Structure and method of forming enhanced array device isolation for implanted plate EDRAM
A memory device is provided including a semiconductor on insulator (SOI) substrate including a first semiconductor layer atop a buried dielectric layer, wherein the buried dielectric layer is overlying a second semiconductor layer. A capacitor is present in a trench, wherein the trench extends from an upper surface of the first semiconductor layer through the buried dielectric layer and extends into the second semiconductor layer. A protective oxide is present in a void that lies adjacent the first semiconductor layer, and a pass transistor is present atop the semiconductor on insulator substrate in electrical communication with the capacitor.
1. A memory device comprising:
a semiconductor on insulator (SOI) substrate including a first semiconductor layer atop a buried dielectric layer, wherein the buried dielectric layer is entirely located above a topmost surface of a second semiconductor layer;
a capacitor present in a trench, wherein the trench extends from an upper surface of the first semiconductor layer through the buried dielectric layer and extends into the second semiconductor layer and the capacitor includes a bottom electrode having a surface in direct physical contact with a bottommost surface of the buried dielectric layer, wherein a protective oxide is present in a void that lies adjacent the first semiconductor layer, said protective oxide having a topmost surface that is coplanar with a topmost surface of said first semiconductor layer, a bottommost surface that is in direct physical contact with a topmost surface of said buried dielectric layer and a sidewall surface that is in directly physical contact with a sidewall surface of said first semiconductor material; and
a pass transistor present atop the semiconductor on insulator substrate in electrical communication with the capacitor;
wherein said protective oxide is present only on one side of the trench, and wherein a doped polysilicon region is present on another side of the trench; and
wherein a top trench oxide is positioned between said protective oxide and said doped polysilicon region.
2. The memory device of claim 1 , wherein said void has a width from 2 nm to 10 nm.
3. The memory device of claim 1 , wherein a width of the trench within the second semiconductor layer is greater than a width of the trench located above the second semiconductor layer.
4. The memory device of claim 1 , wherein said protective oxide has an outer vertical edge that is vertically coincident to an edge of the buried dielectric layer.
5. The memory device of claim 1 , wherein said first semiconductor layer has a vertical edge that is laterally offset from a vertical edge of said buried dielectric layer.
6. The memory device of claim 1 , wherein said protective oxide is a thermal oxide.
7. The memory device of claim 1 , wherein said protective oxide entirely fills said void.
8. The memory device of claim 1 , wherein said protective oxide partially fills said void.
9. The memory device of claim 1 , wherein said protective oxide entirely fills said void and has a portion that extends beyond a sidewall of said trench.
10. A memory device comprising:
a semiconductor on insulator (SOI) substrate including, from top to bottom, a first semiconductor layer, a buried dielectric layer, and a second semiconductor layer, wherein said first semiconductor layer has a recessed vertical edge relative to at least a vertical edge of said buried dielectric layer, and wherein the buried dielectric layer is entirely located above a topmost surface of said second semiconductor layer;
a protective oxide positioned adjacent said recessed vertical edge of said first semiconductor layer, said protective oxide having a topmost surface that is coplanar with a topmost surface of said first semiconductor layer, a bottommost surface that is in direct physical contact with a topmost surface of said buried dielectric layer and a sidewall surface that is in directly physical contact with a sidewall surface of said first semiconductor material;
a capacitor present in a trench, wherein the trench extends from an upper surface of the SOI substrate through the buried dielectric layer and extends into the second semiconductor layer, wherein the capacitor includes a bottom electrode having a surface in direct physical contact with a bottommost surface of the buried dielectric layer, and
a pass transistor present atop the semiconductor on insulator substrate in electrical communication with the capacitor;
wherein said protective oxide is present only on one side of the trench, and wherein a doped polysilicon region is present on another side of the trench; and
wherein a top trench oxide is positioned between said protective oxide and said doped polysilicon region.
11. The memory device of claim 10 , wherein said protective oxide has an outer vertical edge that is vertically coincident to an edge of the buried dielectric layer.
12. The memory device of claim 10 , wherein said protective oxide is a thermal oxide.
13. The memory device of claim 10 , wherein said protective oxide has an outer vertical edge that is not vertically coincident to an edge of said trench.