Method for forming through silicon via with wafer backside protection
View Patent ↗Semiconductor devices with through silicon vias (TSVs) are formed without copper contamination. Embodiments include exposing a passivation layer surrounding a bottom portion of a TSV in a silicon substrate, forming a silicon composite layer over the exposed passivation layer and over a bottom surface of the silicon substrate, forming a hardmask layer over the silicon composite layer and over the bottom surface of the silicon substrate, removing a section of the silicon composite layer around the bottom portion of the TSV using the hardmask layer as a mask, re-exposing the passivation layer, and removing the hardmask layer and the re-exposed passivation layer to expose a contact for the bottom portion of the TSV.
1. A method comprising:
exposing a passivation layer surrounding a bottom portion of a through silicon via (TSV) in a silicon substrate;
forming an oxide layer over the passivation layer and a bottom surface of the silicon substrate;
forming a silicon composite layer over the oxide layer, including over the bottom portion of the TSV and over the bottom surface of the silicon substrate;
forming a hardmask layer over the silicon composite layer, including over the bottom portion of the TSV and over the bottom surface of the silicon substrate;
removing a section of the silicon composite layer around the bottom portion of the TSV using the hardmask layer as a mask to expose sidewalls of the oxide layer; and
removing the hardmask layer and the exposed sidewalls of the oxide layer to expose a contact for the bottom portion of the TSV.
2. The method according to claim 1 , further comprising forming the hardmask layer of a spin-on hardmask or planarization film.
3. The method according to claim 1 , further comprising removing the section of the silicon composite layer by wet etching, dry etching, or a combination thereof.
4. The method according to claim 1 , further comprising removing the hardmask layer and the exposed sidewalls of the oxide layer by wet etching, dry etching, or a combination thereof.
5. The method according to claim 1 , further comprising forming the mask with the hardmask layer by forming the hardmask layer over the entire silicon composite layer and planarizing down to the silicon composite layer over the bottom portion of the TSV to expose the section of the silicon composite layer.
6. The method according to claim 5 , further comprising planarizing the hardmask layer by chemical mechanical polishing, wet etching, or a combination thereof, exposing the section of the silicon composite layer.
7. The method according to claim 1 , wherein the bottom portion of the TSV includes a protective film under the passivation layer, the method further comprising:
removing the protective film from a bottom surface of the TSV, after removing the hardmask layer and the exposed sidewalls of the oxide layer to expose the contact for the bottom portion of the TSV.
8. The method according to claim 1 , further comprising forming the hardmask layer to a thickness of 1 μm 3 μm.
9. A method comprising:
backgrinding a bottom surface of a silicon substrate exposing a bottom portion of a through silicon via (TSV) surrounded by a passivation layer and a protective layer;
forming an oxide layer over the bottom portion of the TSV;
forming a silicon composite layer over the bottom portion of the TSV and the bottom surface of the silicon substrate;
forming a hardmask layer over the silicon composite layer;
planarizing the hardmask layer down to the silicon composite layer over a bottom surface of the TSV; and
removing a section of the silicon composite layer around the bottom portion of the TSV to expose sidewalls of the oxide layer.
10. The method according to claim 9 , further comprising removing the passivation layer and the protective layer to expose a contact for the bottom surface of the TSV.
11. The method according to claim 9 , further comprising planarizing the hardmask layer by chemical mechanical polishing, wet etching, or a combination thereof to expose the section of the silicon composite layer.