Semiconductor-on-insulator with back side strain inducing material
View Patent ↗Embodiments of the present invention provide for the application of strain inducing layers to enhance the mobility of transistors formed on semiconductor-on-insulator (SOI) structures. In one embodiment, a method for fabricating an integrated circuit is disclosed. In a first step, active circuitry is formed in an active layer of a SOI wafer. In a second step, substrate material is removed from a substrate layer disposed on a back side of the SOI wafer. In a third step, insulator material is removed from the back side of the SOI wafer to form an excavated insulator region. In a fourth step, a strain inducing material is deposited on the excavated insulator region. The strain inducing material interacts with the pattern of excavated insulator such that a single layer provides both tensile and compressive stress to p-channel and n-channel transistors, respectively. In alternative embodiments, the entire substrate is removed before forming the strain inducing material.
1. A method of fabricating an integrated circuit, the method comprising the steps of:
forming a plurality of active devices in an active layer of a semiconductor-on-insulator wafer, the active devices including n-channel and p-channel transistors, each active device having a channel;
wherein the plurality of active devices are predominantly n-channel transistors or predominantly p-channel transistors;
removing a substrate material from a substrate layer disposed on a back side of said semiconductor-on-insulator wafer; and
forming a single layer of strain inducing material proximate or in a portion of the channel of at least one n-channel transistor and at least one p-channel transistor.
2. The method of claim 1 , further comprising the step of selecting one of a material or an arrangement of the strain inducing material that provides an increase in a mobility of charge carriers in the n-channel transistor or the p-channel transistor.
3. The method of claim 1 , further comprising the step of removing an insulator material from said back side of said semiconductor-on-insulator wafer before forming the strain inducing material.
4. The method of claim 1 , wherein the step of forming the strain inducing material forms variant configurations on the back side of the semiconductor-on-insulator wafer.
5. The method of claim 1 , wherein the step of forming the strain inducing material selectively forms at least one of a mechanical tensile strain inducing material and a compressive strain inducing material.
6. The method of claim 1 , wherein a material to form the strain inducing material is selected from the group comprising: silicon nitride, aluminum nitride, and diamond-like carbon.
7. The method of claim 6 , further comprising the step of changing conditions under which the material is deposited to create a compressive or tensile strain in the strain inducing material.
8. The method of claim 1 , further comprising the step of arranging the strain inducing material in different patterns that create bi-axial strain or uni-axial strain in a direction parallel or perpendicular to the flow of charge carriers.
9. The method of claim 1 , further comprising the step of arranging the strain inducing material in patterns selected from the group comprising: a pattern that surrounds a gate of the active device, a pattern that surrounds the gate of the active device that has a large ratio of width over length, a striped pattern that transverses, and a strip pattern formed along a side of the gate.
10. The method of claim 1 , further comprising the step of arranging the strain inducing material for a subset of active devices in the active layer.
11. The method of claim 1 , further comprising the step of using a material for the strain inducing material that has a thermal conductivity greater than 50 W/m*K.
12. An integrated circuit product created in accordance with the method of claim 1 .
13. A method for fabricating a semiconductor device, the method comprising the steps of:
forming a plurality of active devices in an active layer of a semiconductor-on-insulator wafer, the active devices including n-channel and p-channel transistors, each active device having a channel and a gate;
wherein the plurality of active devices are predominantly n-channel transistors or predominantly p-channel transistors; and
forming a single layer of strain inducing material after the step of forming the active devices, the strain inducing material being situated proximate or in the channel of at least one n-channel and at least one p-channel transistor and on an opposite side of the channel from the gate.
14. The method of claim 13 , further comprising the step of removing an insulator material from a back side of said semiconductor-on-insulator wafer.
15. The method of claim 14 , wherein the step of removing the insulator material removes the insulator material from said back side of said semiconductor-on-insulator wafer before forming the strain inducing material.
16. The method of claim 13 , wherein the step of forming the strain inducing material forms variant configurations on a back side of the semiconductor-on-insulator wafer.
17. The method of claim 13 , wherein the step of forming the strain inducing material selectively forms at least one of a mechanical tensile strain inducing material and a compressive strain inducing material.
18. The method of claim 13 , wherein a material to form the strain inducing material is selected from the group comprising: silicon nitride, aluminum nitride, and diamond-like carbon.
19. A semiconductor device product created in accordance with the method of claim 13 .