Low dielectric photoimageable compositions and electronic devices made therefrom
View Patent ↗This invention relates generally to silicon based photoresist compositions that can be used in forming low k dielectric constant materials suitable for use in electronic devices, methods of their use and the electronic devices made therefrom.
1. A photoimageable dielectric composition comprising:
(a) an alkali soluble polymer having at least one repeating unit of formula:
having a plurality of functional end groups, where R 1 is a non-hydrolysable group and n is an integer ranging from 1 to 3 where the polymer is capable of being crosslinked with a crosslinking catalyst,
(b) a water soluble organic polymer miscible with the alkali soluble polymer, and
(c) a crosslinking catalyst which is selected from at least one of a photoacid generator and a photobase generator.
2. The composition of claim 1 wherein the non-hydrolysable group is selected from hydrogen, substituted alkyl, alkyl, substituted monocycloalkyl, monocycloalkyl, polycycloalkyl, substituted polycycloalkyl, substituted monocyclicaryl, monocyclic aryl, substituted polycyclic aryl, polycyclicaryl, substituted monocyclic aralkyl, monocyclic aralkyl, polycyclic aralkyl, substituted polycyclic aralkyl, carboxy and carbinol.
3. The composition of claim 1 , wherein the functional end groups are chosen from hydroxy, alkoxys, epoxies, oxetanes, vinyl ethers, maleimides, phenols, (meth)acrylates, thiols, carboxylic esters, carbonyl functionalities and sulphonate esters.
4. The composition of claim 1 , wherein the water soluble organic polymer has a glass transition temperature greater than about 100° C. and a dielectric constant less than about 10.
5. The composition of claim 1 , wherein the water soluble organic polymer miscible with the alkali soluble polymer is present in the composition in an amount of 0.1 to 35 wt %.
6. The composition of claim 1 further comprising a quencher.
7. The composition of claim 1 , wherein the water soluble organic polymer comprises monomeric units derived from vinyl lactams, vinyl lactones, vinylimidazoles, vinylpyrrolidone, vinyl alcohols, vinyl acetates, or co-polymers thereof.