IP Library Granted Patent US 8,905,109
Granted Patent B2
US 8,905,109 · App. 13/323,478 · Granted Dec 9, 2014

Apparatus for bonding substrates to each other

Inventors: Man Chung Ng (Kwai Chung, CN); Wai Lik Chan (Kwai Chung, CN); Kwok Kei Wong (Kwai Chung, CN)
Assignee: ASM Technology Singapore Pte. Ltd.
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Quick Facts
Patent No.
US 8,905,109
App. No.
13/323,478
Granted
Dec 9, 2014
Kind
B2
Abstract

An apparatus for bonding at least two substrates to each other comprises a plurality of substrate bonding machines arranged adjacent to one another and an input transporter extending adjacent to the plurality of substrate bonding machines which is operative to deliver the substrates to each of the substrate bonding machines. The input transporter is supplied with substrates by an onloading station. An output transporter extending adjacent to the plurality of substrate bonding machines is operative to receive bonded substrates from each of the substrate bonding machines and deliver the bonded substrates to an offloading station for removal from the apparatus.

Claims (17)

1. An apparatus for bonding at least two substrates to each other, comprising:

a plurality of substrate bonding machines arranged adjacent to one another;

an input transporter extending adjacent to the plurality of substrate bonding machines which is operative to deliver the substrates to each of the substrate bonding machines;

an onloading station for supplying substrates to the input transporter;

an output transporter extending adjacent to the plurality of substrate bonding machines which is operative to receive bonded substrates from each of the substrate bonding machines; and

an offloading station which receives bonded substrates from the output transporter,

wherein the input transporter comprises a first input transport device adjacent to a first substrate bonding machine and a second input transport device adjacent to a second substrate bonding machine,

wherein the first input transport device are configured to transport the substrates located on it to the second input transport device,

wherein the first and second transport devices each includes a conveyor mechanism coupled to a vertical positioning table, the vertical positioning table being operative to move the conveyor mechanism to different heights the first and second input transport devices being operable to transport the substrates along a conveying axis, and

wherein the first and second input transport devices overlap each other along the conveying axis at a common region, and one of the first and second input transport devices is operable to effect a motion relative to the respective other of the first and second input transport devices to transfer the substrates at the common region from the first input transport device to the second input transport device.

2. The apparatus as claimed in claim 1 , wherein the input transporter and the output transporter are located on opposite sides of the plurality of substrate bonding machines.

3. The apparatus as claimed in claim 1 , wherein the conveyor mechanisms comprise conveyor belts.

4. The apparatus as claimed in claim 1 , wherein the output transporter comprises a first output transport device adjacent to a first substrate bonding machine and a second output transport device adjacent to a second substrate bonding machine, the first output transport device being configured to transport the substrates located on it to the second output transport device.

5. The apparatus as claimed in claim 1 , further comprising:

input transfer arms which are operative to grip the substrates and to transfer the substrates from the input transporter to a work station of the substrate bonding machine; and

output transfer arms which are operative to grip the substrates and to transfer the substrates from the work station to the output transporter.

6. The apparatus as claimed in claim 1 , wherein the onloading station is situated at a single location for feeding substrates to the input transporter and the offloading station is situated at a single location for receiving bonded substrates from the output transporter.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 13, 2011
From: NG, MAN CHUNG; CHAN, WAI LIK; WONG, KWOK KEI
To: ASM TECHNOLOGY SINGAPORE PTE. LTD.
Reel/Frame 027370/0811 →
Continuity (1)
Related Publication 20130149839A1 · Jun 13, 2013