Integrated circuit with on chip planar diode and CMOS devices
An electrical circuit, planar diode, and method of forming a diode and one or more CMOS devices on the same chip. The method includes electrically isolating a portion of a substrate in a diode region from other substrate regions. The method also includes recessing the substrate in the diode region. The method further includes epitaxially forming in the diode region a first doped layer above the substrate and epitaxially forming in the diode region a second doped layer above the first doped layer.
1. A method of forming a diode and at least one CMOS device on a same chip, the method comprising steps of:
electrically isolating a portion of a substrate in a diode region from other substrate regions;
recessing the substrate in the diode region;
epitaxially forming in the diode region a first doped layer above the substrate;
epitaxially forming in the diode region a second doped layer above the first doped layer;
epitaxially forming in the diode region a middle undoped layer above at least a part of the first doped layer, wherein the second doped layer is formed above the middle undoped layer; and
simultaneously epitaxially forming in the diode region the middle undoped layer and an external undoped layer outside the diode region as part of the at least one CMOS device.
2. The method of claim 1 , wherein the first doped layer, the middle undoped layer and the second doped layer are configured together as a vertical PIN diode.
3. The method of claim 1 , further comprising forming at least a part of the at least one CMOS device while forming the diode.
4. The method of claim 3 , wherein recessing the substrate in the diode region includes simultaneously recessing at least one of the other substrate regions to a lesser extent than occurs in recessing the substrate in the diode region.
5. The method of claim 3 , wherein at least one of epitaxially forming the first doped layer and epitaxially forming the second doped layer includes simultaneously epitaxially forming an external layer outside the diode region as part of the at least one CMOS device.
6. The method of claim 5 , wherein the at least one CMOS device includes at least one of an nFET and a pFET and the external layer is a source-drain epitaxial layer of one of the nFET and the pFET.
7. The method of claim 1 , wherein the substrate is a silicon on insulator wafer having a silicon layer above an insulator layer, the silicon layer being at least 40 nm thick.
8. The method of claim 1 , wherein the first doped layer includes in-situ boron doped silicon germanium.
9. The method of claim 1 , wherein the second doped layer includes at least one of in-situ phosphorus doped silicon and a combination of silicon and carbon.
10. The method of claim 1 , wherein the first doped layer and the second doped layer are configured together as a vertical PN diode.
11. A method of forming a diode and at least one CMOS device on a same chip, the method comprising steps of:
electrically isolating a portion of a substrate in a diode region from other substrate regions;
recessing the substrate in the diode region;
epitaxially forming in the diode region a first doped layer above the substrate; and
epitaxially forming in the diode region a second doped layer above the first doped layer;
wherein a width of the diode region is at least 10 times greater than a pitch of the at least one CMOS device.
12. The method of claim 11 , further comprising:
epitaxially forming in the diode region a middle undoped layer above at least a part of the first doped layer, wherein the second doped layer is formed above the middle undoped layer.
13. The method of claim 12 , wherein the first doped layer, the middle undoped layer and the second doped layer are configured together as a vertical PIN diode.
14. The method of claim 11 , further comprising forming at least a part of the at least one CMOS device while forming the diode.
15. The method of claim 14 , wherein recessing the substrate in the diode region includes simultaneously recessing at least one of the other substrate regions to a lesser extent than occurs in recessing the substrate in the diode region.
16. The method of claim 14 , wherein at least one of epitaxially forming the first doped layer and epitaxially forming the second doped layer includes simultaneously epitaxially forming an external layer outside the diode region as part of the at least one CMOS device.
17. The method of claim 16 , wherein the at least one CMOS device includes at least one of an nFET and a pFET and the external layer is a source-drain epitaxial layer of one of the nFET and the pFET.
18. The method of claim 11 , wherein the substrate is a silicon on insulator wafer having a silicon layer above an insulator layer, the silicon layer being at least 40 nm thick.
19. The method of claim 11 , wherein the first doped layer includes in-situ boron doped silicon germanium.
20. The method of claim 11 , wherein the second doped layer includes at least one of in-situ phosphorus doped silicon and a combination of silicon and carbon.
21. The method of claim 11 , wherein the first doped layer and the second doped layer are configured together as a vertical PN diode.
22. The method of claim 11 , further comprising:
simultaneously epitaxially forming in the diode region a middle undoped layer above at least a part of the first doped layer and an external undoped layer outside the diode region as part of the at least one CMOS device, wherein the second doped layer is formed above the middle undoped layer.