Systems and methods for cleaving a bonded wafer pair
View Patent ↗Systems and methods are provided for mechanically cleaving a bonded wafer pair by controlling the rate of cleaving. This controlled rate of cleaving results in a reduction or elimination of non-uniform thickness variations in the cleaved surface of the resulting SOI wafer. One embodiment uses flexible chucks attached to the faces of the wafers and actuators attached to the flexible chucks to cleave the bonded wafer pair. Other embodiments also use rollers in contact with the surfaces to control the rate of cleaving.
1. A system for cleaving a bonded wafer pair having a first face and a second face, the system comprising:
a flexible chuck comprising a flexible plate and a flexible wafer support having a first surface for attachment to the first face of the wafer pair and an opposing second surface for attachment to a first surface of the flexible plate; and
an actuator attached to the flexible chuck for application of force on the flexible chuck, the application of force on the flexible chuck causing the cleaving of the bonded wafer pair.
2. The system of claim 1 wherein the actuator is attached to the flexible chuck with adhesive.
3. The system of claim 1 wherein the actuator is selectively attachable to the flexible chuck using vacuum.
4. The system of claim 1 in combination with the bonded wafer pair, wherein the flexible chuck has a stiffness less than or equal to a stiffness of the bonded wafer pair.
5. The system of claim 1 wherein the flexible chuck is a first flexible chuck and the system further comprises a second flexible chuck connected to the second face of the wafer pair.
6. The system of claim 5 wherein the actuator is a first actuator and the system further comprises a second actuator connected to the second flexible chuck for application of force to the second face.
7. A system for cleaving a bonded wafer pair having a first face and a second face, the system comprising:
a first flexible chuck for attachment to the first face of the wafer pair;
a second flexible chuck for attachment to the second face of the wafer pair;
an actuator for attachment to the first flexible chuck;
a movable roller positionable adjacent the actuator for application of force on the first flexible chuck and movable along the first flexible chuck,
wherein the position of the roller controls the propagation of the cleave of the bonded wafer pair.
8. The system of claim 7 wherein the actuator is attached to the first flexible chuck with adhesive.
9. The system of claim 7 wherein the actuator is selectively attachable to the first flexible chuck using vacuum.
10. The system of claim 7 further comprising a blade for insertion between layers of the bonded wafer pair to initiate cleaving of the bonded wafer pair.
11. The system of claim 7 wherein the actuator is a first actuator and the system further comprises a second actuator connected to the second flexible chuck for application of force to the second face.
12. The system of claim 11 wherein the movable roller is a first movable roller and the system further comprises a second movable roller positioned adjacent the second actuator for application of force on the second flexible chuck and movable along the second flexible chuck.
13. A system for cleaving a bonded wafer pair having a first face and a second face, the system comprising:
a first flexible chuck for attachment to the first face of the wafer pair;
a second flexible chuck for attachment to the second face of the wafer pair;
a first vacuum attachment for attachment to the first flexible chuck;
a second vacuum attachment for attachment to the second flexible chuck;
a movable first roller positionable adjacent the first vacuum attachment for application of force on the first flexible chuck and movable along the first flexible chuck; and
a movable second roller positionable adjacent the second vacuum attachment for application of force on the second flexible chuck and movable along the second flexible chuck,
wherein the position of the first and second rollers controls the propagation of the cleave of the wafer pair.
14. The system of claim 13 further comprising a blade for insertion between layers of the bonded wafer pair to initiate cleaving of the bonded wafer pair.
15. The system of claim 13 wherein an upward force is applied to the first face of the bonded wafer pair by the first vacuum attachment.
16. The system of claim 15 wherein a downward force is applied to the second face of the bonded wafer pair by the second vacuum attachment.
17. A method of cleaving a bonded wafer pair having a first face and a second face, the method comprising:
providing a flexible chuck including a flexible plate and a flexible wafer support having a first surface and an opposing second surface for attachment to a first surface of the flexible plate;
attaching the first surface of the flexible wafer support to the first face of the wafer pair;
attaching an actuator to the flexible chuck;
applying force on the flexible chuck and the first face of the wafer with the actuator to separate layers of the bonded wafer pair and cleave the bonded wafer pair.
18. The method of claim 17 wherein the actuator is attached to the flexible chuck with vacuum.
19. The method of claim 17 further comprising inserting a blade between layers of the bonded wafer pair to initiate cleaving of the bonded wafer pair.
20. The method of claim 17 further comprising positioning a movable roller adjacent the actuator and applying force on the flexible chuck with the movable roller.
21. The method of claim 20 further comprising controlling the propagation of the cleave of the wafer pair by moving the roller.