IP Library Granted Patent US 9,250,266
Granted Patent B2
US 9,250,266 · App. 13/557,879 · Granted Feb 2, 2016

Probe bonding method having improved control of bonding material

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Quick Facts
Patent No.
US 9,250,266
App. No.
13/557,879
Granted
Feb 2, 2016
Kind
B2
Abstract

In assembly of probe arrays for electrical test, a problem can arise where a bonding agent undesirably wicks between probes. According to embodiments of the invention, this wicking problem is alleviated by disposing an anti-wicking agent on a surface of the probe assembly such that wicking of the bonding agent along the probes toward the probe tips is hindered. The anti-wicking agent can be a solid powder, a liquid, or a gel. Once probe assembly fabrication is complete, the anti-wicking agent is removed. In preferred embodiments, a template plate is employed to hold the probe tips in proper position during fabrication. In this manner, undesirable bending of probes caused by introduction or removal of the anti-wicking agent can be reduced or eliminated.

Claims (30)

1. A probe assembly comprising:

a bonding cavity;

a plurality of probes disposed in said bonding cavity;

a bonding agent disposed in and cured in said bonding cavity; and

an anti-wicking agent disposed on a surface of said bonding cavity prior to curing.

2. The probe assembly of claim 1 comprising said anti-wicking agent removed from said bonding cavity after said bonding agent has cured.

3. The probe assembly of claim 1 further comprising a guide plate assembly having a first guide plate separated from a second guide plate by a spacer, said guide plate assembly defining said bonding cavity.

4. The probe assembly of claim 3 wherein said guide plate assembly comprises holes in said first and second guide plates.

5. The probe assembly of claim 4 wherein said plurality of probes are disposed in said holes.

6. The probe assembly of claim 5 comprising gaps of about 5 μm to about 40 μm between said plurality of probes and said guide plates.

7. The probe assembly of claim 5 comprising a lateral probe spacing that is less than about 150 μm.

8. The probe assembly of claim 4 wherein said first guide plate comprises a corresponding first hole pattern, said second guide plate comprises a corresponding second hole pattern and said first hole pattern is aligned with second hole pattern.

9. The probe assembly of claim 4 wherein said probes comprise probe tip sections that face the same way relative to said guide plate assembly.

10. The probe assembly of claim 1 wherein said bonding agent comprises a material selected from the group consisting of epoxy, thermally set material, molten plastic, and injection molding material.

11. The probe assembly of claim 1 further comprising:

a probe tip template; and

a tip section of said probes, said tip section engaged with said probe tip template prior to disposing said anti-wicking agent.

12. The probe assembly of claim 11 wherein said probe tip template comprises a material selected from the group consisting of polyimide, ceramic, and metal.

13. The probe assembly of claim 1 wherein said anti-wicking agent comprises a powder.

14. The probe assembly of claim 13 wherein said bonding agent does not substantially wick into said solid powder.

15. The probe assembly of claim 13 wherein said anti-wicking agent comprises a fine powder having a particle size of about 3 μm.

16. The probe assembly of claim 1 wherein said anti-wicking agent comprises talc.

17. The probe assembly of claim 1 wherein said anti-wicking agent comprises starch flour.

18. The probe assembly of claim 1 wherein said anti-wicking agent is compacted.

19. The probe assembly of claim 1 wherein said anti-wicking agent comprises a gel.

20. The probe assembly of claim 19 wherein said gel comprises a silicone based gel.

21. The probe assembly of claim 19 wherein said gel and said bonding agent are substantially.

22. The probe assembly of claim 1 wherein said anti-wicking agent comprises a liquid.

23. The probe assembly of claim 22 wherein said liquid comprises a compatible masking fluid.

24. The probe assembly of claim 22 wherein said liquid and said bonding agent are substantially.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
SECURITY INTEREST Recorded Jul 29, 2025
From: FORMFACTOR, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 072263/0272 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 28, 2012
From: KISTER, JANUARY
To: MICROPROBE, INC.
Reel/Frame 028859/0071 →