Apparatus of manufacturing semiconductor packages and methods of manufacturing semiconductor packages using the same
Apparatuses of manufacturing semiconductor packages are provided. An apparatus includes a chuck having a body, a porous plate disposed on the body, and a buffer pad disposed on the plate to provide a place on which a plurality of chips are loaded. The buffer pad has elasticity greater than the plate. The apparatus also includes a vacuum part supplying vacuum to the chuck so that the plurality of chips are sucked onto the buffer pad. Methods of manufacturing semiconductor packages using the apparatus are also provided.
1. An apparatus comprising:
a chuck having a body, a porous plate disposed on the body, and a buffer pad disposed on the plate, the buffer pad configured to receive a plurality of semiconductor chips;
a vacuum part supplying vacuum to the chuck, the vacuum part configured to supply a vacuum to act upon the plurality of semiconductor chips;
a driving part configured to move the chuck; and
a heating part in the chuck.
2. The apparatus of claim 1 , wherein the buffer pad has elasticity greater than elasticity of the plate.
3. The apparatus of claim 1 , wherein the body includes,
an upper portion including a groove in which the plate and the buffer pad are sequentially stacked; and
a lower portion extending downward from the upper portion.
4. An apparatus comprising:
a chuck having a body, a porous plate disposed on the body, and a buffer pad disposed on the plate, the buffer pad configured to receive a plurality of semiconductor chips; and
a vacuum part supplying vacuum to the chuck, the vacuum part configured to supply a vacuum to act upon the plurality of semiconductor chips,
wherein the buffer pad includes a plurality of line-shaped patterns parallel with each other.
5. The apparatus of claim 4 , wherein the plurality of line-shaped patterns include first line-shaped patterns parallel with each other and second line-shaped patterns parallel with each other, wherein the first line-shaped patterns extend in a first direction, and the second line-shaped patterns extend in a second direction.
6. The apparatus of claim 4 , wherein the plurality of line-shaped patterns respectively correspond to chip pads or solder balls of the plurality of semiconductor chips.
7. An apparatus comprising:
a chuck having a body, a porous plate disposed on the body, and a buffer pad disposed on the plate, the buffer pad configured to receive a plurality of semiconductor chips; and
a vacuum part supplying vacuum to the chuck, the vacuum part configured to supply a vacuum to act upon the plurality of semiconductor chips,
wherein the buffer pad includes a heat resistant rubber material or an engineering plastic material, and the porous plate includes an alumina material, a mulite material, a ceramic material or a silicon carbide material.
8. The apparatus of claim 1 , wherein the chuck further includes alignment marks on the body.
9. An apparatus comprising:
a chuck having one or more alignment marks and a buffer pad, the buffer pad configured to receive one or more chips, wherein the chips are aligned on the buffer pad based on the alignment marks;
a vacuum part connected to the chuck, the vacuum part configured to generate a vacuum to act upon the chips;
a driving part configured to move the chuck; and
a heating part configured to heat the chips.
10. The apparatus of claim 9 , wherein the buffer pad includes a plurality of line-shaped patterns.
11. The apparatus of claim 9 , wherein the buffer pad includes first line-shaped patterns extending in a first direction and second line-shaped patterns extending in a second direction.
12. The apparatus of claim 9 , wherein the buffer pad includes a plurality of patterns respectively corresponding to chip pads or solder balls of the one or more chips.
13. An apparatus comprising:
a chuck having a body, a porous plate disposed on the body, and a buffer pad disposed on the plate, the buffer pad configured to receive a plurality of semiconductor chips;
a driving part configured to move the chuck;
a heating part in the chuck; and
a vacuum part supplying vacuum to the chuck, the vacuum part configured to supply a vacuum to act upon the plurality of semiconductor chips,
wherein the body includes an upper portion including a groove in which the plate and the buffer pad are sequentially stacked, and a lower portion extending downward from the upper portion, and
wherein a top surface of the buffer pad is lower than a top surface of the body.
14. The apparatus of claim 13 , wherein the buffer pad has an elasticity greater than an elasticity of the plate.
15. The apparatus of claim 13 , wherein the chuck further includes alignment marks on the body.
16. The apparatus of claim 13 , wherein the buffer pad includes a plurality of line-shaped patterns.
17. The apparatus of claim 13 , wherein the buffer pad includes first line-shaped patterns extending in a first direction and second line-shaped patterns extending in a second direction.
18. The apparatus of claim 13 , wherein the buffer pad includes a plurality of patterns respectively corresponding to chip pads or solder balls of at least one semiconductor chip, from among the plurality of semiconductor chips.