IP Library Granted Patent US 8,482,973
Granted Patent B2
US 8,482,973 · App. 13/568,834 · Granted Jul 9, 2013

Nonvolatile memory cell operating by increasing order in polycrystalline semiconductor material

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Quick Facts
Patent No.
US 8,482,973
App. No.
13/568,834
Granted
Jul 9, 2013
Kind
B2
Abstract

A memory cell is provided that includes a first conductor, a second conductor, and a semiconductor junction diode between the first and second conductors. The semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode. In addition, no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor. Numerous other aspects are provided.

Claims (38)

1. A memory cell comprising:

a first conductor;

a second conductor;

a semiconductor junction diode between the first and second conductors,

wherein:

the semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode, and

no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor.

2. The memory cell of claim 1 , wherein the semiconductor junction diode comprises silicon, germanium, or a silicon-germanium alloy.

3. The memory cell of claim 1 , wherein the memory cell does not comprise a dielectric antifuse layer.

4. The memory cell of claim 1 , wherein the memory cell does not comprise a chalcogenide material.

5. The memory cell of claim 1 , wherein the semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 4 percent with the semiconductor junction diode.

6. The memory cell of claim 1 , further comprising a layer of titanium nitride, tungsten nitride, tantalum nitride, tantalum, tungsten, or titanium tungsten in contact with the semiconductor junction diode.

7. The memory cell of claim 1 , wherein the semiconductor junction diode is not in contact with titanium silicide, cobalt silicide, or nickel monosilicide.

8. The memory cell of claim 1 , wherein, before programming, the semiconductor junction diode has a first maximum barrier height, and after programming, the semiconductor junction diode has a second maximum barrier height, the second maximum barrier height at least 1.5 times the first maximum barrier height.

9. A method comprising:

forming a semiconductor junction diode between first and second conductors;

crystallizing the semiconductor junction diode, wherein during the crystallizing step, the semiconductor junction diode is not in contact with a template material having a lattice mismatch of less than 12 percent with the semiconductor junction diode; and

programming the memory cell by applying a programming voltage between the first and second conductors,

wherein no resistance-switching element having its resistance changed by application of the programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor.

10. The method of claim 9 , wherein the semiconductor junction diode comprises silicon, germanium, or a silicon-germanium alloy.

11. The method of claim 9 , wherein the memory cell does not comprise a dielectric antifuse layer.

12. The method of claim 9 , wherein the memory cell does not comprise a chalcogenide material.

13. The method of claim 9 , wherein, during the crystallization step, the semiconductor junction diode is not in contact with a template material having a lattice mismatch of less than 4 percent with the semiconductor junction diode.

14. The method of claim 9 , wherein, during the crystallizing step, the semiconductor junction diode is in contact with titanium nitride, tungsten nitride, tantalum nitride, tantalum, tungsten, or titanium tungsten.

15. The method of claim 9 , wherein, during the crystallizing step, the semiconductor junction diode is not in contact with titanium silicide, cobalt silicide, or nickel monosilicide.

16. The method of claim 9 , wherein, before the programming step, the semiconductor junction diode has a first maximum barrier height, and after the programming step, the semiconductor junction diode has a second maximum barrier height, the second maximum barrier height at least 1.5 times the first maximum barrier height.

17. A monolithic three dimensional memory array comprising:

(a) a first memory level above a substrate, the first memory level comprising:

i) a first plurality of substantially parallel conductors;

ii) a second plurality of substantially parallel conductors above the first plurality of substantially parallel conductors; and

iii) a first plurality of pillars comprising semiconductor junction diodes, each pillar disposed between one of the first plurality of substantially parallel conductors and the second plurality of substantially parallel conductors,

wherein:

each semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode, and

no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between any of the semiconductor junction diodes and the first plurality of substantially parallel conductors or the second plurality of substantially parallel conductors; and

(b) a second memory level monolithically formed above the first memory level.

18. The monolithic three dimensional memory array of claim 17 , wherein the semiconductor junction diodes comprise silicon, germanium, or a silicon-germanium alloy.

19. The monolithic three dimensional memory array of claim 17 , wherein the semiconductor junction diodes comprise vertically oriented p-i-n diodes.

20. The monolithic three dimensional memory array of claim 17 , wherein the second memory level comprises a second plurality of pillars comprising semiconductor junction diodes.

Assignments (3)
CHANGE OF NAME Recorded May 25, 2016
From: SANDISK TECHNOLOGIES INC
To: SANDISK TECHNOLOGIES LLC
Reel/Frame 038807/0898 →
CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECT LISTED PATENT NUMBER 8853569 TO THE CORRECT PATENT NUMBER 8883569 PREVIOUSLY RECORDED ON REEL 038300 FRAME 0665. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Apr 25, 2016
From: SANDISK 3D LLC
To: SANDISK TECHNOLOGIES INC.
Reel/Frame 038520/0552 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 30, 2016
From: SANDISK 3D LLC.
To: SANDISK TECHNOLOGIES INC.
Reel/Frame 038300/0665 →