Alkaline-earth metal oxide-polymeric polishing pad
View Patent ↗The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The polishing pad includes a polymeric matrix, the polymeric matrix having a polishing surface. In addition, polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. The polymeric microelements have an outer surface and being fluid-filled for creating texture at the polishing surface. And alkaline-earth metal oxide-containing regions are distributed within each of the polymeric microelements and spaced to coat less than 50 percent of the outer surface of the polymeric microelements.
1. A polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates comprising:
a polymeric matrix, the polymeric matrix having a polishing surface;
polymeric microelements distributed within the polymeric matrix and at the polishing surface of the polymeric matrix; the polymeric microelements having an outer surface and being fluid-filled for creating texture at the polishing surface; and
alkaline-earth metal oxide-containing regions distributed within each of the polymeric microelements, the alkaline-earth metal oxide-containing regions being spaced to coat less than 50 percent of the outer surface of the polymeric microelements; and less than 0.1 weight percent total of the polymeric microelements being associated with i)alkaline-earth metal oxide-containing particles having a particle size of greater than 5 μm; ii) alkaline-earth metal oxide-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric microelements agglomerated with alkaline-earth metal oxide-containing particles to an average cluster size of greater than 120 μm.
2. The polishing pad of claim 1 wherein the alkaline-earth metal oxide-containing regions associated with the polymeric microelements have an average size of 0.01 to 3 μm.
3. The polishing pad of claim 1 wherein the polymeric microelements have an average size of 5 to 200 microns.
4. The polishing pad of claim 1 wherein the alkaline-earth metal oxide-containing regions cover 1 to 40 percent of the outer surface of the polymeric microelements.
5. A polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates comprising:
a polymeric matrix, the polymeric matrix having a polishing surface;
polymeric micro elements distributed within the polymeric matrix and at the polishing surface of the polymeric matrix; the polymeric microelements having an outer surface and being fluid-filled for creating texture at the polishing surface; and
alkaline-earth metal oxide-containing regions distributed within each of the polymeric microelements, the alkaline-earth metal oxide being calcium oxide, magnesium oxide or a mixture of calcium and magnesium oxides, the alkaline-earth metal oxide-containing regions being spaced to coat 1 to 40 percent of the outer surface of the polymeric microelements; and less than 0.05 weight percent total of the polymeric microelements being associated with i) alkaline-earth metal oxide-containing particles having a particle size of greater than 5 μm; ii) alkaline-earth metal oxide-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric microelements agglomerated with alkaline-earth metal oxide-containing particles to an average cluster size of greater than 120 μm.
6. The polishing pad of claim 5 wherein the alkaline-earth metal oxide-containing regions distributed on the polymeric microelements have an average particle size of 0.01 to 2 microns.
7. The polishing pad of claim 5 wherein the polymeric microelements have an average size of 10 to 100 microns.
8. The polishing pad of claim 5 wherein the alkaline-earth metal oxide-containing regions cover 2 to 30 percent of the outer surface of the polymeric microelements.