Method for heat treating a silicon wafer
View Patent ↗The invention is to provide a method for heat treating a silicon wafer reducing grown-in defects while suppressing generation of slip during RTP and improving surface roughness of the wafer. The method performing a first heat treatment while introducing a rare gas, the first heat treatment comprising the steps of rapidly heating the wafer to T 1 of 1300° C. or higher and the melting point of silicon or lower, keeping the wafer at T 1 , rapidly cooling the wafer to T 2 of 400-800° C. and keeping the wafer at T 2 ; and performing a second heat treatment while introducing an oxygen gas in an amount of 20-100 vol. %, the second heat treatment comprising the steps of keeping the wafer at T 2 , rapidly heating the wafer from T 2 to T 3 of 1250° C. or higher and the melting point of silicon or lower, keeping the wafer at T 3 and rapidly cooling the wafer.
1. A method for heat treating a silicon wafer comprising the steps of:
producing a silicon single crystal ingot grown by Czochralski process;
slicing the silicon single crystal ingot into plural silicon wafers;
performing a first heat treatment process on the silicon wafer while introducing a first gas including a rare gas, the first heat treatment comprising:
rapidly heating the silicon wafer to a first temperature range of 1300° C. or higher and the melting point of silicon or lower at a first heating rate;
keeping the silicon wafer at the first temperature;
rapidly cooling the silicon wafer to a second temperature range of 400° C. or higher and 800° C. or lower at a first cooling rate; and
keeping the silicon wafer at the second temperature; and
performing a second heat treatment process on the silicon wafer while stopping introducing the first gas and instead, introducing a second gas including an oxygen gas in an amount of 20 vol. % or more and 100 vol. % or less; the second heat treatment comprising:
further keeping the silicon wafer at the second temperature;
rapidly heating the silicon wafer from the second temperature to a third temperature range of 1250° C. or higher and the melting point of silicon or lower at a second heating rate;
keeping the silicon wafer at the third temperature; and
rapidly cooling the silicon wafer from the third temperature at a second cooling rate.
2. The method according to claim 1 , wherein the first temperature is range of 1300° C. or higher and 1380° C. or lower and the third temperature is range of 1250° C. or higher and 1380° C. or lower.
3. The method according to claim 2 , wherein the first cooling rate is 20° C./sec or more and 150° C./sec or less.
4. The method according to claim 3 , wherein the second heating rate is 20° C./sec or more and 150° C./sec or less.
5. The method according to claim 2 , wherein the second heating rate is 20° C./sec or more and 150° C./sec or less.
6. The method according to claim 1 , wherein the first cooling rate is 20° C./sec or more and 150° C./sec or less.
7. The method according to claim 6 , wherein the second heating rate is 20° C./sec or more and 150° C./sec or less.
8. The method according to claim 1 , wherein the second heating rate is 20° C./sec or more and 150° C./sec or less.