Transistors and semiconductor devices with oxygen-diffusion barrier layers
View Patent ↗Embodiments of transistors comprise a gate stack overlying a semiconductor material. The gate stack comprises a deposited oxide layer overlying the semiconductor material, an oxygen-diffusion barrier layer overlying the deposited oxide layer, a high-k dielectric layer overlying the oxygen-diffusion barrier layer, and a conductive material (e.g., an oxygen-gettering conductive material) overlying the high-k dielectric layer. When the conductive material is an oxygen-gettering conductive material, the oxygen-diffusion barrier layer prevents diffusion of oxygen from the deposited oxide layer to the oxygen-gettering conductive material.
1. A semiconductor device comprising:
a semiconductor device structure having a first region of a first semiconductor material and a second region of a second semiconductor material;
a first transistor comprising:
a first layer of a mobility-enhancing material in the first region; and
a first gate stack overlying the first layer, the first gate stack comprising:
a deposited oxide layer overlying the first layer, the deposited oxide layer having a first thickness,
an oxygen-diffusion barrier layer overlying the deposited oxide layer,
a first portion of a layer of high-k dielectric material overlying the oxygen-diffusion barrier layer, and
a first portion of a layer of conductive material overlying the first portion of the layer of high-k dielectric material, wherein sidewalls of the first portion of the layer of conductive material, sidewalls of the first portion of the layer of high-k dielectric material, and sidewalls of the oxygen-diffusion barrier layer of the first gate stack are vertically aligned; and
a second transistor comprising:
a second layer of the mobility-enhancing material in the second region; and
a second gate stack overlying the second layer, the second gate stack comprising:
an oxide layer overlying the second layer, the oxide layer having a second thickness, the second thickness being less than the first thickness,
a second portion of the layer of high-k dielectric material overlying the oxide layer of the second region, and
a second portion of the layer of conductive material overlying the second portion of the layer of high-k dielectric material.
2. The semiconductor device of claim 1 , wherein the first transistor comprises an I/O transistor and the second transistor comprises a logic transistor.
3. The semiconductor device of claim 1 , wherein the oxide layer comprises a nitrided oxide.
4. A transistor comprising:
a region of semiconductor material;
a layer of a mobility-enhancing material in the region of semiconductor material; and
a gate stack overlying the region of semiconductor material, the gate stack comprising:
a deposited oxide layer on the layer of the mobility-enhancing material;
an oxygen-diffusion barrier layer overlying the deposited oxide layer, the oxygen-diffusion barrier layer preventing diffusion of oxygen;
a high-k dielectric layer overlying the oxygen-diffusion barrier layer; and
an oxygen-gettering conductive layer overlying the high-k dielectric layer.
5. The transistor of claim 4 , wherein the deposited oxide layer comprises an oxide material having a thickness greater than 1 nm.
6. The transistor of claim 5 , wherein the thickness is in the range of 1 nm to 7 nm.
7. The transistor of claim 4 , wherein the mobility-enhancing material comprises silicon germanium.
8. The transistor of claim 4 , wherein the oxygen-diffusion barrier layer comprises a material chosen from silicon nitride, aluminum nitride, and germanium nitride.
9. The transistor of claim 4 , wherein the oxygen-gettering conductive layer comprises a metal nitride material.
10. The transistor of claim 9 , wherein the gate stack further comprises a layer of polycrystalline silicon overlying the metal nitride material.