Interconnect structures for integrated circuits and their formation
An embodiment of an interconnect structure for an integrated circuit may include a first conductor coupled to circuitry, a second conductor, a dielectric between the first and second conductors, and a conductive underpass under and coupled to the first and second conductors and passing under the dielectric or a conductive overpass over and coupled to the first and second conductors and passing over the dielectric. The second conductor would be floating but for its coupling to the conductive underpass or the conductive overpass. In other embodiments, another dielectric might be included that would electrically isolate the second conductor but for its coupling to the conductive underpass or the conductive overpass.
1. An interconnect structure for an integrated circuit device, comprising:
first conductor coupled to circuitry;
a second conductor;
a first dielectric between the first and second conductors;
a conductive overpass over and coupled to the first and second conductors and passing over the first dielectric, wherein the conductive overpass electrically couples the first conductor to the second conductor; and
a second dielectric that would electrically isolate the second conductor but for the second conductor coupling to the conductive overpass;
wherein the conductive overpass is a single conductive contact that is in direct physical contact with both of the first and second conductors.
2. The interconnect structure of claim 1 , wherein the second dielectric comprises portions that are contiguous with the first dielectric so that the second conductor is between the portions of the second dielectric.
3. The interconnect structure of claim 2 , wherein the portions of the second dielectric that are contiguous with the first dielectric abut sides of the first dielectric.
4. An interconnect structure for an integrated circuit device, comprising:
first conductor coupled to circuitry;
a second conductor;
a first dielectric between the first and second conductors;
a conductive overpass over and coupled to the first and second conductors and passing over the first dielectric; and
a second dielectric that would electrically isolate the second conductor but for the second conductor coupling to the conductive overpass;
wherein the second dielectric comprises portions that are contiguous with the first dielectric so that the second conductor is between the portions of the second dielectric;
wherein the portions of the second dielectric that are contiguous with the first dielectric abut sides of the first dielectric; and
wherein the first dielectric forms a loop around an end of the first conductor.
5. The interconnect structure of claim 4 , wherein the portions of the second dielectric that abut the sides of the first dielectric comprise first and second portions of the second dielectric, wherein the first portion of the second dielectric abuts a side of the first dielectric on an exterior of the loop and the second portion of the second dielectric abuts a side of the first dielectric on an interior of the loop.
6. The interconnect structure of claim 2 , wherein the first conductor is bulged where at least one of the portions of second dielectric is contiguous with the first dielectric.
7. The interconnect structure of claim 1 , wherein the conductive overpass is directly coupled to an enlarged portion of the first conductor.
8. The interconnect structure of claim 1 , wherein the single conductive contact is coupled in direct physical contact with upper surfaces of both of the first and second conductors.
9. An interconnect structure for an integrated circuit device, comprising:
a first conductor coupled to circuitry;
a second conductor;
a dielectric between the first and second conductors; and
a conductive underpass under and coupled to the first and second conductors and passing under the dielectric, wherein the conductive underpass electrically couples the first conductor to the second conductor;
wherein the second conductor would be floating but for its coupling to the conductive underpass; and
wherein the conductive underpass is a single conductive plug that is in direct physical contact with both of the first and second conductors.
10. The interconnect structure of claim 9 , wherein the single conductive plug is coupled in direct physical contact with bottom surfaces of both of the first and second conductors.
11. The interconnect structure of claim 9 , further comprising a second dielectric, comprising portions that are contiguous with the first dielectric so that the second conductor is between the portions of the second dielectric and would be electrically isolated by the portions of the second dielectric but for the coupling of the second conductor to the conductive underpass.
12. An interconnect structure for an integrated circuit device, comprising:
a first conductor coupled to circuitry;
a second conductor on a first side of the first conductor;
a first dielectric on the first side of the first conductor between the first and second conductors;
a third conductor on a second side of the first conductor;
a second dielectric on the second side of the first conductor between the first and third conductors; and
a contact extending over the first conductor, the first and second dielectrics, and portions of the second and third conductors so that the contact electrically couples the first conductor to the second conductor and electrically couples the first conductor to the third conductor;
wherein the second and third conductors would be floating but for their contact with the contact; and
wherein the contact is a single contact that is in direct contact with all of the first, second, and third conductors.
13. The interconnect structure of claim 12 , wherein a width of the contact is greater than a combined width of the first and second dielectrics and a portion of the first conductor in contact with the contact.
14. The interconnect structure of claim 13 , wherein the portion of the first conductor in contact with the contact is enlarged.
15. The interconnect structure of claim 14 , wherein the first and second dielectrics are portions of a third dielectric that wraps around the enlarged portion of the first conductor in contact with the contact.
16. The interconnect structure of claim 12 , further comprising a third dielectric contiguous with the first and second dielectrics and electrically isolating the second and third conductors but for their contact with the contact.
17. An interconnect structure for an integrated circuit device, comprising:
a first conductive line coupled to circuitry;
second and third conductive lines;
a first dielectric between the first and second conductive lines;
a second dielectric between the second and third conductive lines;
a conductive plug under and coupled to the first and second conductive lines and passing under the first dielectric, wherein the conductive plug electrically couples the first conductive line to the second conductive line; and
a conductive contact over and coupled to the second and third conductive lines and passing over the second dielectric, wherein the conductive contact electrically couples the second conductive line to the third conductive line;
wherein the second conductive line would be floating but for its coupling to the conductive contact and the conductive plug and third conductive line would be floating but for its coupling to the conductive contact
wherein the conductive plug is a single conductive plug that is in direct physical contact with both of the first and second conductive lines; and
wherein the conductive contact is a single conductive contact that is in direct physical contact with both of the second and third conductive lines.
18. The interconnect structure of claim 17 , wherein the first, second, and third, conductive lines are substantially straight.
19. The interconnect structure of claim 17 , further comprising a third dielectric that would electrically isolate the second and third conductive lines but for their coupling to the conductive plug and the conductive contact.
20. The interconnect structure of claim 19 , wherein the third dielectric comprises first and second portions that are contiguous with the first dielectric.
21. The interconnect structure of claim 20 , wherein the second and third conductive lines are between the first and second portions of the third dielectric.
22. An interconnect structure for an integrated circuit device, comprising:
a first conductive line coupled to circuitry;
second and third conductive lines;
a first dielectric between the first and second conductive lines;
a second dielectric between the second and third conductive lines;
a conductive plug under and coupled to the first and second conductive lines and passing under the first dielectric; and
a conductive contact over and coupled to the second and third conductive lines and passing over the second dielectric;
a third dielectric that would electrically isolate the second and third conductive lines but for their coupling to the conductive plug and the conductive contact;
wherein the second conductive line would be floating but for its coupling to the conductive contact and the conductive plug and third conductive line would be floating but for its coupling to the conductive contact;
wherein the third dielectric comprises first and second portions that are contiguous with the first dielectric;
wherein the second and third conductive lines are between the first and second portions of the third dielectric; and
wherein the second and third conductive lines are respectively portions of fourth and fifth conductive lines, wherein the first and second portions of the third dielectric electrically isolate the second and third conductive lines from other portions of the fourth and fifth conductive lines that are coupled to the circuitry.
23. The interconnect structure of claim 17 , further comprising a fourth conductive line over and coupled to the conductive contact.