Charged particle system for reticle/wafer defects inspection and review
The present invention relates to a charged particle system for reticle or semiconductor wafer defects inspection and review, and more particularly, relates to an E-beam inspection tool for reticle or semiconductor wafer defects inspection and review without gravitational AMC settling. The charged particle system is an upside down electron beam inspection system with an electron beam aimed upward. The face down design may prevent AMC from gravitational settling on the inspected face of the specimen during inspection, thereafter having a cleaner result compared with conventional face-up inspection system.
1. An aimed-up charged particle beam system, comprising:
an electron source providing a primary beam upward;
a condenser lens, over the electron source, for condensing the primary beam;
an objective lens, over the condenser lens, for focusing the primary beam to a surface of a specimen; and
an operation stage for holding the specimen upside down and the surface of the specimen facing downward to the primary beam, such that particles nearby will not drop to the surface of the specimen.
2. The aimed-up charged particle beam system of claim 1 , further comprising a detector between the objective lens and the condenser lens.
3. The aimed-up charged particle beam system of claim 2 , wherein the electron source, condenser lens, detector, objective lens, and operation stage are inside a vacuum chamber.
4. The aimed-up charged particle beam system of claim 3 , wherein the electron source, condenser lens, detector, and objective lens are inside a column.
5. The aimed-up charged particle beam system of claim 3 , wherein aimed-up charged particle beam system comprises a plurality of columns and each of columns comprises the electron source, condenser lens, detector, and objective lens therein.
6. The aimed-up charged particle beam system of claim 2 , wherein the aimed-up charged particle beam system is a SORIL SEM.
7. The aimed-up charged particle beam system of claim 2 , wherein the objective lens includes a magnetic lens and an electrostatic lens.
8. The aimed-up charged particle beam system of claim 7 , wherein the objective lens includes a deflector inside the objective lens.
9. The aimed-up charged particle beam system of claim 2 , wherein the detector receives secondary electrons emanating from the surface of the specimen.
10. The aimed-up charged particle beam system of claim 2 , wherein the electron source is configured at the bottom of the aimed-up charged particle beam system.
11. The aimed-up charged particle beam system of claim 10 , wherein the operation stage is configured at the top of the aimed-up charged particle beam system.
12. The aimed-up charged particle beam system of claim 11 , further comprising a supporting means for supporting the operation stage at the top of the aimed-up charged particle beam system.
13. The aimed-up charged particle beam system of claim 12 , wherein the supporting means comprises at least three pillars.
14. The aimed-up charged particle beam system of claim 12 , wherein the supporting means is a cylinder.
15. The aimed-up charged particle beam system of claim 14 , wherein the electron source, condenser lens, detector, and objective lens are inside a vacuum chamber or a column; and the vacuum chamber or the column is inside the cylinder.
16. The aimed-up charged particle beam system of claim 12 , further comprising a moving stage configured at the bottom of the aimed-up charged particle beam system for moving the operation stage on X, Y, and Z direction.
17. The aimed-up charged particle beam system of claim 16 , wherein the operation stage is supported over the moving stage by the supporting means.
18. The aimed-up charged particle beam system of claim 11 , further comprising a pair of X direction sliders configured at the top of the aimed-up charged particle beam system for moving the operation stage on X direction.
19. The aimed-up charged particle beam system of claim 11 , further comprising a pair of Y direction sliders configured at the top of the aimed-up charged particle beam system for moving the operation stage on Y direction.
20. The aimed-up charged particle beam system of claim 1 , further comprising an adaptor configured on the operation stage for holding the specimen upside down and the surface of the specimen facing downward to the primary beam.
21. The aimed-up charged particle beam system of claim 20 , further comprising a clamping ring configured on the adaptor for preventing specimen from downfall.
22. The aimed-up charged particle beam system of claim 21 , further comprising a pin in the clamping ring for electrically coupling the specimen to ground during inspection.