Crack stopper on under-bump metallization layer
A semiconductor die includes a crack stopper on an under-bump metallization (UBM) layer. The crack stopper is in the shape of hollow cylinder with at least two openings.
1. A semiconductor device, comprising:
an under-bump metallization (UBM) layer overlying a semiconductor substrate;
a crack stopper having a base portion overlying the UBM layer, the crack stopper being located along an exterior region of the UBM layer and entirely within an outside periphery of the UBM layer; and
a solder bump overlying the UBM layer and the crack stopper, the base portion embedded in the solder bump;
wherein the crack stopper is a hollow cylinder comprising at least two segments separated by at least two openings, and
a first total area (A) of the at least two openings and a second total area (B) of the at least two segments satisfy the following formula: 0.7*B >A >0.03*B.
2. The semiconductor device of claim 1 , wherein the crack stopper has a thickness (W) and a height (H), and the ratio H/W is equal to or greater than 1.
3. The semiconductor device of claim 2 , wherein the ratio H/W is equal to or greater than 2.
4. The semiconductor device of claim 1 , wherein the crack stopper has a height (H) greater than 15 μm.
5. The semiconductor device of claim 1 , wherein a distance (d) between an outside edge of the crack stopper and the outside periphery of the UBM layer is greater than 3 μm.
6. The semiconductor device of claim 5 , wherein a diameter (D) of the UBM layer and the distance (d) satisfy the formula: ⅓*D>d >3 μm.
7. The semiconductor device of claim 1 , wherein the crack stopper comprises copper.
8. The semiconductor device of claim 1 , further comprising an interconnect layer underlying the UBM layer, and a passivation layer underlying the interconnect layer.
9. The semiconductor device of claim 8 , further comprising a polymer layer between the interconnect layer and the UBM layer.
10. An assembly, comprising: a semiconductor die, a substrate, and a solder joint structure;
wherein the semiconductor die is electrically and physically coupled to the substrate through the solder joint structure;
wherein the semiconductor die comprises a semiconductor substrate, an under-bump metallization (UBM) layer overlying the semiconductor substrate, and a crack stopper overlying the UBM layer and located along and entirely within an outside periphery of the UBM layer;
wherein the crack stopper is a hollow cylinder and has a substantially uniform wall thickness (W) and at least two segments separated by at least two openings; and
wherein a first total area (A) of the at least two openings and a second total area (B) of the at least two segments satisfy the following formula: 0.7*B>A>0.03*B.
11. The assembly of claim 10 , wherein the crack stopper has a height (H), and the ratio H/W is equal to or greater than 1.
12. The assembly of claim 11 , wherein the ratio H/W is equal to or greater than 2.
13. The assembly of claim 10 , wherein the crack stopper has a height (H) greater than 15 μm.
14. The assembly of claim 10 , wherein a distance (d) between an outside edge of the crack stopper and the outside periphery of the UBM layer is greater than 3 μm.
15. The assembly of claim 14 , wherein a diameter (D) of the UBM layer and the distance (d) satisfy the formula: ⅓*D>d >3 μm.
16. The assembly of claim 10 , wherein the crack stopper comprises copper.
17. The assembly of claim 10 , wherein the crack stopper is formed in the solder joint structure.
18. The assembly of claim 10 , wherein the semiconductor die further comprises an interconnect layer underlying the UBM layer, and a passivation layer underlying the interconnect layer.
19. The assembly of claim 18 , wherein the semiconductor die further comprises a polymer layer between the interconnect layer and the UBM layer.
20. A semiconductor device, comprising:
an under-bump metallization (UBM) layer overlying a semiconductor substrate, the UBM layer comprising a first layer and a second layer;
a crack stopper having a base portion overlying the UBM layer, the crack stopper being located along an exterior region of the UBM layer, entirely within an outside periphery of the first layer, and aligned with an outside periphery of the second layer; and
a solder bump overlying the UBM layer and the crack stopper, the base portion embedded in the solder bump,
wherein the crack stopper is a hollow cylinder comprising at least two segments separated by at least two openings, and
a first total area (A) of the at least two openings and a second total area (B) of the at least two segments satisfy the following formula: 0.7*B>A>0.03*B.