Method for manufacturing trichlorosilane
This method for manufacturing trichlorosilane, includes: reacting metallurgical grade silicon with silicon tetrachloride and hydrogen so as to obtain a reaction gas; condensing the reaction gas so as to obtain a condensate; and distilling the condensate using a distillation system including a first distillation column and a secondary distillation column so as to refine trichlorosilane. While maintaining the condensate in a high temperature state so that a concentration of aluminum chloride in the condensate becomes in a range of a saturation solubility or less, the condensate flows to the first distillation column. A liquid distilled in the first distillation column is distilled by the secondary distillation column so as to refine trichlorosilane. A liquid in which aluminum chloride is concentrated is extracted from a bottom portion of the first distillation column. The extracted liquid is concentrated and dried, and then aluminum chloride is exhausted.
1. A method for manufacturing trichlorosilane, the method comprising:
reacting metallurgical grade silicon with silicon tetrachloride and hydrogen so as to obtain a reaction gas;
condensing the reaction gas so as to obtain a condensate; and
distilling the condensate using a distillation system including a first distillation column and a secondary distillation column so as to refine trichlorosilane,
wherein the condensate is maintained in a high temperature state so that a concentration of aluminum chloride in the condensate becomes in a range of a saturation solubility or less, and the condensate flows to the first distillation column while maintaining the high temperature state,
a liquid distilled in the first distillation column is distilled by the secondary distillation column so as to refine trichlorosilane, and a liquid in which aluminum chloride is concentrated is extracted from a bottom portion of the first distillation column, and
the extracted liquid is concentrated and dried, and then aluminum chloride is exhausted.
2. The method for manufacturing trichlorosilane according to claim 1 ,
wherein, when the extracted liquid is concentrated and dried, the extracted liquid flows down from the first distillation column so as to be supplied to a concentrator, and a concentrate is transferred downward from a lower side of the concentrator so as to be supplied to a drier.
3. The method for manufacturing trichlorosilane according to claim 1 ,
wherein a reboiler of the first distillation column is driven so that an amount of circulated liquid becomes in a range of 20% or more of an amount of introduced liquid.
4. The method for manufacturing trichlorosilane according to claim 2 ,
wherein a reboiler of the first distillation column is driven so that an amount of circulated liquid becomes in a range of 20% or more of an amount of introduced liquid.