Granted Patent
Utility
US 6,709,981
· Confirmation No. 7155
METHOD AND APPARATUS FOR PROCESSING A SEMICONDUCTOR WAFER USING NOVEL FINAL POLISHING METHOD
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-30 | OATH |
Oath or Declaration filed | 65 | View | |
| 2013-12-26 | OATH |
Oath or Declaration filed | 29 | View | |
| 2013-12-26 | OATH |
Oath or Declaration filed | 42 | View | |
| 2008-05-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-05-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-05-21 | PA.. |
Power of Attorney | 3 | View | |
| 2008-05-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2005-01-18 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-01-28 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-01-28 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-08-13 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-08-13 | ADS |
Application Data Sheet | 2 | View | |
| 2001-08-13 | SPEC |
Specification | 36 | View | |
| 2001-08-13 | CLM |
Claims | 17 | View | |
| 2001-08-13 | ABST |
Abstract | 1 | View | |
| 2001-08-13 | DRW |
Drawings-only black and white line drawings | 7 | View |
Inventors
Alexis Grabbe
St. Charles, MO
Mick Bjelopavlic
O'Fallon, MO
Ashley S. Hull
St. Charles, MO
Michele L. Haler
St. Paul, MO
Guoqiang (David) Zhang
Ballwin, MO
Henry F. Erk
St. Louis, MO
Yun-Biao Xin
Glastonbury, CT
Attorneys & Agents of Record
Classification
USPC
438/692
H10P52/00
H10P70/15
H10P90/129
B24B37/0056
B24B37/042
B24B37/08
B24B53/017
Y10S438/928
Y10S438/959
Prosecution
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- Customer No.
- 76681
- Docket No.
- 28744-620 (01-0950)
- Confirmation No.
- 7155
Publication
- Pub. No.
- US20020052064A1
- Pub. Date
- 2002-05-02
Patent Term Adjustment
-97days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-06-07
NOTICE OF LICENSE AGREEMENT
Recorded 2014-06-06
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-05-27
MEMC ELECTRONIC MATERIALS, INC. (NOW KNOWN AS SUNEDISON, INC.),
MEMC PASADENA, INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.,
MEMC SOUTHWEST INC.,
MEMC INTERNATIONAL, INC. (NOW KNOWN AS SUNEDISON INTERNATIONAL, INC.)
from
CITICORP USA, INC.
RELEASE OF SECURITY INTEREST TO REEL/FRAME: 012280/0161
Recorded 2014-03-17
RELEASE OF SECURITY INTEREST
Recorded 2014-03-03
SECURITY AGREEMENT
Recorded 2014-01-30
ENFLEX CORPORATION,
SUN EDISON LLC,
SOLAICX,
SUNEDISON, INC. (F/K/A MEMC ELECTRONIC MATERIALS, INC.)
RELEASE OF SECURITY INTEREST
Recorded 2013-12-26
RELEASE OF SECURITY INTEREST
Recorded 2013-12-26
SECURITY AGREEMENT
Recorded 2012-10-01
SECURITY AGREEMENT
Recorded 2011-04-01
from
CITICORP USA, INC.
RELEASE OF SECURITY INTEREST
Recorded 2005-08-11
from
GRABBE, ALEXIS,
HULL, ASHLEY S.,
BJELOPAVLIC, MICK,
HALER, MICHELE L.,
ZHANG, GUOQIANG (DAVID),
ERK, HENRY F.,
XIN, YUN-BIAO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-07
from
MEMC ELECTRONIC MATERIALS, INC.,
MEMC HOLDINGS CORPORATION,
MEMC INTERNATIONAL, INC.,
MEMC PASADENA, INC.,
MEMC SOUTHWEST INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.
SECURITY AGREEMENT
Recorded 2001-12-28
from
MEMC ELECTRONIC MATERIALS, INC.,
MEMC INTERNATIONAL, INC.,
MEMC PASADENA, INC.,
MEMC SOUTHWEST INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.
SECURITY INTEREST
Recorded 2001-11-21
from
MEMC ELECTRONIC MATERIALS, INC.,
MEMC INTERNATIONAL, INC.,
MEMC PASADENA, INC.,
MEMC SOUTHWEST INC.,
PLASMASIL, L.L.C.,
SIBOND, L.L.C.
SECURITY AGREEMENT
Recorded 2001-11-21
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,709,981
- App. No.
- 09/928,559
- Filed
- 2001-08-13
- Granted
- 2004-03-23
- Pub. No.
- US20020052064A1
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- PTA
- -97 days
External Links