Photoresist compositions and methods of forming photolithographic patterns
View Patent ↗Provided are photoresist compositions useful in forming photolithographic patterns. Also provided are substrates coated with the photoresist compositions and methods of forming photolithographic patterns. The compositions, methods and coated substrates find particular applicability in the manufacture of semiconductor devices.
1. A photoresist composition, comprising:
a first polymer comprising units of the following general formulae (I), (II) and (III):
wherein: R 1 represents a C 1 to C 3 alkyl group; R 2 represents a C 1 to C 3 alkylene group; R 3 represents hydrogen or methyl; L 1 represents a lactone group; and n is 1 or 2;
a second polymer which is a C 3 to C 7 alkyl (meth)acrylate homopolymer or copolymer, wherein the second polymer is free of silicon and fluorine and is free of photoacid-labile groups; and
a photoacid generator.
2. The photoresist composition of claim 1 , wherein the first polymer is represented by the following formula:
wherein: 0.3<a<0.7; 0.3<b<0.6; and 0.1<c<0.3.
3. The photoresist composition of claim 1 , wherein the first polymer further comprises a second unit of the general formula (I), wherein R 1 in the first and second units of general formula (I) are different.
4. The photoresist composition of claim 3 , wherein the first polymer is represented by the following formula:
wherein: 0.1<a<0.5; 0.1<b<0.5; 0.2<c<0.6; and 0.1<d<0.3.
5. The photoresist composition of claim 1 , wherein the first polymer further comprises a unit of the following general formula (IV):
wherein: L 2 is a lactone group; and the unit of general formula (IV) is different from the unit of general formula (II).
6. The photoresist composition of claim 5 , wherein the first polymer is represented by the following formula:
wherein: 0.3<a<0.7; 0.1<b<0.4; 0.1<c<0.4, and 0.1<d<0.3.
7. The photoresist composition of claim 5 , wherein L 1 and L 2 are independently chosen from the following lactone groups:
8. The photoresist composition of claim 1 , wherein the second polymer is a poly(n-butyl methacrylate) homopolymer.
9. The photoresist composition of claim 1 , wherein the second polymer is a copolymer comprising units of n-butyl methacrylate and a second C 3 to C 7 alkyl (meth)acrylate different from the n-butyl methacrylate.
10. A coated substrate, comprising a substrate and a layer of a photoresist composition of claim 1 over a surface of the substrate.
11. A method of forming a photolithographic pattern, comprising:
(a) providing a substrate comprising one or more layer to be patterned over a surface of the substrate;
(b) applying a layer of a photoresist composition of claim 1 over the one or more layer to be patterned;
(c) patternwise exposing the photoresist composition layer to actinic radiation;
(d) heating the exposed photoresist composition layer in a post-exposure bake process; and
(e) applying a developer to the photoresist composition layer to remove a portion of the photoresist layer, thereby forming a photoresist pattern, wherein unexposed regions of the photoresist layer are removed by the developer to form the photoresist pattern.
12. The method of claim 11 , wherein the developer comprises 2-heptanone.
13. The method of claim 11 , wherein the developer comprises n-butyl acetate.
14. The method of claim 11 , wherein the first polymer is represented by the following formula:
wherein: 0.3<a<0.7; 0.3<b<0.6; and 0.1<c<0.3.
15. The method of claim 11 , wherein the first polymer further comprises a second unit of the general formula (I), wherein R 1 in the first and second units of general formula (I) are different.
16. The method of claim 15 , wherein the first polymer is represented by the following formula:
wherein: 0.1<a<0.5; 0.1<b<0.5; 0.2<c<0.6; and 0.1<d<0.3.
17. The method of claim 11 , wherein the first polymer further comprises a unit of the following general formula (IV):
wherein: L 2 is a lactone group; and the unit of general formula (IV) is different from the unit of general formula (II).
18. The method of claim 11 , wherein the second polymer is a poly(n-butyl methacrylate) homopolymer.
19. The method of claim 11 , wherein the second polymer is a copolymer comprising units of n-butyl methacrylate and a second C 3 to C 7 alkyl (meth)acrylate different from the n-butyl methacrylate.