IP Library Assignment 046327/0001
Patent Assignment
Reel/Frame 046327/0001

Assignment of Assignor's Interest

Recorded: 2018-06-07 Pages: 59
Assignors
SUNEDISON SEMICONDUCTOR LIMITED
Executed: 2018-06-06
MEMC JAPAN LIMITED
Executed: 2018-06-06
MEMC ELECTRONIC MATERIALS S.P.A.
Executed: 2018-06-06
Assignee
GLOBALWAFERS CO., LTD.
NO. 8. INDUSTRIAL EAST ROAD, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, R.O.C., TAIWAN
Covered Properties (268)
Systems and Methods for Production of Low Oxygen Content Silicon
High Resistivity Silicon-on-Insulator Substrate Comprising a Charge Trapping Layer Formed on a Substrate with a Rough Surface
Semiconductor on Insulator Structure Comprising a Buried High Resistivity Layer
Method of Manufacturing a Semiconductor on Insulator Structure by a Pressurized Bond Treatment
Semiconductor on Insulator Structure Comprising a Low Temperature Flowable Oxide Layer and Method of Manufacture Thereof
Semiconductor on Insulator Structure Comprising a Plasma Oxide Layer and Method of Manufacture Thereof
Semiconductor on Insulator Structure Comprising a Plasma Nitride Layer and Method of Manufacture Thereof
Direct Formation of Hexagonal Boron Nitride on Silicon Based Dielectrics
High Resistivity Single Crystal Silicon Ingot and Wafer Having Improved Mechanical Strength
High Resistivity Silicon-on-Insulator Substrate Having Enhanced Charge Trapping Efficiency
Process for the Removal of Copper and Other Metallic Impurities from Silicon
Patent: 6,482,269 →
Application: 09/082,906 →
Electrical Resistance Heater for Crystal Growing Apparatus
Patent: 6,093,913 →
Application: 09/092,391 →
Collector for an Automated on-Line Bath Analysis System
Patent: 6,210,640 →
Application: 09/093,520 →
Process and Appratus for Preparation of Silicon Crystals with Reduced Metal Content
Patent: 6,183,553 →
Application: 09/097,779 →
Susceptor for Barrel Reactor
Patent: 6,129,048 →
Application: 09/107,728 →
Continuous Oxidation Process for Crystal Pulling Apparatus
Patent: 6,039,801 →
Application: 09/167,747 →
Method and System for Controlling Growth of a Silicon Crystal
Patent: 6,171,391 →
Application: 09/172,546 →
Tungsten Doped Crucible and Method for Preparing Same
Patent: 6,187,089 →
Application: 09/245,238 →
An Epitaxial Silicon Wafer with Intrinsic Gettering
Patent: 6,284,384 →
Application: 09/250,908 →
Heat Shield Assembly for Crystal Puller
Patent: 6,197,111 →
Application: 09/258,478 →
Method for Processing a Semiconductor Wafer
Patent: 6,227,944 →
Application: 09/276,278 →
Method and System of Controlling Taper Growth in a Semiconductor Crystal Growth Process
Patent: 6,241,818 →
Application: 09/287,916 →
Process for Preparing Defect Free Silicon Crystals Which Allows for Variability in Process Conditions
Patent: 6,312,516 →
Application: 09/344,036 →
Publication: US 2001/0003268
Process for Growth of Defect Free Silicon Crystals of Arbitrarily Large Diameters
Patent: 6,328,795 →
Application: 09/344,709 →
Publication: US 2001/0008114
Method for the Separation, Regeneration and Refuse of an Exhausted Glycol-Based Slurry
Patent: 6,231,628 →
Application: 09/345,934 →
Process for Fabricating Semiconductor Wafers with External Gettering
Patent: 6,338,805 →
Application: 09/352,980 →
Non-Uniform Minority Carrier Lifetime Distributions in High Performance Silicon Power Devices
Patent: 6,828,690 →
Application: 09/366,850 →
Non-Oxygen Precipitating Czochralski Silicon Wafers
Patent: 6,336,968 →
Application: 09/379,383 →
Process for Preparing an Ideal Oxygen Precipitating Silicon Wafer
Patent: 6,191,010 →
Application: 09/384,669 →
Thermally Annealed Wafers Having Improved Internal Gettering
Patent: 6,361,619 →
Application: 09/385,108 →
Silicon on Insulator Structure from Low Defect Density Single Crystal Silicon
Patent: 6,236,104 →
Application: 09/387,288 →
Method of Processing Semiconductor Wafers to Build in Back Surface Damage
Patent: 6,214,704 →
Application: 09/404,428 →
Thermally Annealed, Low Defect Density Single Crystal Silicon
Patent: 6,416,836 →
Application: 09/416,998 →
Epitaxial Silicon Wafers Substantially Free of Grown - in Defects
Patent: 6,284,039 →
Application: 09/417,610 →
Method of Controlling Growth of a Semiconductor Crystal to Automatically Transition from Taper Growth to Target Diameter Growth
Patent: 6,203,611 →
Application: 09/421,187 →
Method of Determining Performance Characteristics of Polishing Pads
Patent: 6,293,139 →
Application: 09/432,928 →
Semiconductor Wafer Manufacturing Process
Patent: 6,376,395 →
Application: 09/481,080 →
Publication: US 2002/0004305
Continuous oxidation process for crystal pulling Apparatus
Patent: 6,315,828 →
Application: 09/489,481 →
Method of Controlling Diameter of a Silicon Crystal in a Locked Seed Lift Growth Process
Patent: 6,776,840 →
Application: 09/502,340 →
Process for producing a silicon melt
Patent: 6,344,083 →
Application: 09/503,566 →
Semiconductor Wafer Manufacturing Process
Patent: 6,376,335 →
Application: 09/506,105 →
Silicon wafering process flow
Patent: 6,294,469 →
Application: 09/512,111 →
Barium doping of molten silicon for use in crystal growing process
Patent: 6,319,313 →
Application: 09/521,288 →
Strontium doping of molten silicon for use in crystal growing process
Patent: 6,350,312 →
Application: 09/521,525 →
Modified Susceptor for Use in Chemical Vapor Deposition Process
Patent: 6,444,027 →
Application: 09/566,890 →
Method and apparatus for forming an epitaxial silicon wafer with a denuded zone
Patent: 6,339,016 →
Application: 09/607,389 →
Method and Apparatus for Forming a Silicon Wafer with a Denuded Zone
Patent: 6,599,815 →
Application: 09/607,391 →
Non-Contaminating Gas-Tight Valve for Semiconductor Applications
Patent: 6,435,474 →
Application: 09/608,304 →
Radio frequency identification system and method for tracking silicon wafers
Patent: 6,330,971 →
Application: 09/677,909 →
Polishing Apparatus, Polishing Head and Method
Patent: 6,712,673 →
Application: 09/682,677 →
Publication: US 2003/0068958
A Process for the Preparation of an Ideal Oxygen Precipitating Silicon Wafer Having an Asymmetrical Vacancy Concentration Profile Capable of Forming an Enhanced Denuded Zone
Patent: 6,579,779 →
Application: 09/704,900 →
Low Defect Density, Ideal Oxygen Precipitating Silicon
Patent: 6,555,194 →
Application: 09/705,092 →
Silicon on insulator structure having a low defect density handle wafer and process for the preparation thereof
Patent: 6,342,725 →
Application: 09/737,715 →
Publication: US 2001/0030348
Process for Growing Silicon Crystals Which Allows for Variability in Process Conditions While Suppressing the Formation of Agglomerated Intrinsic Point Defects
Patent: 6,500,255 →
Application: 09/853,232 →
Publication: US 2001/0027743
Process for Preparing Low Defect Density Silicon Using High Growth Rates
Patent: 6,689,209 →
Application: 09/871,255 →
Publication: US 2002/0053315
An Epitaxial Wafer Substantially Free of Grown-in Defects
Patent: 6,565,649 →
Application: 09/874,487 →
Publication: US 2001/0039916
Crystal Puller and Method for Growing Monocrystalline Silicon Ingots
Patent: 6,663,709 →
Application: 09/892,002 →
Publication: US 2002/0195045
Method and Apparatus for Processing a Semiconductor Wafer Using Novel Final Polishing Method
Patent: 6,709,981 →
Application: 09/928,559 →
Publication: US 2002/0052064
Process for the Preparation of Non-Oxygen Precipitating Czochralski Silicon Wafers
Patent: 6,432,197 →
Application: 09/929,585 →
Publication: US 2002/0000185
Method for Controlling Growth of a Silicon Crystal to Minimize Growth Rate and Diameter Deviations
Patent: 6,726,764 →
Application: 10/008,812 →
Publication: US 2002/0043206
Process for Reclaiming Semiconductor Wafers and Reclaimed Wafers
Patent: 7,008,874 →
Application: 10/022,967 →
Publication: US 2002/0086539
Granular Semiconductor Material Transport System and Process
Patent: 6,609,870 →
Application: 10/035,456 →
Publication: US 2003/0077128
SOI structure having a device layer which is vacancy dominated and substantially free fo agglomerated vacancy type defects
Patent: 6,849,901 →
Application: 10/038,084 →
Publication: US 2002/0113265
Single Crystal Silicon Having Improved Gate Oxide Integrity
Patent: 6,986,925 →
Application: 10/039,196 →
Publication: US 2002/0121238
Low Defect Density Silicon Having a Vacancy-Dominated Core Substantially Free of Oxidation Induced Stacking Faults
Patent: 6,846,539 →
Application: 10/054,629 →
Publication: US 2002/0100410
Process for Producing Thermally Annealed Wafers Having Improved Internal Gettering
Patent: 6,686,260 →
Application: 10/067,070 →
Publication: US 2002/0170631
Thermal Annealing Process for Producing Low Defect Density Single Crystal Silicon
Patent: 6,743,289 →
Application: 10/073,506 →
Publication: US 2002/0083889
Thermal Annealing Process for Producing Silicon Wafers with Improved Surface Characteristics
Patent: 6,743,495 →
Application: 10/113,378 →
Publication: US 2002/0174828
Control of Oxygen Precipitate Formation in High Resistivity Cz Silicon
Patent: 6,897,084 →
Application: 10/120,714 →
Publication: US 2003/0054641
Silicon on Insulator Struture Having an Epitaxial Layer and Intrinsic Gettering
Patent: 6,930,375 →
Application: 10/177,444 →
Publication: US 2003/0008435
Controlled Neck Growth Process for Single Crystal Silicon
Patent: 6,869,477 →
Application: 10/204,654 →
Publication: US 2003/0209186
Non-Oxygen Precipitating Czochralski Silicon Wafers
Patent: 6,709,511 →
Application: 10/217,703 →
Publication: US 2002/0189528
Modified Susceptor for Use in Chemical Vapor Deposition Process
Patent: 6,652,650 →
Application: 10/229,415 →
Publication: US 2003/0041799
Method of Polishing Wafers
Patent: 6,878,302 →
Application: 10/239,669 →
Analytical Method to Measure Nitrogen Concentration in Single Crystal Silicon
Patent: 6,803,576 →
Application: 10/252,479 →
Publication: US 2003/0068826
Crystal Puller for Growing Monocrystalline Silicon Ingots
Patent: 6,554,898 →
Application: 10/254,945 →
Publication: US 2003/0024473
A Single Crystal Silicon Ingot Having a High Arsenic Concentration
Patent: 7,132,091 →
Application: 10/256,759 →
Publication: US 2003/0061985
Process for Growing a Silicon Crystal Segment Substantially Free from Agglomerated Intrinsic Point Defects Which Allows for Variability in the Process Conditions
Patent: 6,652,646 →
Application: 10/260,239 →
Publication: US 2003/0116081
Wire Saw and Process for Slicing Multiple Semiconductor Ingots
Patent: 6,941,940 →
Application: 10/296,919 →
Ideal Oxygen Precipitating Silicon Wafers with Nitrogen/Carbon Stabilized Oxygen Precipitate Nucleation Centers and Process for Making the Same
Patent: 6,808,781 →
Application: 10/328,481 →
Publication: US 2003/0136961
Process for Producing Low Defect Density, Ideal Oxygen Precipitating Silicon
Patent: 6,896,728 →
Application: 10/373,899 →
Publication: US 2004/0025782
Semiconductor Wafer, Polishing Apparatus and Method
Patent: 7,137,874 →
Application: 10/432,513 →
Process for Cooling a Silicon Ingot Having a Vacancy Dominated Region to Produce Defect Free Silicon
Patent: 6,913,647 →
Application: 10/437,141 →
Publication: US 2004/0003770
Single Crystal Silicon Wafer Having an Epitaxial Layer Substantially Free from Grown-in Defects
Patent: 7,097,718 →
Application: 10/441,413 →
Publication: US 2003/0205191
Process for the Preparation of an Ideal Oxygen Precipitating Silicon Wafer Capable of Forming an Enhanced Denuded Zone
Patent: 6,713,370 →
Application: 10/460,901 →
Publication: US 2003/0221609
Fluid Sealing System for a Crystal Puller
Patent: 6,942,733 →
Application: 10/465,528 →
Publication: US 2004/0255847
Method for Treating an Exhausted Glycol-Based Slurry
Patent: 7,223,344 →
Application: 10/479,301 →
Publication: US 2004/0144722
Wafer Clamping Device for a Double Side Grinder
Patent: 8,066,553 →
Application: 10/598,851 →
Publication: US 2008/0020684
Process for Preparing a Stabilized Ideal Oxygen Precipitating Silicon Wafer
Patent: 6,955,718 →
Application: 10/615,127 →
Publication: US 2005/0005841
Process for Preparing Single Crystal Silicon Using Crucible Rotation to Control Temperature Gradient
Patent: 7,125,450 →
Application: 10/699,038 →
Publication: US 2004/0118333
Process for Metallic Contamination Reduction in Silicon Wafers
Patent: 7,084,048 →
Application: 10/840,854 →
Publication: US 2005/0250297
Partially Devitrified Crucible
Patent: 7,497,907 →
Application: 10/898,148 →
Publication: US 2006/0016389
High Purity Silicon Carbide Structures
Patent: 7,888,685 →
Application: 10/900,938 →
Publication: US 2006/0024969
Process for Making Non-Uniform Minority Carrier Lifetime Distribution in High Performance Silicon Power Devices
Patent: 7,242,037 →
Application: 10/911,965 →
Publication: US 2005/0006796
Systems and Methods for Measuring and Reducing Dust in Granular Material
Patent: 7,291,222 →
Application: 10/930,654 →
Publication: US 2005/0279277
Low Defect Density Silicon Having a Vacancy-Dominated Core Substantially Free of Oxidation Induced Stacking Faults
Patent: 7,217,320 →
Application: 11/005,987 →
Publication: US 2005/0150445
Controlling Melt-Solid Interface Shape of a Growing Silicon Crystal Using a Variable Magnetic Field
Patent: 7,223,304 →
Application: 11/026,780 →
Publication: US 2006/0144321
Electromagnetic Pumping of Liquid Silicon in a Crystal Growing Process
Patent: 7,291,221 →
Application: 11/027,360 →
Publication: US 2006/0144320
Semiconductor Wafer Boat for a Vertical Furnace
Patent: 7,033,168 →
Application: 11/041,593 →
Method for Controlling of Thermal Donor Formation in High Resistivity Cz Silicon
Patent: 7,135,351 →
Application: 11/082,267 →
Publication: US 2005/0158969
Process for Preparing Single Crystal Silicon Having Improved Gate Oxide Integrity
Patent: 7,431,765 →
Application: 11/089,102 →
Publication: US 2005/0160967
Modified Susceptor for Barrel Reactor
Patent: 7,462,246 →
Application: 11/107,444 →
Publication: US 2006/0231035
Silicon Wafer Etching Process and Composition
Patent: 7,323,421 →
Application: 11/152,362 →
Publication: US 2006/0011588
Melter Assembly and Method for Charging a Crystal Forming Apparatus with Molten Source Material
Patent: 7,465,351 →
Application: 11/155,104 →
Publication: US 2005/0279275
Melter Assembly and Method for Charging a Crystal Forming Apparatus with Molten Source Material
Patent: 7,344,594 →
Application: 11/155,105 →
Publication: US 2005/0279276
Melter Assembly and Method for Charging a Crystal Forming Apparatus with Molten Source Material
Patent: 7,691,199 →
Application: 11/155,385 →
Publication: US 2005/0279278
Arsenic and Phosphorus Doped Silicon Wafer Substrates Having Intrinsic Gettering
Patent: 7,485,928 →
Application: 11/270,790 →
Publication: US 2007/0105279
Silicon Structures with Improved Resistance to Radiation Events
Patent: 7,566,951 →
Application: 11/408,503 →
Publication: US 2007/0249136
High Resistivity Silicon Structure and a Process for the Preparation Thereof
Patent: 7,521,382 →
Application: 11/436,688 →
Publication: US 2006/0263967
Method of Polishing a Semiconductor Wafer
Patent: 7,559,825 →
Application: 11/614,129 →
Publication: US 2008/0153391
Double Side Wafer Grinder and Methods for Assessing Workpiece Nanotopology
Patent: 7,601,049 →
Application: 11/617,433 →
Publication: US 2007/0179660
Nitrogen-Doped Silicon Substantially Free of Oxidation Induced Stacking Faults
Patent: 7,404,856 →
Application: 11/623,142 →
Publication: US 2007/0169683
Processes for the Purification of Trichlorosilane and Silicon Tetrachloride
Patent: 7,879,198 →
Application: 11/719,688 →
Publication: US 2008/0314728
Controlling Agglomerated Point Defect and Oxygen Cluster Formation Induced by the Lateral Surface of a Silicon Single Crystal During Cz Growth
Patent: 8,216,362 →
Application: 11/750,706 →
Publication: US 2007/0266929
Silicon Material with Controlled Agglomerated Point Defects and Oxygen Clusters Induced by the Lateral Surface
Patent: 8,673,248 →
Application: 11/750,717 →
Publication: US 2007/0269361
Controlling Melt-Solid Interface Shape of a Growing Silicon Crystal Using a Variable Magnetic Field
Patent: 7,611,580 →
Application: 11/753,722 →
Publication: US 2007/0227442
Method for Purifying Silicon Carbide Coated Structures
Patent: 7,696,103 →
Application: 11/755,472 →
Publication: US 2007/0221609
Non-Uniform Minority Carrier Lifetime Distributions in High Performance Silicon Power Devices
Patent: 7,618,879 →
Application: 11/763,043 →
Publication: US 2007/0238266
Dressing a Wafer Polishing Pad
Patent: 7,846,006 →
Application: 11/771,495 →
Publication: US 2008/0009231
Methods for Producing Smooth Wafers
Patent: 8,058,173 →
Application: 11/960,236 →
Publication: US 2008/0160788
Epitaxial Barrel Susceptor Having Improved Thickness Uniformity
Patent: 8,404,049 →
Application: 11/965,521 →
Publication: US 2009/0165719
Semiconductor Wafer Carrier Blade
Patent: 7,878,562 →
Application: 11/967,694 →
Publication: US 2009/0169346
Nanotopography Control and Optimization Using Feedback from Warp Data
Patent: 7,930,058 →
Application: 11/967,743 →
Publication: US 2008/0166948
Silicon Wafer Etching Compositions
Patent: 7,938,982 →
Application: 11/968,381 →
Publication: US 2008/0099717
Method and Device for Feeding Arsenic Dopant into a Silicon Crystal Growing Apparatus
Patent: 7,922,817 →
Application: 12/108,923 →
Publication: US 2009/0266294
Semiconductor Wafer Polishing Apparatus and Method of Polishing
Patent: 8,192,248 →
Application: 12/130,190 →
Publication: US 2009/0298399
Low Thermal Mass Semiconductor Wafer Support
Patent: 8,042,697 →
Application: 12/165,048 →
Publication: US 2009/0321372
Method and Device for Continuously Measuring Silicon Island Elevation
Patent: 7,573,587 →
Application: 12/197,669 →
Wafer Holder for Supporting a Semiconductor Wafer During a Thermal Treatment Process
Patent: 8,186,661 →
Application: 12/211,516 →
Publication: US 2010/0065696
Arsenic and Phosphorus Doped Silicon Wafer Substrates Having Intrinsic Gettering
Patent: 8,026,145 →
Application: 12/347,336 →
Publication: US 2009/0130824
System and Method for Dressing a Wafer Polishing Pad
Patent: 7,846,007 →
Application: 12/351,290 →
Publication: US 2009/0176441
Methods for Etching the Edge of a Silicon Wafer
Patent: 8,309,464 →
Application: 12/415,551 →
Publication: US 2009/0247055
Edge Etched Silicon Wafers
Patent: 8,192,822 →
Application: 12/415,555 →
Publication: US 2009/0246444
Methods for Preparing a Semiconductor Structure for Use in Backside Illumination Applications
Patent: 8,080,482 →
Application: 12/454,512 →
Publication: US 2009/0233428
Controlling a Melt-Solid Interface Shape of a Growing Silicon Crystal Using an Unbalanced Magnetic Field and Iso-Rotation
Patent: 8,398,765 →
Application: 12/493,766 →
Publication: US 2009/0320743
Generating a Pumping Force in a Silicon Melt by Applying a Time-Varying Magnetic Field
Patent: 8,551,247 →
Application: 12/537,066 →
Publication: US 2010/0031870
Method for Feeding Arsenic Dopant into a Silicon Crystal Growing Apparatus
Patent: 8,696,811 →
Application: 12/625,931 →
Publication: US 2010/0132829
Method for Assessing Workpiece Nanotopology Using a Double Side Wafer Grinder
Patent: 7,927,185 →
Application: 12/631,929 →
Publication: US 2010/0087123
Methods for Generating Representations of Flatness Defects on Wafers
Patent: 8,165,706 →
Application: 12/648,613 →
Publication: US 2011/0160890
Systems for Generating Representations of Flatness Defects on Wafers
Patent: 8,340,801 →
Application: 12/648,620 →
Publication: US 2011/0160891
Systems for Weighing a Pulled Object
Patent: 8,691,008 →
Application: 12/726,957 →
Publication: US 2010/0242836
Systems for Weighing a Pulled Object Having a Changing Weight
Patent: 8,347,740 →
Application: 12/726,973 →
Publication: US 2010/0242625
Wafer Support Ring
Patent: 8,420,554 →
Application: 12/772,627 →
Publication: US 2011/0269316
Semiconductor and Solar Wafers
Patent: 8,310,031 →
Application: 12/847,011 →
Publication: US 2012/0025353
Methods and Systems for Adjusting Operation of a Wafer Grinder Using Feedback from Warp Data
Patent: 8,145,342 →
Application: 12/891,357 →
Publication: US 2011/0045740
Methods of Grinding Semiconductor Wafers Having Improved Nanotopology
Patent: 8,267,745 →
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Publication: US 2011/0101504
Process for Annealing Semiconductor Wafers with Flat Dopant Depth Profiles
Patent: 8,153,538 →
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Methods for Monitoring the Amount of Contamination Imparted into Semiconductor Wafers During Wafer Processing
Patent: 8,143,078 →
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Publication: US 2011/0151592
Methods for Processing Silicon on Insulator Wafers
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Publication: US 2011/0159668
Method for the Preparation of a Multi-Layered Crystalline Structure
Patent: 8,367,519 →
Application: 12/974,772 →
Publication: US 2011/0159665
Process and System for the Purification of Trichlorosilane and Silicon Tetrachloride
Patent: 8,282,792 →
Application: 13/014,532 →
Publication: US 2011/0114469
Semiconductor Wafers with Reduced Roll-Off and Bonded and Unbonded Soi Structures Produced from Same
Patent: 8,330,245 →
Application: 13/021,443 →
Publication: US 2011/0204471
Methods for Reducing the Width of the Unbonded Region in Soi Structures
Patent: 8,440,541 →
Application: 13/021,467 →
Publication: US 2011/0207246
Hydrostatic Pad Pressure Modulation in a Simultaneous Double Side Wafer Grinder
Patent: 8,712,575 →
Application: 13/049,536 →
Publication: US 2011/0237160
Bulk Silicon Wafer Product Useful in the Manufacture of Three Dimensional Multigate Mosfets
Patent: 9,029,854 →
Application: 13/061,386 →
Publication: US 2011/0163313
Method and System for Stripping the Edge of a Semiconductor Wafer
Patent: 8,735,261 →
Application: 13/130,160 →
Publication: US 2011/0223741
Methods for in-Situ Passivation of Silicon-on-Insulator Wafers
Patent: 8,859,393 →
Application: 13/162,122 →
Publication: US 2012/0003814
Methods for Preparing a Semiconductor Wafer with High Thermal Conductivity
Patent: 8,865,601 →
Application: 13/199,587 →
Publication: US 2011/0318912
Low Thermal Mass Semiconductor Wafer Plate
Patent: 8,220,646 →
Application: 13/232,676 →
Publication: US 2012/0074081
Low Thermal Mass Semiconductor Wafer Boat
Patent: 8,220,647 →
Application: 13/232,684 →
Publication: US 2012/0077138
Methods for Producing Crucibles with a Reduced Amount of Bubbles
Patent: 8,524,319 →
Application: 13/299,922 →
Publication: US 2013/0129921
Methods for Producing Crucibles with a Reduced Amount of Bubbles
Patent: 8,857,214 →
Application: 13/299,926 →
Publication: US 2013/0125587
Methods for Monitoring the Amount of Metal Contamination in a Process
Patent: 8,822,242 →
Application: 13/353,142 →
Publication: US 2012/0115258
Methods for Reducing the Metal Content in the Device Layer of Soi Structures and Soi Structures Produced by Such Methods
Patent: 8,796,116 →
Application: 13/354,788 →
Publication: US 2012/0193753
Reactor Apparatus and Methods for Reacting Compounds
Patent: 9,222,733 →
Application: 13/355,309 →
Publication: US 2012/0199324
Method of Manufacturing Silicon-On-Insulator Wafers
Patent: 8,853,054 →
Application: 13/413,284 →
Publication: US 2013/0237032
Method for Machining Seed Rods for Use in a Chemical Vapor Deposition Polysilicon Reactor
Patent: 9,102,035 →
Application: 13/417,792 →
Publication: US 2013/0237126
Systems and Methods for Cleaving A Bonded Wafer Pair
Patent: 8,845,859 →
Application: 13/417,934 →
Publication: US 2013/0062020
Tool for Harvesting Polycrystalline Silicon-Coated Rods from a Chemical Vapor Deposition Reactor
Patent: 8,906,453 →
Application: 13/418,979 →
Publication: US 2012/0237678
Methods for Producing Silicon on Insulator Structures Having High Resistivity Regions in the Handle Wafer
Patent: 8,846,493 →
Application: 13/419,139 →
Publication: US 2012/0238070
Methods for Fabricating a Semiconductor Wafer Processing Device
Patent: 8,940,094 →
Application: 13/443,076 →
Publication: US 2013/0263776
Methods and Systems for Monitoring and Controlling Silicon Rod Temperature
Patent: 9,115,423 →
Application: 13/543,226 →
Publication: US 2013/0017139
Processes for the Purification of Trichlorosilane or Silicon Tetrachloride
Patent: 8,691,055 →
Application: 13/606,953 →
Publication: US 2012/0325645
Direct Formation of Graphene on Semiconductor Substrates
Patent: 8,884,310 →
Application: 13/652,665 →
Publication: US 2013/0099195
Methods for Cleaving a Bonded Wafer Structure
Patent: 9,165,802 →
Application: 13/663,038 →
Publication: US 2013/0105538
Clamping Apparatus for Cleaving a Bonded Wafer Structure
Patent: 9,159,596 →
Application: 13/663,073 →
Publication: US 2013/0105539
Method of Loading a Charge of Polysilicon into a Crucible
Patent: 9,359,691 →
Application: 13/685,323 →
Publication: US 2014/0060422
Air Pocket Detection Methods and Systems
Patent: 9,665,931 →
Application: 13/712,561 →
Publication: US 2013/0176454
Symmetry Based Air Pocket Detection Methods and Systems
Patent: 9,317,912 →
Application: 13/712,592 →
Publication: US 2013/0179094
Methods For Mounting An Ingot On A Wire Saw
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Systems and Methods for Reducing Dust in Granular Material
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Single Side Polishing Using Shape Matching
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Gas Distribution Plate for Chemical Vapor Deposition Systems and Methods of Using Same
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Inject Insert Liner Assemblies for Chemical Vapor Deposition Systems and Methods of Using Same
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Susceptor Assemblies for Supporting Wafers in a Reactor Apparatus
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Methods for Reacting Compounds
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Direct and Sequential Formation of Monolayers of Boron Nitride and Graphene on Substrates
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Publication: US 2013/0240830
Oxygen Precipitation in Heavily Doped Silicon Wafers Sliced from Ingots Grown by the Czochralski Method
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Production of High Precipitate Density Wafers by Activation of Inactive Oxygen Precipitate Nuclei
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Systems and Methods for Interferometric Phase Measurement
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Double Side Polisher with Platen Parallelism Control
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Method for Low Temperature Layer Transfer in the Preparation of Multilayer Semiconductor Devices
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Method and System for Full Resolution Real-Time Data Logging
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Method and System for a Meta-Recipe Control Software Architecture
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Methods and Systems for Deterministic and Multithreaded Script Objects and Script Engine
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Methods and Systems for Preventing Unsafe Operations
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Processes and Apparatus for Preparing Heterostructures with Reduced Strain by Radial Distension
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Processes and Apparatus for Preparing Heterostructures with Reduced Strain by Radial Compression
Patent: 9,583,364 →
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Apparatus for Stressing Semiconductor Substrates
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Liner Assemblies for Substrate Processing Systems
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Semiconductor-On-Insulator Wafer Manufacturing Method for Reducing Light Point Defects and Surface Roughness
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Publication: US 2014/0273405
Center Flex Single Side Polishing Head
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Systems and Methods for Controlling Temperatures in an Epitaxial Reactor
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Method to Delineate Crystal Related Defects
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Method and System for Arranging Numeric Data for Compression
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Publication: US 2016/0056840
Direct Formation of Graphene on Semiconductor Substrates
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Method of Manufacturing High Resistivity Soi Substrate with Reduced Interface Conducitivity
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Center Flex Single Side Polishing Head Having Recess and Cap
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Method of Manufacturing High Resistivity Soi Wafers with Charge Trapping Layers Based on Terminated Si Deposition
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Direct and Sequential Formation of Monolayers of Boron Nitride and Graphene on Substrates
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Methods for Post-Epitaxial Warp Prediction and Control
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Gas Doping Systems for Controlled Doping of a Melt of Semiconductor or Solar-Grade Material
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Publication: US 2016/0017513
Nitrogen Doped and Vacancy Dominated Silicon Ingot and Thermally Treated Wafer Formed Therefrom Having Radially Uniformly Distributed Oxygen Precipitation Density and Size
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High Resistivity Silicon-on-Insulator Wafer Manufacturing Method for Reducing Substrate Loss
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High Resistivity Silicon-on-Insulator Wafer Manufacturing Method for Reducing Substrate Loss
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Method of Manufacturing High Resistivity Silicon-on-Insulator Substrate
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Clamping Apparatus for Cleaving a Bonded Wafer Structure and Methods for Cleaving
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Methods for Producing Low Oxygen Silicon Ingots
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Dopant Feeding Device for Dispensing Dopant
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Handle Substrate for Use in Manufacture of Semiconductor-on-Insulator Structure and Method of Manufacturing Thereof
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Publication: US 2016/0276209
Substrate Processing Systems Having Multiple Gas Flow Controllers
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High Resistivity Soi Wafers and a Method of Manufacturing Thereof
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Publication: US 2016/0351437
Methods for Preparing Layered Semiconductor Structures
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Publication: US 2017/0025307
Epitaxy Reactor and Susceptor System for Improved Epitaxial Wafer Flatness
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Publication: US 2016/0340799
Methods and Systems for Polishing Pad Control
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Publication: US 2017/0001281
Methods for Preparing Layered Semiconductor Structures and Related Bonded Structures
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Publication: US 2017/0025306
Wafer Nanotopography Metrology for Lithography Based on Thickness Maps
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Publication: US 2017/0011505
Crystal Growing Systems and Methods Including a Transparent Crucible
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Publication: US 2017/0022631
Semiconductor Substrate Polishing Methods and Slurries and Methods for Manufacturing Silicon on Insulator Structures
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Publication: US 2017/0053826
Methods and System for Controlling a Surface Profile of a Wafer
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Publication: US 2018/0056545
Semiconductor Wafer Support Ring for Heat Treatment
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Publication: US 2017/0115063
Crystal Pulling Systems and Methods for Producing Monocrystalline Ingots with Reduced Edge Band Defects
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Publication: US 2017/0107639
Crystal Pulling System and Method for Inhibiting Precipitate Build-Up in Exhaust Flow Path
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Publication: US 2017/0145587
Semiconductor Substrate Polishing Methods with Dynamic Control
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Publication: US 2017/0178890
Seed Chuck Assemblies and Crystal Pulling Systems for Reducing Deposit Build-Up During Crystal Growth Process
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Publication: US 2017/0191182
Process Flow for Manufacturing Semiconductor on Insulator Structures in Parallel
Patent: 9,831,115 →
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Publication: US 2017/0243781
Semiconductor on Insulator Structure Comprising a Sacrificial Layer and Method of Manufacture Thereof
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Surface Photovoltage Calibration Standard
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Publication: US 2017/0234960
High Resistivity Semiconductor-on-Insulator Wafer and a Method of Manufacturing
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Publication: US 2017/0316968
A Method of Manufacturing High Resistivity Semiconductor-on-Insulator Wafers with Charge Trapping Layers
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Publication: US 2017/0338143
HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE TRAPPING LAYER FORMED BY He-N2 CO-IMPLANTATION
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Publication: US 2017/0358484
Systems and Methods for Performing Phase Shift Interferometry While a Wafer Is Vibrating
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Publication: US 2017/0363413
Systems and Methods for Performing Epitaxial Smoothing Processes on Semiconductor Structures
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Publication: US 2018/0277423
Manufacture of Group Iiia-Nitride Layers on Semiconductor on Insulator Structures
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Publication: US 2018/0005815
Preparation of Silicon-Germanium-on-Insulator Structures
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Publication: US 2018/0005872
Feed Material System for a Czochralski Crystal Growth System Comprising a Feed Channel Movable Between a Retracted and Extended Position and Method of Using Same
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Publication: US 2018/0030614
Method of Depositing Charge Trapping Polycrystalline Silicon Films on Silicon Substrates with Controllable Film Stress
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Publication: US 2018/0233400
Methods for Controlled Doping of a Melt Including Introducing Liquid Dopant Below a Surface of the Melt
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Publication: US 2018/0044814
Thermally Stable Charge Trapping Layer for Use in Manufacture of Semiconductor-on-Insulator Structures
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Publication: US 2018/0047614
A Method of Manufacturing Silicon Germanium-On-Insulator
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Publication: US 2018/0294183
Method of Manufacturing Semiconductor-On-Insulator
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Publication: US 2018/0294182
Methods for Processing Semiconductor Wafers Having a Polycrystalline Finish
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Publication: US 2018/0151384
High Resistivity Silicon-on-Insulator Substrate Comprising an Isolation Region
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Publication: US 2017/0372946
Methods for Producing Single Crystal Silicon Ingots with Reduced Seed End Oxygen
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Publication: US 2018/0030615
Method of Manufacturing High Resistivity Soi Wafers with Charge Trapping Layers Based on Terminated Si Deposition
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Publication: US 2017/0365506
High Resistivity Silicon-on-Insulator Substrate Having Enhanced Charge Trapping Efficiency
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Publication: US 2018/0114720
Systems for Selectively Feeding Chunk Polysilicon or Granular Polysilicon in a Crystal Growth Chamber
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Publication: US 2018/0237948
Methods for Processing Semiconductor Wafers Having a Polycrystalline Finish
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Cvd Apparatus
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Publication: US 2018/0282865
Epitaxial Growth of Defect-Free, Wafer-Scale Single-Layer Graphene on Thin Films of Cobalt
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Manufacturing Method of Smoothing a Semiconductor Surface
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Handle Substrate for Use in Manufacture of Semiconductor-on-Insulator Structure and Method of Manufacturing Thereof
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Publication: US 2018/0138080
High Resistivity Silicon-on-Insulator Wafer Manufacturing Method for Reducing Substrate Loss
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Publication: US 2018/0138298
High Resistivity Silicon-on-Insulator Substrate Comprising an Isolation Region
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Publication: US 2018/0174892
Semiconductor on Insulator Structure Comprising a Sacrificial Layer and Method of Manufacture Thereof
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Publication: US 2018/0197769
Crystal Growing Systems and Methods Including a Transparent Crucible
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Publication: US 2018/0202065
Methods for Producing Low Oxygen Silicon Ingots
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Publication: US 2018/0237938
High Resistivity Silicon-on-Insulator Substrate Comprising a Charge Trapping Layer Formed by He-N2 Co-Implantation
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Related Assignments (8)
Other recorded transfers of the patents in this record — the chain of ownership.
Security Agreement Oct 1, 2012
From: NVT, LLC; SUN EDISON LLC; SOLAICX, INC.; MEMC ELECTRONIC MATERIALS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 029057/0810 →
Release of Security Interest Dec 26, 2013
From: GOLDMAN SACHS BANK USA
To: NVT, LLC; SUN EDISON LLC; SOLAICX; SUNEDISON, INC. (F/K/A MEMC ELECTRONIC MATERIALS, INC.)
Reel/Frame 031870/0092 →
Release of Security Interest Dec 26, 2013
From: BANK OF AMERICA, N.A.
To: ENFLEX CORPORATION; SUN EDISON LLC; SOLAICX; SUNEDISON, INC. (F/K/A MEMC ELECTRONIC MATERIALS, INC.)
Reel/Frame 031870/0031 →
Security Agreement Jan 30, 2014
From: SUNEDISON, INC.; SOLAICX; SUN EDISON, LLC; NVT, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 032177/0359 →
Release of Security Interest Mar 3, 2014
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: NVT, LLC; SUN EDISON LLC; SOLAICX; SUNEDISON, INC.
Reel/Frame 032382/0724 →
Release of Security Interest to Reel/Frame: 012280/0161 Mar 17, 2014
From: CITICORP USA, INC.
To: MEMC ELECTRONIC MATERIALS, INC. (NOW KNOWN AS SUNEDISON, INC.); MEMC PASADENA, INC.; PLASMASIL, L.L.C.; SIBOND, L.L.C.
Reel/Frame 032458/0794 →
Assignment of Assignor's Interest May 27, 2014
From: MEMC ELECTRONIC MATERIALS, INC.
To: SUNEDISON SEMICONDUCTOR LIMITED (UEN201334164H)
Reel/Frame 033023/0430 →
Notice of License Agreement Jun 6, 2014
From: SUNEDISON SEMICONDUCTOR LIMITED
To: SUNEDISON SEMICONDUCTOR TECHNOLOGY PTE. LTD.
Reel/Frame 033099/0001 →