Nonvolatile memory cell operating by increasing order in polycrystalline semiconductor material
View Patent ↗A memory cell is provided that includes a first conductor, a second conductor, and a semiconductor junction diode between the first and second conductors. The semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode. In addition, no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor. Numerous other aspects are provided.
1. A memory cell comprising:
a first conductor;
a second conductor;
a semiconductor junction diode between the first and second conductors,
wherein:
the semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode, and
no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor.
2. The memory cell of claim 1 , wherein the semiconductor junction diode comprises silicon, germanium, or a silicon-germanium alloy.
3. The memory cell of claim 1 , wherein the memory cell does not comprise a dielectric antifuse layer.
4. The memory cell of claim 1 , wherein the memory cell does not comprise a chalcogenide material.
5. The memory cell of claim 1 , wherein the semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 4 percent with the semiconductor junction diode.
6. The memory cell of claim 1 , further comprising a layer of titanium nitride, tungsten nitride, tantalum nitride, tantalum, tungsten, or titanium tungsten in contact with the semiconductor junction diode.
7. The memory cell of claim 1 , wherein the semiconductor junction diode is not in contact with titanium silicide, cobalt silicide, or nickel monosilicide.
8. The memory cell of claim 1 , wherein, before programming, the semiconductor junction diode has a first maximum barrier height, and after programming, the semiconductor junction diode has a second maximum barrier height, the second maximum barrier height at least 1.5 times the first maximum barrier height.
9. A method comprising:
forming a semiconductor junction diode between first and second conductors;
crystallizing the semiconductor junction diode, wherein during the crystallizing step, the semiconductor junction diode is not in contact with a template material having a lattice mismatch of less than 12 percent with the semiconductor junction diode; and
programming the memory cell by applying a programming voltage between the first and second conductors,
wherein no resistance-switching element having its resistance changed by application of the programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor.
10. The method of claim 9 , wherein the semiconductor junction diode comprises silicon, germanium, or a silicon-germanium alloy.
11. The method of claim 9 , wherein the memory cell does not comprise a dielectric antifuse layer.
12. The method of claim 9 , wherein the memory cell does not comprise a chalcogenide material.
13. The method of claim 9 , wherein, during the crystallization step, the semiconductor junction diode is not in contact with a template material having a lattice mismatch of less than 4 percent with the semiconductor junction diode.
14. The method of claim 9 , wherein, during the crystallizing step, the semiconductor junction diode is in contact with titanium nitride, tungsten nitride, tantalum nitride, tantalum, tungsten, or titanium tungsten.
15. The method of claim 9 , wherein, during the crystallizing step, the semiconductor junction diode is not in contact with titanium silicide, cobalt silicide, or nickel monosilicide.
16. The method of claim 9 , wherein, before the programming step, the semiconductor junction diode has a first maximum barrier height, and after the programming step, the semiconductor junction diode has a second maximum barrier height, the second maximum barrier height at least 1.5 times the first maximum barrier height.
17. A monolithic three dimensional memory array comprising:
(a) a first memory level above a substrate, the first memory level comprising:
i) a first plurality of substantially parallel conductors;
ii) a second plurality of substantially parallel conductors above the first plurality of substantially parallel conductors; and
iii) a first plurality of pillars comprising semiconductor junction diodes, each pillar disposed between one of the first plurality of substantially parallel conductors and the second plurality of substantially parallel conductors,
wherein:
each semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode, and
no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between any of the semiconductor junction diodes and the first plurality of substantially parallel conductors or the second plurality of substantially parallel conductors; and
(b) a second memory level monolithically formed above the first memory level.
18. The monolithic three dimensional memory array of claim 17 , wherein the semiconductor junction diodes comprise silicon, germanium, or a silicon-germanium alloy.
19. The monolithic three dimensional memory array of claim 17 , wherein the semiconductor junction diodes comprise vertically oriented p-i-n diodes.
20. The monolithic three dimensional memory array of claim 17 , wherein the second memory level comprises a second plurality of pillars comprising semiconductor junction diodes.