Method and apparatus for high pressure sensor device
View Patent ↗A pressure sensor package is provided that reduces the occurrence of micro gaps between molding material and metal contacts that can store high-pressure air. The present invention provides this capability by reducing or eliminating interfaces between package molding material and metal contacts. In one embodiment, a control die is electrically coupled to a lead frame and then encapsulated in molding material, using a technique that forms a cavity over a portion of the control die. The cavity exposes contacts on the free surface of the control die that can be electrically coupled to a pressure sensor device using, for example, wire bonding techniques. In another embodiment, a region of a substrate can be encapsulated in molding material, using a technique that forms a cavity over a sub-portion of the substrate that includes contacts. A pressure sensor device can be electrically coupled to the exposed contacts.
1. A method for forming a packaged semiconductor device assembly, the method comprising:
providing a lead frame comprising a plurality of leads and a device flag;
affixing a semiconductor device die to the device flag, wherein the semiconductor device die comprises a first and second major surface, the first major surface is affixed to the device flag, and the second major surface provides a surface embodied within the packaged semiconductor device assembly, wherein the surface comprises a plurality of electrical contacts;
forming an encapsulated region over a first portion of the surface using an encapsulant, wherein
said forming the encapsulated region provides a cavity region over a second portion of the surface,
a first subset of the plurality of electrical contacts is located on the second portion of the surface, and
an interface between the encapsulant and the surface along an entire border of the cavity region comprises no electrical contacts;
affixing a first semiconductor device on a portion of the second portion of the surface; and
electrically coupling the first semiconductor device to one or more of the first subset of electrical contacts; and
electrically coupling the semiconductor device die to one or more of the plurality of leads, wherein
said electrically coupling comprises coupling one or more of a second subset of the plurality of the electrical contacts to corresponding leads, and
said forming the encapsulated region comprises encapsulating the lead frame, electrical contacts of the semiconductor device die coupled to the lead frame, and a portion of the semiconductor device die excluding the second portion of the surface.
2. The method of claim 1 wherein
the semiconductor device die is a control die,
the first semiconductor device is a pressure sensor, and
the control die is configured to process signals from the pressure sensor.
3. The method of claim 1 further comprising:
placing a silicone gel in the cavity region and over and surrounding the first semiconductor device; and
placing a pressure permeable cap over the cavity region.
4. A high pressure sensor device package comprising:
a control die comprising a plurality of contacts on a first major surface of the control die;
encapsulant formed over a portion of the control die, wherein
the encapsulant defines a cavity region over a portion of the first major surface of the control die,
the cavity region exposes a subset of the plurality of contacts, and
an exposed interface between the encapsulant and the first major surface of the control die comprises none of the plurality of contacts; and
a semiconductor device affixed to the first major surface of the control die in the cavity region and electrically coupled to one or more of the exposed subset of the plurality of contacts.
5. The high pressure sensor device package of claim 4 further comprising:
a lead frame comprising a plurality of leads and a device flag, wherein
the control die is affixed to the device flag at a second major surface of the control die,
the control die is electrically coupled to one or more of the plurality of leads, and
the encapsulant is further formed over the lead frame and electrical coupling of the control die to the leads.
6. The high pressure sensor device package of claim 4 further comprising:
a silicone gel in the cavity region and over and surrounding the semiconductor device; and
a pressure permeable cap over the cavity region.
7. The high pressure sensor device package of claim 4 wherein the semiconductor device affixed to the first major surface of the control die is a pressure sensor.
8. An automobile tire pressure monitoring system comprising the high pressure sensor device package of claim 7 .