Reactor for polycrystalline silicon and polycrystalline silicon production method
The reactor for polycrystalline silicon is a reactor for polycrystalline silicon in which a silicon seed rod installed inside the reactor is heated by supplying electricity, a raw material gas supplied inside the reactor is allowed to react, thereby producing polycrystalline silicon on the surface of the silicon seed rod, and specifically, the reactor for polycrystalline silicon is provided with a raw material gas supply port installed on the bottom of the reactor and a raw material gas supply nozzle attached to the raw material gas supply port so as to be communicatively connected and extending upward, in which the upper end of the raw material gas supply nozzle is set to a height in a range from −10 cm to +5 cm on the basis of the upper end of the electrode which retains the silicon seed rod.
1. A reactor for polycrystalline silicon in which a silicon seed rod installed inside the reactor is heated by supplying electricity, a raw material gas supplied inside the reactor is allowed to react, thereby producing polycrystalline silicon on the surface of the silicon seed rod, the reactor for polycrystalline silicon, comprising:
a bottom of the reactor;
a cylindrical raw material gas supply port installed upright on the bottom of the reactor;
a cylindrical raw material gas supply nozzle which extends upward and is attached to the upper part of the raw material gas supply port so as to be communicatively connected to the raw material gas supply port, and
electrodes which are provided on the bottom to retain the both end of the silicon seed rod;
the upper end of the raw material gas supply nozzle being set to a height in a range from −10 cm to +5 cm on the basis of the upper end of the electrodes;
the raw material gas supply nozzle having a lower end face having a diameter greater than that of the raw material gas supply port and facing to the bottom of the reactor, and
a gap being made of the bottom of the reactor, an outer surface of the cylindrical raw material gas supply port and the lower end face of the raw material gas supply nozzle.
2. The reactor for polycrystalline silicon according to claim 1 , wherein the upper end of the raw material gas supply nozzle is set to a height in a range from −5 cm to +1 cm on the basis of the upper end of the electrode which retains the silicon seed rod.
3. The reactor for polycrystalline silicon according to claim 1 , wherein the raw material gas supply nozzle has a tapered cylindrical shape having an outer circumferential side face which is reduced in diameter as close to an upper end thereof.
4. The reactor for polycrystalline silicon according to claim 1 , wherein the raw material gas supply nozzle comprises a nozzle main body and a nozzle head which is installed to the tip of the nozzle main body in a removable manner.
5. The reactor for polycrystalline silicon according to claim 1 , wherein the raw material gas supply nozzle has a cylindrical hole formed in the lower end face, and the raw material gas supply port is fitted into the cylindrical hole in a detachable manner.
6. The reactor for polycrystalline silicon according to claim 1 , wherein the raw material gas supply nozzle is made of carbon.