Sealed electric element package
View Patent ↗An electronic component includes: a semiconductor substrate having a first surface and a second surface opposing to the first surface; a trans-substrate conductive plug that penetrates the semiconductor substrate from the first surface to the second surface; an electronic element provided in the vicinity of the first surface of the semiconductor; and a sealing member that seals the electronic element between the sealing member and the first surface, wherein the electronic element is electrically connected to the trans-substrate conductive plug.
1. An electronic component comprising:
a semiconductor substrate having a first surface and a second surface opposing to the first surface;
a trans-substrate conductive plug that penetrates the semiconductor substrate from the first surface to the second surface;
an electronic element provided in the vicinity of the first surface of the Semiconductor substrate;
a sealing member that seals the electronic element between the sealing member and the first surface; and
an integrated circuit which is provided on the second surface of the semiconductor substrate, at a position outside of a sealed area by the sealing member, and including a transistor and a memory element;
wherein the electronic element and the integrated circuit are electrically connected to the trans-substrate conductive plug.
2. The electronic component according to claim 1 , Further comprising:
a connecting terminal for connecting to an external apparatus, the connecting terminal being provided above the second surface of the semiconductor substrate; and
a center of the connecting terminal is provided to be closer to a center of the semiconductor substrate than a center of the trans-substrate in a plan view.
3. The electronic component according to claim 1 , wherein the electronic element includes an oscillator.
4. A circuit board comprising the electronic component according to claim 1 mounted on the circuit board.
5. An electronic apparatus comprising the electronic component according to claim 1 .