Compositions and antireflective coatings for photolithography
View Patent ↗Compositions for use in microelectronic applications: Ra comprises one or more multiple bonds, provided that, if Ra comprises more than one multiple bond, these multiple bonds are not in a conjugated configuration; and R1, R2, R3 are independently selected from alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and Rb is selected from H or a saturated group comprising alkyl, alkylene, or alkylidene; and R4, R5, R6 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and Rc comprises more than one multiple bond, and these multiple bonds are in a conjugated configuration; and R7, R8, R9 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and R10, R11, R12, R13 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl.
1. A first composition comprising at least the following:
A) a Compound F1 selected from Formula 1:
wherein Ra comprises one or more multiple bonds, provided that, if Ra comprises more than one multiple bond, these multiple bonds are not in a conjugated configuration; and R1, R2, and R3 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
B) a Compound F2 selected from Formula 2:
wherein Rb is selected from H or a saturated group comprising alkyl, alkylene, or alkylidene; and R4, R5, and R6 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
C) a Compound F3 selected from Formula 3:
wherein Rc comprises more than one multiple bond, and these multiple bonds are in a conjugated configuration; and R7, R8, and R9 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
D) A Compound F4 selected from Formula 4:
wherein R10, R11, R12, and R13 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
wherein Compound F1 is present in an amount greater than 10 mole percent, based on the sum moles of Compounds F1, F2, F3 and F4; and
wherein the molar ratio of F1/F4 is from 1/20 to 1/1.
2. The first composition of claim 1 , comprising greater than, or equal to, 5 weight percent Si, based on the sum weight of Compounds F1, F2, F3 and F4.
3. The first composition of claim 1 , wherein the sum molar amount of Compound F2 and Compound F4 is greater than, or equal to, 40 mole percent, based on the sum moles of Compounds F1, F2, F3 and F4.
4. The first composition of claim 1 , wherein Compound F4 is present in an amount greater than 10 mole percent, based on the sum moles of Compounds F1, F2, F3 and F4.
5. The first composition of claim 1 , wherein Compound F4 is present in an amount less than 65 mole percent, based on the sum moles of Compounds F1, F2, F3 and F4.
6. A prepolymer formed from the first composition of claim 1 .
7. A second composition comprising the prepolymer of claim 6 , and at least one of the following: an amine-containing compound, a halide-containing compound, a hydrochloride, an ammonium-containing compound, or a mixture thereof.
8. A crosslinked composition formed from the second composition of claim 7 .
9. An article comprising at least one component formed from the composition of claim 1 .
10. A film comprising at least one layer formed from the composition of claim 1 .
11. The film of claim 10 , further comprising a second layer formed from a third composition comprising a polymer.
12. A method of forming a coating on a substrate, said method comprising at least the following: providing a substrate,
forming an underlayer on the substrate, wherein the underlayer comprises at least one polymer,
applying the first composition of claim 1 or a second composition of claim 7 over the underlayer, and
curing the first composition or second composition to form the coating; and
wherein the second composition comprises a prepolymer formed from the first composition.
13. The method of claim 12 , wherein multiple layers of the first composition or second composition are applied over the underlayer.
14. The method of claim 12 , wherein the coating is an antireflective layer.
15. The first composition of claim 1 , wherein the molar ratio of F1/F4 is from 1/15 to 1/1.
16. The first composition of claim 1 , wherein the molar ratio of F1/F4 is from 1/10 to 1/1.
17. The composition of claim 1 , wherein Compound F4 is present in an amount from 10 to 60 mole percent, based on the sum moles of Compounds F1, F2, F3 and F4.
18. The composition of claim 1 , wherein Compound F1 is present in an amount from 5 to 50 weight percent; Compound F2 is present in an amount from 5 to 50 weight percent; Compound F3 is present in an amount from 2 to 20 weight percent; and Compound F4 is present in an amount from 20 to 80 weight percent; and wherein each weight percentage is based on the weight of the first composition.
19. A first composition comprising at least the following:
A) a Compound F1 selected from Formula 1:
wherein Ra comprises one or more multiple bonds, provided that, if Ra comprises more than one multiple bond, these multiple bonds are not in a conjugated configuration; and R1, R2, and R3 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
B) a Compound F2 selected from Formula 2:
wherein Rb is selected from H or a saturated group comprising alkyl, alkylene, or alkylidene; and R4, R5, and R6 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
C) a Compound F3 selected from Formula 3:
wherein Rc comprises more than one multiple bond, and these multiple bonds are in a conjugated configuration; and R7, R8, and R9 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
D) A Compound F4 selected from Formula 4:
wherein R10, R11, R12, and R13 are each independently selected from alkoxyl, hydroxyl, halide, OC(O)R, or OC(O)OR, wherein R is alkyl or a substituted alkyl; and
wherein Compound F1 is present in an amount greater than 10 mole percent, based on the sum moles of Compounds F1, F2, F3 and F4; and
wherein Compound F1 is present in an amount from 5 to 50 weight percent; Compound F2 is present in an amount from 5 to 50 weight percent; Compound F3 is present in an amount from 2 to 20 weight percent; and Compound F4 is present in an amount from 20 to 80 weight percent; and wherein each weight percentage is based on the weight of the first composition.