IP Library Granted Patent US 9,476,911
Granted Patent B2
US 9,476,911 · App. 13/424,031 · Granted Oct 25, 2016

Probes with high current carrying capability and laser machining methods

Inventor: January Kister (Portola Valley, CA)
Assignee: MICROPROBE, INC.
G01R1/06716G01R1/06738G01R1/06761G01R1/07357G01R3/00G01R1/06733
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Quick Facts
Patent No.
US 9,476,911
App. No.
13/424,031
Granted
Oct 25, 2016
Kind
B2
Abstract

The present invention is a probe having a distal end made of one material, a tip and a portion disposed between the distal end and the tip that is a different second material. The probe is laser machined manufactured using a nanosecond or picosecond laser.

Claims (23)

1. A probe for testing a device comprising:

a distal end;

a flexing portion, and

a tip end;

wherein said probe comprises a first material having sufficient current carrying capability to prevent damage to said probe when experiencing an over-current condition due to a faulty device; and

wherein only said distal end of said probe, including the sides of said distal end of said probe, comprises a coating of a conductive second material.

2. The probe of claim 1 wherein said distal end is between 0.1 mm and 0.5 mm in length.

3. The probe of claim 1 wherein said conductive second material comprises copper.

4. The probe of claim 1 wherein said first material comprises tungsten.

5. The probe of claim 1 wherein said first material comprises molybdenum.

6. The probe of claim 1 wherein said probe body comprises a trench.

7. The probe of claim 6 wherein said trench comprises a metal.

8. The probe of claim 7 wherein said metal comprises copper.

9. The probe of claim 1 wherein said first material comprises a mixed-phase composite.

10. The probe of claim 1 wherein said conductive second material comprises aluminum.

11. The probe of claim 1 comprising a skate disposed on said tip end.

12. The probe of claim 11 wherein said skate comprises said first material.

13. The probe of claim 11 wherein said skate is coated with a third material different from said first material and said conductive second material.

14. The probe of claim 13 wherein said third material comprises rhodium.

15. The probe of claim 13 wherein said third material comprises rhenium.

16. The probe of claim 13 wherein said third material comprises ruthenium.

17. The probe of claim 1 wherein said conductive second material comprises gold.

18. The probe of claim 1 wherein said conductive second material comprises silver.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
SECURITY INTEREST Recorded Jul 29, 2025
From: FORMFACTOR, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 072263/0272 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 28, 2012
From: KISTER, JANUARY
To: MICROPROBE, INC.
Reel/Frame 028858/0970 →
Continuity (9)
Continuation In Part 12880808 · Sep 13, 2010
Continuation In Part 12703063 · Feb 9, 2010
Continuation In Part 11521944 · Sep 14, 2006
Continuation In Part 11450977 · Jun 9, 2006
Continuation In Part 10850921 · May 21, 2004
Provisional Application 61628012 · Oct 21, 2011
Provisional Application 61314492 · Mar 16, 2010
Provisional Application 61276411 · Sep 11, 2009
Related Publication 20120286816A1 · Nov 15, 2012