Methods for cleaving a bonded wafer structure
View Patent ↗Apparatus and methods for mechanically cleaving a bonded wafer structure are disclosed. The apparatus and methods involve clamps that grip the bonded wafer structure and are actuated to cause the bonded structure to cleave.
1. A method of cleaving a bonded wafer structure comprising a first wafer and a second wafer, the first wafer having a peripheral edge including a first portion, the second wafer having a peripheral edge including a second portion, the first portion disposed opposite the second portion, the method comprising:
contacting the first portion of the peripheral edge of the first wafer with a surface of an annular member of a first grasping member;
contacting the second portion of the peripheral edge of the second wafer with a surface of an annular member of a second grasping member, wherein the annular member of the first grasping member or the annular member of the second grasping member has an actuated edge;
actuating the actuated edge to grasp and release the first wafer or the second wafer; and
cleaving the bonded wafer structure by at least one of (1) applying a force on the first wafer by actuating the first grasping member or (2) applying a force on the second wafer by actuating the second grasping member.
2. The method as set forth in claim 1 further comprising inserting a blade between the first wafer and the second wafer to initiate cleaving of the bonded wafer pair.
3. The method as set forth in claim 1 comprising actuating the first grasping member to apply a force to the first wafer to cleave the bonded wafer structure.
4. The method as set forth in claim 3 comprising actuating the second grasping member to apply a force to the second wafer to cleave the bonded wafer structure.
5. The method as set forth in claim 1 wherein one or more annular members of the first grasping member continuously contact the first portion of the peripheral edge of the first wafer.
6. The method as set forth in claim 5 wherein one or more annular members of the second grasping member continuously contact the second portion of the peripheral edge of the second wafer.
7. The method as set forth in claim 1 wherein the first grasping member comprises no more than one annular member.
8. The method as set forth in claim 7 wherein the second grasping member comprises no more than one annular member.
9. The method as set forth in claim 1 wherein the first grasping member comprises more than one annular member.
10. The method as set forth in claim 9 wherein the second grasping member comprises more than one annular member.