Silicon wafer and method for heat-treating silicon wafer
View Patent ↗A silicon wafer for preventing a void defect in a bulk region from becoming source of contamination and slip generation in a device process is provided. And a heat-treating method thereof for reducing crystal defects such as COP in a region near the wafer surface to be a device active region is provided. The silicon wafer has a surface region 1 which is a defect-free region and a bulk region 2 including void defect of a polyhedron whose basic shape is an octahedron in which a corner portion of the polyhedron is in the curved shape and an inner-wall oxide film the void defect is removed. The silicon wafer is provided by performing a heat-treating method in which gas to be supplied, inner pressure of spaces and a maximum achievable temperature are set to a predetermined value when subjecting the silicon wafer produced by a CZ method to RTP.
1. A method for heat-treating a silicon wafer which performs a rapid heating/cooling thermal process on the silicon wafer produced by a Czochralski method, the method comprising:
supplying an inert gas into a first space only on a front surface side of said silicon wafer where a semiconductor device is formed;
supplying an oxidizing gas into a second space only on a back surface side of said silicon wafer; and
performing the process at a maximum achievable temperature of from 1300° C. to 1400° C. for 1-15 seconds.
2. The method as claimed in claim 1 , wherein an oxygen partial pressure in said oxidizing gas is set to a range from 20% to 100%.
3. The method as claimed in claim 1 , wherein an oxide film formed on the back surface side of said silicon wafer after performing said rapid heating/cooling thermal process has a thickness of 15 nm or more.
4. The method as claimed in claim 1 , wherein the silicon wafer is cooled at 10 to 150° C./second.