Image sensor and method for fabricating the same
View Patent ↗The present invention discloses an image sensor including photodiodes formed in a semiconductor substrate, a color filter array formed over the photodiodes, and microlenses formed on the color filter array. A first microlens, which may be any one of two adjacent microlenses, includes an upper portion and a lower portion. The lower portion of the first microlens is formed of a material different than a material of the upper portion of the first microlens.
1. An image sensor comprising:
a plurality of photodiodes in a semiconductor substrate;
a color filter array over the plurality of photodiodes; and
a plurality of microlenses on the color filter array,
wherein a first microlens of two adjacent ones of the plurality of microlenses includes an upper portion and a lower portion, and the lower portion of the first microlens comprises a material different from a material of the upper portion of the first microlens.
2. The image sensor as claimed in claim 1 , wherein the lower portion of the first microlens comprises a material different from a material of a second microlens of the two adjacent ones of the plurality of microlenses.
3. The image sensor as claimed in claim 2 , wherein the upper portion of the first microlens comprises a same material as the second microlens.
4. The image sensor as claimed in claim 2 , wherein the first microlens has a boundary surface between the upper portion and the lower portion, wherein the boundary surface is higher than a lowermost surface of the second microlens.
5. The image sensor as claimed in claim 2 , wherein the second microlens has a lowest edge in contact with the lower portion of the first microlens.
6. The image sensor as claimed in claim 2 , further comprising a planarization layer between the color filter array and the microlenses.
7. The image sensor as claimed in claim 6 , wherein the lower portion of the first microlens comprises a portion of the planarization layer.
8. The image sensor as claimed in claim 7 , wherein the planarization layer includes a protruded portion and a recessed portion, wherein the protruded portion forms the lower portion of the first microlens, and the recessed portion has the second microlens thereon.
9. The image sensor as claimed in claim 8 , wherein the recessed portion has a thickness of about 0.25 μm to 0.35 μm, and the protruded portion has a thickness of about 0.35 μm to 0.55 μm.
10. The image sensor as claimed in claim 8 , wherein the protruded portion has a curved outside circumferential surface.
11. The image sensor as claimed in claim 8 , wherein the second microlens has a lowest edge in contact with the outside circumferential surface of the protruded portion.
12. The image sensor as claimed in claim 6 , wherein the planarization layer comprises a material different from a material of the second microlens.
13. The image sensor as claimed in claim 1 , further comprising:
an insulating film between the semiconductor substrate and the color filter array;
a wiring layer in the insulating film; and
a passivation layer between the insulating film and the color filter array.