IP Library Granted Patent US 8,896,683
Granted Patent B2
US 8,896,683 · App. 13/376,611 · Granted Nov 25, 2014

Device for forming a high-resolution image, imaging system, and method for deriving a high-spatial-resolution image

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,896,683
App. No.
13/376,611
Granted
Nov 25, 2014
Kind
B2
Abstract

A device for forming a high-resolution image of an object is provided. The device comprises: an electronic camera for capturing an intermediate image of the object, an illumination system for forming a spatial modulation pattern on the object; and a spatial demodulator for performing a spatial demodulation, which is at least partially matched to the spatial modulation pattern. A method for deriving a high-spatial-resolution image from a set of images captured from a structure of an object is derived, wherein the illumination of the object is spatially-modulated, wherein the illumination of the object has a spatial modulation pattern, which is substantially periodic, wherein one of at least one prevailing orientation of the periodic illumination is arranged substantially perpendicularly to at least one prevailing orientation of the structure of the object.

Claims (40)

1. A device for forming a high-resolution image of an object, comprising:

an electronic camera for capturing a plurality of intermediate images of the object;

an illumination system for forming a spatial modulation pattern on the object;

a spatial demodulator for performing a spatial demodulation, which is at least partially matched to the spatial modulation pattern; and

a phase detector for detecting a phase of a spatial modulation pattern from examination of at least one of the inter intermediate images.

2. The device according to claim 1 , wherein the device comprises a unit for spatial light modulation for synthesizing a spatial modulation pattern for performing the spatial demodulation at least partially matched to the spatial modulation pattern.

3. The device according to claim 1 , wherein the device comprises a Fourier-transform calculator for calculating at least one of a Fourier transform and an inverse Fourier transform of at least one of the intermediate images for a direction substantially vertically to a first prevailing direction of the spatial modulation pattern.

4. The device according to claim 1 , wherein the image size is corrected to be substantially equal to an integer number of spatial periods of the spatial modulation pattern in at least one of the intermediate images.

5. An imaging system comprising:

a stage for holding an object to be imaged;

a lens;

an electronic camera for capturing a plurality of intermediate images of the object;

an illumination system for forming spatial modulation pattern on the object; and

a spatial demodulator for performing a spatial demodulation, which is at least partially matched to the spatial modulation pattern, wherein the spatial demodulator uses a spatial modulation contrast as a parameter of a calculation in performing the spatial demodulation.

6. The imaging system according to claim 5 , wherein a transfer function of the linear digital filter substantially compensates distortions introduced by at least one of the lenses and the electronic camera.

7. The imaging system according to claim 5 , wherein the lens is at least one of a photon lens, an electron lens, a positron lens, a proton lens, an ion lens, a neutron lens, and a lens for acoustical waves.

8. The imaging system according to claim 5 , wherein at least one of following applies:

the object is moved in an object plane of the imaging system in relation to at least one of the lens and the illumination system, wherein the spatial modulation pattern is formed in the object plane, and

a source pattern of the spatial modulation pattern is moved in a spatial modulation plane of the illumination system in relation to the lens, wherein the spatial modulation pattern is formed in the object plane.

9. The imaging system according to claim 5 , wherein at least one of following applies:

the stage comprises a driver for moving the object in an object plane in relation to the illumination system; and

a source pattern of the spatial modulation pattern is installed on a driver for moving the source pattern in a spatial modulation plane of the illumination system.

10. The imaging system according to claim 5 , wherein a source pattern of the spatial modulation pattern is formed using at least one of a liquid crystal array, a micro mirror array, a film, and a mirror.

11. The imaging system according to claim 5 , wherein the illumination system is designed to form the spatial modulation pattern by creating standing waves.

12. The imaging system according to claim 5 , wherein the illumination system is designed to form the spatial modulation pattern using at least one of a laser scanning unit, an array of light emitted diodes, and an array of lasers.

13. The imaging system according to claim 5 , wherein the illumination system is designed to form the spatial modulation pattern in bright field or in dark field illumination of the object.

14. The imaging system according to claim 5 , wherein the illumination system is designed to form the spatial modulation pattern for observation of the object in transmitted light or in reflected light.

15. The imaging system according to claim 5 , wherein the illumination system is designed to form the spatial modulation pattern for observation of a fluorescence of the object.

16. A method for deriving a high-spatial-resolution image from a set of images captured from a structure of an object, comprising:

illuminating the object, wherein the illumination of the object has a spatial modulation pattern which is substantially periodic, wherein at least one prevailing orientation of the periodic illumination is arranged substantially perpendicularly to at least one prevailing orientation of the structure of the object;

capturing a plurality of intermediate images of the object, wherein an intermediate image is formed by shifting a location of an image of the spatial modulation pattern on the object;

correcting a size of an intermediate image of the intermediate images to be substantially equal to an integer number of spatial periods of the spatial modulation pattern;

applying a filter to the intermediate images of the object; and

applying digital demodulation to the filtered intermediate images.

17. The device of claim 1 , wherein the detecting comprises detecting the phase that corresponds to a maximum amplitude of a spatial spectrum in a zone near a known value of a spatial frequency υ M of the spatial modulation pattern.

18. The device of claim 17 , further comprising calculating a spatial period of the spatial modulation pattern as a period in pixels corresponding to a spatial frequency of the maximum amplitude of the spatial spectrum in the zone near the known value of the spatial frequency υ M of the spatial modulation pattern.

19. The imaging system of claim 8 , wherein the capturing the plurality of images and the moving the object or the spatial modulation pattern comprises capturing images based upon one of the two following sets of positions:

an initial position, a shift of the spatial modulation pattern relative to the object ⅓ of the spatial period of the spatial modulation pattern and a shift −⅓ of the spatial period of the spatial modulation pattern from the initial position along a first axis, and a shift of the spatial modulation pattern relative to the object ⅓ of the spatial period of the spatial modulation pattern and a shift −⅓ of the spatial period of the spatial modulation pattern from the initial position along a second axis, wherein the second axis is perpendicular to the first axis; and

an initial position, a shift of the spatial modulation pattern relative to the object ⅓ of the spatial period of the spatial modulation pattern and a shift −⅓ of the spatial period of the spatial modulation pattern from the initial position along a first axis, a shift of the spatial modulation pattern relative to the object ⅓ of the spatial period of the spatial modulation pattern and a shift −⅓ of the spatial period of the spatial modulation pattern from the initial position along a second axis, wherein the second axis is rotated approximately 60 degrees from the first axis, and a shift of the spatial modulation pattern relative to the object ⅓ of the spatial period of the spatial modulation pattern and a shift −⅓ of the spatial period of the spatial modulation pattern from the initial position along a third axis, wherein the third axis is rotated approximately −60 degrees from the first axis.

20. The device of claim 1 , wherein the spatial demodulator is to use two 3 by 3 complex arrays in performing spatial demodulation.

Assignments (31)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042985 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042762 FRAME 0145. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051145/0184 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051030/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0387 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050745/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040632 FRAME: 0001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Sep 21, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 044209/0047 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042985/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042762/0145 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 040632/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12092129 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Jul 14, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039361/0212 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
SECURITY AGREEMENT SUPPLEMENT Recorded Mar 7, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 038017/0058 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0439 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0447 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0379 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Mar 7, 2012
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 027821/0662 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Mar 7, 2012
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 027821/0982 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Mar 7, 2012
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 027821/0967 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 7, 2011
From: BOROVYTSKY, VOLODYMYR
To: FREESCALE SEMICONDUCTOR INC
Reel/Frame 027341/0996 →