Closed-space annealing of chalcogenide thin-films with volatile species
In one embodiment, a method includes depositing a chalcogenide precursor layer onto a substrate, introducing a cover into proximity with the precursor layer, and annealing the precursor layer in proximity with of the cover, where the annealing is performed in a constrained volume, and where the presence of the cover reduces decomposition of volatile species from the precursor layer during annealing.
1. A method comprising:
depositing a precursor layer onto a substrate, the precursor layer comprising chalcogenide material with one or more volatile species;
introducing a cover into proximity with the precursor layer; and
annealing the precursor layer in proximity with of the cover, wherein the annealing is performed in a constrained volume, and wherein the presence of the cover reduces decomposition of the volatile species from the precursor layer during annealing,
wherein the precursor layer comprises Cu, Zn, Sn, and one or more of S or Se,
wherein the volatile species comprise Sn and one or more of S or Se, and
wherein the cover is coated with a source-material layer comprising Sn and one or more of S or Se.
2. The method of claim 1 , wherein the cover is coated with a source-material layer, the source-material layer comprising one or more of the volatile species.
3. The method of claim 2 , wherein annealing is performed with the source-material layer being substantially in contact with the precursor layer.
4. The method of claim 2 , wherein the cover comprises a belt-conveyor, and wherein the source-material layer is continually replenished onto the belt-conveyor.
5. The method of claim 2 , wherein the cover comprises a patterned-substrate, the source material layer being deposited onto the patterned-substrate.
6. The method of claim 5 , wherein annealing is performed with the source-material layer being compressed against the precursor layer.
7. The method of claim 5 , wherein annealing comprises depositing the source-material layer onto the precursor layer in a pattern corresponding to the patterned-substrate.
8. The method of claim 1 , wherein the precursor layer comprises one or more chalcogenide materials.
9. The method of claim 1 , wherein the source-material layer further includes one or more of SnS, SnSe, CuS 2 , CuSe 2 .
10. The method of claim 1 , wherein the precursor layer comprises Cu 2 ZnSn(S z Se 1-z ) 4 , and wherein 0≦z≦1.
11. The method of claim 1 , wherein the precursor layer comprises Cu x Zn y Sn α (S z Se 1-z ) β , and wherein approximately 0.5≦x≦3, y=1, 0≦z≦1, 0.5≦α≦3, and 0≦β≦5.
12. The method of claim 1 , wherein introducing the cover into proximity with the precursor layer comprises introducing the cover over the precursor layer.
13. The method of claim 1 , wherein annealing is performed with the cover separated from the precursor layer by approximately 0.01 mm to 5 mm.
14. The method of claim 13 , wherein spacers are used to separate the cover from the precursor layer.
15. The method of claim 1 , wherein annealing is performed with the cover being substantially in contact with the precursor layer.
16. The method of claim 1 , wherein the cover substantially encloses the precursor layer.
17. The method of claim 1 , wherein the cover comprises glass.
18. The method of claim 1 , wherein annealing comprises heating the precursor layer to a first temperature of approximately 350 degrees Celsius to approximately 700 degrees Celsius, holding the precursor layer at the first temperature for approximately 5 minutes to approximately 120 minutes, and then cooling the precursor layer to a second temperature of approximately 20 degrees Celsius to approximately 100 degrees Celsius.
19. A method comprising:
depositing a precursor layer onto a substrate, the precursor layer comprising chalcogenide material with one or more volatile species;
introducing a cover into proximity with the precursor layer; and
annealing the precursor layer in proximity with of the cover, wherein the annealing is performed in a constrained volume, and wherein the presence of the cover reduces decomposition of the volatile species from the precursor layer during annealing,
wherein the precursor layer comprises Cu, one or more of In or Ga, and one or more of S or Se,
wherein the volatile species comprise one or more of In, S, or Se, and
wherein the cover is coated with a source-material layer comprising one or more of Cu or In, and one or more of S or Se.
20. The method of claim 19 , wherein the source-material layer further includes one or more of In 2 S 3 , In 2 Se 3 , Ga 2 S 3 , Ga 2 Se 3 , CuSe, CuSe 2 .
21. The method of claim 19 , wherein the precursor layer comprises CuIn y Ga (1-y) (S z Se 1-z ) 2 ,
and wherein 0≦y≦1, and 0≦z≦1.
22. The method of claim 19 , wherein the precursor layer comprises CU x (In y Ga (1-y) ) α (S z Se 1-z ) β , and wherein approximately 0.1≦x≦0.7, 0≦y≦1, 0≦z≦1, 0.3≦α≦0.8, and β=1.
23. A method comprising:
depositing a first precursor layer onto a first substrate, the first precursor layer comprising chalcogenide material with one or more volatile species;
depositing a second precursor layer onto a second substrate, the second precursor layer comprising chalcogenide material with one or more of the volatile species;
introducing the first precursor layer over the second precursor layer; and
annealing the first precursor layer and the second precursor,
wherein the presence of the first precursor layer reduces decomposition of the volatile species from the second precursor layer during annealing,
wherein the presence of the second precursor layer reduces decomposition of the volatile species from the first precursor layer during annealing
wherein the second precursor layer comprises Cu, Zn, Sn, and one or more of S or Se,
wherein the volatile species comprise Sn and one or more of S or Se, and
wherein the first precursor layer comprises Sn and one or more of S or Se.