Memory cells including top electrodes comprising metal silicide, apparatuses including such cells, and related methods
Memory cells (e.g., CBRAM cells) include an ion source material over an active material and an electrode comprising metal silicide over the ion source material. The ion source material may include at least one of a chalcogenide material and a metal. Apparatuses, such as systems and devices, include a plurality of such memory cells. Memory cells include an adhesion material of metal silicide between a ion source material and an electrode of elemental metal. Methods of forming a memory cell include forming a first electrode, forming an active material, forming an ion source material, and forming a second electrode including metal silicide over the metal ion source material. Methods of adhering a material including copper and a material including tungsten include forming a tungsten silicide material over a material including copper and treating the materials.
1. A memory cell comprising:
a first electrode;
an active material in electrical contact with the first electrode;
an ion source material over the active material;
a second electrode comprising a metal silicide over the ion source material; and
an electrically conductive adhesion material in contact with the ion source material and the second electrode, the electrically conductive adhesion material comprising at least one element of the ion source material and at least one of silicon and a metal silicide of the second electrode.
2. The memory cell of claim 1 , wherein:
the metal silicide of the second electrode is silicon-rich and comprises at least one of tungsten silicide, titanium silicide, cobalt silicide, tantalum silicide, manganese silicide, ruthenium silicide, and nickel silicide; and
the ion source material comprises a chalcogenide material and copper.
3. The memory cell of claim 1 , wherein the second electrode comprises tungsten silicide and the electrically conductive adhesion material comprises silicon.
4. The memory cell of claim 1 , wherein the metal silicide of the second electrode comprises a homogeneous silicon-rich metal silicide.
5. The memory cell of claim 1 , wherein the metal silicide of the second electrode comprises a silicon-rich metal silicide having a gradual change in concentration of silicon across a thickness of the second electrode.
6. The memory cell of claim 1 , wherein the active material comprises at least one of a transition metal oxide, an aluminum oxide, a silicon oxide, and a chalcogenide material.
7. The memory cell of claim 1 , wherein the ion source material comprises copper and at least one of tellurium and germanium.
8. The memory cell of claim 1 , further comprising a dielectric material between the first electrode and the active material, the dielectric material having an opening therethrough filled at least partially with a conductive material providing electrical contact between the first electrode and the active material.
9. The memory cell of claim 1 , wherein the electrically conductive adhesion material comprises at least one reaction product of the at least one element of the ion source material and the at least one of silicon and metal silicide of the second electrode.
10. A memory cell, comprising:
a first electrode on a side of a substrate;
an active material in electrical contact with the first electrode;
an ion source material on a side of the active material opposite the first electrode;
a second electrode formed of an elemental metal on a side of the ion source material opposite the active material and located distal to the substrate relative to the first electrode; and
an electrically conductive adhesion material including a metal silicide in electrical contact with the ion source material and the second electrode, the metal of the metal silicide and the elemental metal of the second electrode being the same element, the electrically conductive adhesion material also including at least one element of the ion source material.
11. The memory cell of claim 10 , wherein:
the second electrode comprises tungsten; and
the electrically conductive adhesion material comprises a silicon-rich tungsten silicide.
12. An apparatus comprising:
a plurality of memory cells, each memory cell of the plurality of memory cells comprising:
a first electrode;
an active material over the first electrode;
an ion source material comprising a metal over the active material; and
a second electrode comprising a metal silicide over the ion source material,
wherein the metal silicide comprises a silicon-rich metal silicide having a gradual change in concentration of silicon across a thickness of the second electrode and a higher concentration of silicon in a region of the metal suicide proximate to the ion source material.
13. The apparatus of claim 12 , wherein each memory cell of the plurality of memory cells further comprises an adhesion material at an interface between the second electrode and the ion source material.
14. The apparatus of claim 13 , wherein the adhesion material comprises one of the metal silicide and silicon.
15. A method of forming a memory cell, comprising:
forming a first electrode comprising a conductive material;
forming an active material over and in electrical contact with the first electrode;
forming an ion source material over the active material, the ion source material comprising a chalcogenide material and a metal;
forming a second electrode comprising a metal silicide over the ion source material; and
reacting materials at an interface between the second electrode and the ion source material to form an adhesion material comprising silicon of the metal silicide and at least one element of the ion source material at the interface between the second electrode and the ion source material.
16. The method of claim 15 , wherein:
forming an ion source material comprises forming a copper-tellurium material, a copper-tellurium-germanium material, or a copper-tellurium-silicon material; and
forming a second electrode comprising a metal silicide comprises forming a second electrode comprising tungsten silicide.
17. The method of claim 16 , wherein forming a second electrode comprising tungsten silicide comprises forming a homogeneous, silicon-rich tungsten silicide material.
18. The method of claim 17 , wherein forming a homogeneous, silicon-rich tungsten silicide material comprises forming a tungsten silicide material having between about 2.1 silicon atoms per tungsten atom and about 3.5 silicon atoms per tungsten atom.
19. The method of claim 16 , wherein forming a second electrode comprising tungsten silicide comprises forming a heterogeneous tungsten silicide material having a higher concentration of silicon in a portion of the second electrode proximate to the ion source material.
20. The method of claim 15 , wherein reacting materials at an interface between the second electrode and the ion source material comprises heating the second electrode.
21. A method of adhering a material including copper and a material including tungsten, the method comprising:
forming a first electrode on a substrate;
forming an active material in electrical contact with the first electrode;
forming a material including copper over the active material;
forming a tungsten silicide material over the material including copper; and
treating the material including copper and the tungsten silicide material to intermix at least one of copper from the material including copper, tungsten from the tungsten silicide material, and silicon from the tungsten silicide material across an interface between the material including copper and the tungsten silicide material.
22. The method of claim 21 , wherein forming the material including copper comprises forming a chalcogenide material including copper.
23. The method of claim 21 , wherein forming a tungsten silicide material comprises forming a substantially homogeneous silicon-rich tungsten silicide material.
24. The method of claim 21 , wherein forming a tungsten silicide material comprises forming a silicon-rich tungsten silicide material with a higher concentration of silicon in a region of the tungsten silicide material proximate to the material including copper.
25. The method of claim 21 , further comprising forming an adhesion material comprising one of silicon and tungsten silicide over and in contact with the material including copper and wherein forming a tungsten silicide material comprises forming tungsten silicide over and in contact with the adhesion material.