrode layers are coupled to an interconnection line to form a selection transistor.
1. A nonvolatile memory device comprising:
a plurality of channels protruding in a vertical direction from a substrate;
a plurality of interlayer dielectric layers and a plurality of gate electrode layers that are alternately stacked over the substrate along the plurality of channels; and
a plurality of memory layers formed between the plurality of channels and a stacked structure of the plurality of interlayer dielectric layers and the plurality of gate electrode layers,
wherein two or more gate electrode layers, of the plurality of gate electrode layers, are coupled to an interconnection line to form a selection transistor, and the two or more gate electrode layers, of the selection transistor, are sequentially stacked in the vertical direction from the substrate, and
wherein each channel, of the plurality of channels, is surrounded by the two or more gate electrode layers of the selection transistor in the vertical direction from the substrate.
2. The nonvolatile memory device of claim 1 , wherein the selection transistor comprises an upper selection transistor comprising two or more gate electrode layers disposed at the top among the plurality of gate electrode layers.
3. The nonvolatile memory device of claim 2 , wherein the selection transistor comprises a lower selection transistor comprising two or more gate electrode layers disposed at the bottom among the plurality of gate electrode layers.
4. The nonvolatile memory device of claim 1 , wherein the two or more gate electrode layers, of the selection transistor, have a same thickness as other gate electrode layers of the plurality of the other gate electrode layers.
5. The nonvolatile memory device of claim 1 , further comprising a plurality of contacts connected to each of the two or more gate electrode layers, of the selection transistor, and coupled to the interconnection line.
6. The nonvolatile memory device of claim 1 , further comprising a pipe gate electrode layer disposed under the stacked structure and having a pipe channel formed therein,
wherein each channel, of the plurality of channels, comprises a pair of first and second channels coupled to each other by the pipe channel.
7. A method for fabricating a nonvolatile memory device, the method comprising:
alternately stacking a plurality of interlayer dielectric layers and a plurality of gate electrode layers over a substrate;
selectively etching the plurality of interlayer dielectric layers and the plurality of gate electrode layers to form a plurality of channel holes exposing the substrate;
forming a memory layer on a sidewall of each channel hole of the plurality of channel holes; and
forming a channel in each channel hole of the plurality of channel holes,
wherein two or more gate electrode layers, of the plurality of gate electrode layers, are coupled to an interconnection line to form a selection transistor, and the two or more gate electrode layers, of the selection transistor, are sequentially stacked in a vertical direction from the substrate, and
wherein each channel, of the plurality of channels, is surrounded by the two or more gate electrode layers, of the selection transistor, in the vertical direction from the substrate.
8. The method of claim 7 , wherein the selection transistor comprises:
an upper selection transistor comprising two or more gate electrode layers disposed at the top among the plurality of gate electrode layers.
9. The method of claim 8 , wherein the selection transistor comprises a lower selection transistor comprising two or more gate electrode layers disposed at the bottom among the plurality of gate electrode layers.
10. The method of claim 7 , wherein the two or more gate electrode layers of the selection transistor have a same thickness as other gate electrode layers of the plurality of gate electrode layers.
11. The method of claim 7 , further comprising:
forming a plurality of contacts connected to each of the two or more gate electrode layers, of the selection transistor, and coupled to the interconnection line.
12. The method of claim 7 , further comprising:
forming a pipe gate electrode layer having a pipe channel sacrifice layer buried therein, before the forming of the plurality of interlayer dielectric layer and gate electrode layers; and
removing the pipe channel sacrifice layer, before the forming of the memory layer,
wherein each channel hole, of the plurality of channels holes, comprises a pair of channel holes exposing the pipe channel sacrifice layer, and
wherein the memory layer and the channel are formed along sidewalls of the pair of channel holes and a space from which the pipe channel sacrifice layer is removed.
13. A method for fabricating a nonvolatile memory device, the method comprising:
alternately stacking a plurality of interlayer dielectric layers and a plurality of sacrifice layers over a substrate;
selectively etching the plurality of interlayer dielectric layers and the plurality of sacrifice layers to form a plurality of channel holes exposing the substrate;
forming a channel in each channel hole of the plurality of channel holes;
forming a slit to isolate the plurality of sacrifice layers between the plurality of channel holes;
removing the plurality of sacrifice layers exposed by the slit; and
forming a memory layer and gate electrode layers in spaces from which the plurality of sacrifice layers are removed,
wherein two or more gate electrode layers, of the gate electrode layers, are coupled to an interconnection line to form a selection transistor, and the two or more gate electrode layers, of the selection transistor, are sequentially stacked in a vertical direction from the substrate, and
wherein each channel is surrounded by the two or more gate electrode layers of the selection transistor in the vertical direction from the substrate.
14. The method of claim 13 , further comprising forming a pipe gate electrode layer having a pipe channel sacrifice layer buried therein, before the forming the plurality of interlayer dielectric layers and the gate electrode layers,
wherein the forming of the channel comprises:
removing the pipe channel sacrifice layer exposed by the plurality of channel holes; and
forming a memory layer and the channel along sidewalls of the plurality of channel holes and a space from which the pipe channel sacrifice layer is removed.