Methods for forming barrier regions within regions of insulating material resulting in outgassing paths from the insulating material and related devices
View Patent ↗Methods and devices are provided for fabricating a semiconductor device having barrier regions within regions of insulating material resulting in outgassing paths from the regions of insulating material. A method comprises forming a barrier region within an insulating material proximate the isolated region of semiconductor material and forming a gate structure overlying the isolated region of semiconductor material. The barrier region is adjacent to the isolated region of semiconductor material, resulting in an outgassing path within the insulating material.
1. A semiconductor device comprising:
a region of semiconductor material;
a barrier region adjacent to the region of the semiconductor material;
a region of insulating material, wherein the barrier region is interposed between the region of semiconductor material and at least a portion of the insulating material, resulting in an outgassing path within the region of insulating material, and wherein the barrier region is formed only in the region of insulating material; and
a gate structure overlying the region of semiconductor material.
2. The semiconductor device of claim 1 , wherein the barrier region comprises nitrided insulating material.
3. The semiconductor device of claim 1 , wherein the gate structure is spaced apart from the region of insulating material.
4. The semiconductor device of claim 1 , wherein the barrier region is contiguous about a perimeter of the region of semiconductor material.
5. The semiconductor device of claim 1 , wherein the insulating material comprises silicon dioxide and the barrier region comprises silicon oxynitride.
6. The semiconductor device of claim 1 , wherein a sum of a width of the barrier region and a width of the region of semiconductor material is greater than or equal to a width of the gate structure.
7. The semiconductor device of claim 6 , wherein the gate structure has a width greater than the width of the region of semiconductor material.
8. The semiconductor device of claim 7 , wherein the gate structure is spaced apart from the region of insulating material.
9. The semiconductor device of claim 1 , further comprising a support layer and a layer of insulating material on the support layer, wherein the region of semiconductor material is disposed on the layer of insulating material.
10. The semiconductor device of claim 9 , wherein the barrier region extends to, and optionally abuts, the layer of insulating material.
11. The semiconductor device of claim 1 , wherein the barrier region is contiguous about a perimeter of the region of semiconductor material.