Semiconductor device and method for fabricating the same
A semiconductor device and a method for fabricating the same are disclosed. The method for fabricating the semiconductor device includes forming an shallow trench isolation (STI) in a substrate, sequentially forming an oxide layer and a nitride layer over the substrate, patterning the nitride layer and the oxide layer to expose a portion of the substrate adjacent to the STI layer, forming a field oxide layer contacting the STI layer in the exposed portion of the substrate, removing the nitride layer, etching a portion of the patterned oxide layer to form a first gate oxide layer contacting the field oxide layer, forming a second gate oxide layer over the substrate, and forming a gate pattern over the field oxide layer, the first gate oxide layer, and the second gate oxide layer.
1. A method for fabricating a semiconductor device, the method comprising:
etching a portion of a semiconductor substrate to form a shallow trench isolation (STI) layer;
sequentially forming an oxide layer and a nitride layer on or over the semiconductor substrate and the STI layer;
patterning the nitride layer and the oxide layer to expose a portion of the semiconductor substrate adjacent to the STI layer and to define a field oxide region;
forming a field oxide layer in contact with the STI layer in the exposed portion of the semiconductor substrate;
removing the nitride layer;
etching the patterned oxide layer to form a first gate oxide layer in contact with the field oxide layer;
forming a second gate oxide layer on the semiconductor substrate; and
forming a gate pattern on or over the field oxide layer, the first gate oxide layer, and the second gate oxide layer.
2. The method of claim 1 , wherein the first gate oxide layer is thicker than the second gate oxide layer.
3. The method of claim 1 , wherein the first gate oxide layer is in contact with an end portion of the field oxide.
4. The method of claim 1 , wherein forming the first gate oxide layer comprises:
forming a photoresist pattern covering a portion of the patterned oxide layer in contact with the field oxide layer;
forming the first gate oxide layer by removing areas of the oxide layer exposed by the photoresist pattern; and
removing the photoresist pattern.
5. The method of claim 1 , wherein the field oxide layer has an edge portion that is in contact with an upper edge of the STI layer.
6. The method of claim 1 , wherein the gate pattern covers an entire width of the field oxide layer, the entire first gate oxide layer, and the entire second gate oxide layer.
7. The method of claim 1 , wherein the gate pattern is on or over a portion of the STI layer.
8. The method of claim 1 , wherein the STI layer has a depth less than 150 nm.
9. A method for fabricating a semiconductor device, comprising:
forming a shallow trench isolation (STI) layer in a substrate;
sequentially forming an oxide layer and a nitride layer on or over the substrate and the STI layer;
forming a field oxide layer adjacent to the STI layer in the semiconductor substrate;
removing the nitride layer;
etching the oxide layer to forming a first gate oxide layer in contact with the field oxide layer;
forming a second gate oxide layer on the semiconductor substrate adjacent to the first gate oxide layer, the second gate oxide layer having a thickness less than a thickness of the first gate oxide layer; and
forming a gate pattern over the field oxide layer, the first gate oxide layer, the second gate oxide layer, and part of the STI layer.
10. The method of claim 9 , wherein the first gate oxide layer is in contact with an end portion of the field oxide.
11. The method of claim 9 , wherein an edge portion of the field oxide layer is in contact with an the STI layer.
12. The method of claim 9 , wherein the gate pattern covers an entire width of the field oxide layer, the entire first gate oxide layer, and the entire second gate oxide layer.
13. The method of claim 9 , wherein the STI layer has a depth less than 150 nm.
14. The method of claim 9 , wherein forming the field oxide layer comprises:
patterning the nitride layer and the oxide layer to expose a portion of the substrate adjacent to the STI layer to define a field oxide region; and
oxidizing the exposed portion of the substrate.
15. The method of claim 1 , wherein removing the nitride layer comprises wet etching the nitride layer.
16. The method of claim 1 , wherein patterning the nitride layer comprises forming a photoresist pattern by a photolithography process that exposes a portion of the nitride layer adjacent to the STI layer.
17. The method of claim 16 , wherein patterning the nitride layer and the oxide layer comprises etching the nitride layer and the oxide layer using the photoresist pattern as a mask.
18. The method of claim 9 , wherein removing the nitride layer comprises wet etching the nitride layer.
19. The method of claim 14 , wherein patterning the nitride layer comprises forming a photoresist pattern by a photolithography process that exposes a portion of the nitride layer adjacent to the STI layer.
20. The method of claim 19 , wherein patterning the nitride layer and the oxide layer comprises etching the nitride layer and the oxide layer using the photoresist pattern as a mask.