Electro-static discharge protection device
View Patent ↗An Electro-Static Discharge (ESD) protection device is provided. The ESD protection device includes a metal-oxide semiconductor (MOS) transistor, including a source area having a surface on which a first silicide is formed, the source area including a source connecting area including a first connecting portion formed on the first silicide, and a source extension area, a gate arranged in parallel with the source area, and a drain area arranged in parallel with the source area and the gate, the drain area having a surface on which a second silicide is formed, the drain area including a drain connecting area formed opposite the source extension area, the drain connecting area including second connection portion formed on the second silicide, and a drain extension area formed opposite the source connecting area.
1. An Electro-Static Discharge (ESD) protection device, comprising:
a metal-oxide semiconductor (MOS) transistor, comprising:
a source area having a surface on which a first silicide is formed, the source area comprising:
a source connecting area comprising a first connecting portion formed on the first silicide; and
a source extension area;
a gate arranged in parallel with the source area; and
a drain area arranged in parallel with the source area and the gate, the drain area having a surface on which a second silicide is formed, the drain area comprising:
a drain connecting area formed opposite the source extension area, the drain connecting area comprising second connection portion formed on the second silicide; and
a drain extension area formed opposite the source connecting area,
wherein the ESD protection device is configured to protect an internal circuit from ESD.
2. The ESD protection device of claim 1 , further comprising:
a first metal portion and a second metal portion that are spaced apart from a surface of the MOS transistor and arranged in parallel in a direction perpendicular to an arrangement direction of the source area, the gate and the drain area,
wherein the first connecting portion is connected to the first metal portion and the second connecting portion is connected to the second metal portion.
3. The ESD protection device of claim 2 , wherein the first metal portion is connected to a ground line, and the second metal portion is connected to an electric power line from which an ESD stress current is flowed in.
4. The ESD protection device of claim 2 , wherein the first metal portion and the second metal portion are spaced apart from each other.
5. The ESD protection device of claim 2 , wherein the first metal portion and the second metal portion are arranged on the same layer.
6. The ESD protection device of claim 1 , wherein each of the first connecting portion and the second connecting portion comprises at least one contact through an insulating layer.
7. The ESD protection device of claim 1 , wherein:
the first silicide has a first predetermined size based on a center of the source area, a portion of the source area being exposed from a boundary of the source area; and
the second silicide has a second predetermined size based on a center of the drain area, a portion of the drain area being exposed from a boundary of the drain area.
8. The ESD protection device of claim 1 , wherein a spacing between the second connecting portion and the gate is greater than a spacing between the first connecting portion and the gate.
9. The ESD protection device of claim 1 , wherein:
the first connecting portion is spaced apart in a range of 0.11 μm to 1 μm from the gate; and
the second connecting portion is spaced apart in a range of 1 μm to 5 μm from the gate.
10. The ESD protection device of claim 1 , wherein the MOS transistor comprises a gate-grounded NMOS transistor.
11. The ESD protection device of claim 1 , wherein the MOS transistor comprises a high voltage gate-grounded NMOS transistor.
12. The ESD protection device of claim 11 , further comprising:
a first low-concentration drift area formed below the drain area; and
a second low-concentration drift area formed below the source area.
13. The ESD protection device of claim 12 , further comprising:
a logic well implant area being implanted below the drain area such that the logic well implant area implants a dopant into the first low-concentration drift area that has a depth that is greater than a depth of the first low-concentration drift area.
14. The ESD protection device of claim 13 , wherein the logic well implant area comprises a retrograde well.
15. The ESD protection device of claim 1 , wherein the MOS transistor comprises a multi-finger structure including at least two gates.
16. The ESD protection device of claim 1 , wherein the gate comprises a silicide area formed on the gate.
17. The ESD protection device of claim 1 , wherein:
the first connecting portion is one of a plurality of first connecting portions, the first connecting portions being connected to the first metal portion; and
the second connecting portion is one of a plurality of second connecting portions, the second connecting portions being connected to the second metal portion.
18. An Electro-Static Discharge (ESD) protection device, comprising:
a metal-oxide semiconductor (MOS) transistor having a source area, a gate, and a drain area arranged in parallel;
a first silicide formed on a surface of the source area;
a second silicide formed on a surface of the drain area;
a first connector formed on the first silicide; and
a second connector formed on the second silicide such that the second connector is free from facing the first connector,
wherein:
the first silicide extends to a source extension area on the source area that faces the second connector; and
the second silicide extends to a drain extension area on the drain area that faces the first connector.
19. The ESD protection device of claim 18 , wherein the ESD protection device is configured to protect an internal circuit from ESD.