Mask inspection method and mask inspection apparatus
View Patent ↗According to one embodiment, a method of detecting a defect of a semiconductor exposure mask includes acquiring a background intensity from a surface height distribution of the mask, acquiring a standard background intensity distribution from the background intensity, making light of an arbitrary wavelength incident on the mask, and acquiring an image at a position of interest of the mask, acquiring background intensity raw data, based on a signal intensity of the acquired image at the position of interest and a mean value of image intensity data in a peripheral area of the position of interest, finding a correction coefficient of the signal intensity, based on a ratio of the background intensity raw data to the standard background intensity distribution, correcting the signal intensity by multiplying the signal intensity.
1. A method of detecting a defect of a semiconductor exposure mask, comprising:
acquiring background intensities at a plurality of points on the mask from a surface height distribution of the mask;
acquiring a standard background intensity distribution from the background intensities using a fitting approximation;
making light of an arbitrary wavelength incident on the mask, and acquiring an image at a position of interest of the mask;
acquiring background intensity raw data, based on a signal intensity of the acquired image at the position of interest and a mean value of image intensity data in a peripheral area of the position of interest;
finding a correction coefficient of the signal intensity, based on a ratio of the background intensity raw data to the standard background intensity distribution;
correcting the signal intensity by multiplying the signal intensity at the position of interest by the correction coefficient; and
determining whether the corrected signal intensity is a predetermined threshold or more.
2. The method of claim 1 , wherein acquiring the background intensities includes scanning a reduced number of scanning lines such that a time that is needed for scanning is shorter than a time in which a light intensity variation of a light source occurs.
3. The method of claim 2 , wherein acquiring the background intensities includes acquiring only image intensity data in a direction crossing the scanning lines.
4. The method of claim 1 , wherein the semiconductor exposure mask is a blank mask for extreme-ultraviolet exposure.
5. The method of claim 1 , wherein the light of the arbitrary wavelength is extreme-ultraviolet light.
6. The method of claim 1 , wherein the acquired image at the position of interest of the mask is a dark-field image.
7. An apparatus for detecting a defect of a semiconductor exposure mask, the apparatus comprising:
an optical system configured to make light of an arbitrary wavelength incident on the mask; and
a controller configured to control the optical system, the controller being configured to execute:
acquiring background intensities at a plurality of points on the mask from a surface height distribution of the mask;
acquiring a standard background intensity distribution from the background intensities using a fitting approximation;
making light of an arbitrary wavelength incident on the mask, and acquiring an image at a position of interest of the mask;
acquiring background intensity raw data, based on a signal intensity of the acquired image at the position of interest and a mean value of image intensity data in a peripheral area of the position of interest;
finding a correction coefficient of the signal intensity, based on a ratio of the background intensity raw data to the standard background intensity distribution;
correcting the signal intensity by multiplying the signal intensity at the position of interest by the correction coefficient; and
determining whether the corrected signal intensity is a predetermined threshold or more.
8. The apparatus of claim 7 , wherein the controller is configured to cause, at a time of acquiring the background intensities, a reduced number of scanning lines such that a time that is needed for scanning is shorter than a time in which a light intensity variation of a light source occurs.
9. The apparatus of claim 8 , wherein the controller is configured to, at the time of acquiring the background intensities, acquire only image intensity data in a direction crossing the scanning lines.
10. The apparatus of claim 7 , wherein the semiconductor exposure mask is a blank mask for extreme-ultraviolet exposure.
11. The apparatus of claim 7 , wherein the light of the arbitrary wavelength is extreme-ultraviolet light.
12. The apparatus of claim 7 , wherein the acquired image at the position of interest of the mask is a dark-field image.
13. The apparatus of claim 7 , wherein the controller includes:
a bus; and
a processor which is electrically connected to the bus and configured to control an operation of the controller.
14. The apparatus of claim 13 , wherein the controller further includes a detector interface which is electrically connected to the bus and a detector.
15. The apparatus of claim 13 , wherein the controller further includes a control program for executing procedures relating to a method of inspecting the defect of the mask, the control program being executed according to control of the processor.
16. The apparatus of claim 15 , wherein the controller further includes:
a ROM which is electrically connected to the bus and in which the control program is nonvolatilely stored; and
a RAM which is electrically connected to the bus and in which a work area for storing at least the acquired background intensity is formed.