IP Library › Granted Patent US 8,759,765
Granted Patent B2
US 8,759,765 · App. 13/567,487 · Granted Jun 24, 2014

Method for processing samples held by a nanomanipulator

Inventors: Cheryl D. Hartfield (Dallas, TX); Thomas M. Moore (Dallas, TX); Brian P. Miller (Dallas, TX)
Assignee: Omniprobe, Inc.
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Quick Facts
Patent No.
US 8,759,765
App. No.
13/567,487
Granted
Jun 24, 2014
Kind
B2
Abstract

A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.

Claims (26)

1. A method for processing a sample held by a nanomanipulator tip comprising:

bringing the nanomanipulator tip into contact with a stabilizing support; and,

stabilizing the sample using feedback control;

where stabilizing the sample using feedback control further comprises:

continuing to move the nanomanipulator tip against the stabilizing support until substantially no discernible vibration of the sample is observable.

2. The method of claim 1 further comprising orienting the sample to optimize further processing.

3. The method of claim 1 further comprising preparing the stabilized sample for analysis.

4. The method of claim 1 further comprising analyzing the stabilized sample.

5. The method of claim 1 , where bringing the nanomanipulator tip into contact with the stabilizing support further comprises translating the nanomanipulator tip to contact the stabilizing support.

6. The method of claim 1 , where bringing the nanomanipulator tip into contact with the stabilizing support further comprises translating the stabilizing support to contact the nanomanipulator tip.

7. The method of claim 3 where preparing the sample further comprises ion-beam milling to shape the sample.

8. The method of claim 4 where analyzing the sample further comprises scanning transmission electron microscopy of the sample.

9. The method of claim 4 where analyzing the sample further comprises energy dispersive X-ray analysis of the sample.

10. A method for processing a sample in a charged-particle beam microscope, the method comprising:

collecting the sample from a substrate;

attaching the sample to a nanomanipulator tip;

orienting the sample to optimize further processing;

bringing the nanomanipulator tip into contact with a stabilizing support;

stabilizing the sample using feedback control;

where stabilizing the sample using feedback control further comprises:

continuing to move the nanomanipulator tip against the stabilizing support until substantially no discernible vibration of the sample is observable;

preparing the sample for analysis; and,

analyzing the sample.

11. The method of claim 10 where preparing the sample further comprises ion-beam milling to shape the sample.

12. The method of claim 10 where analyzing the sample further comprises scanning transmission electron microscopy of the sample.

13. The method of claim 10 where analyzing the sample further comprises energy dispersive X-ray analysis of the sample.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 23, 2018
From: OMNIPROBE, INC.
To: OXFORD INSTRUMENTS AMERICA, INC.
Reel/Frame 045879/0763 →
Continuity (2)
Provisional Application 61521040 · Aug 8, 2011
Related Publication 20130037713A1 · Feb 14, 2013