IP Library Granted Patent US 8,858,764
Granted Patent B2
US 8,858,764 · App. 13/606,815 · Granted Oct 14, 2014

Electron beam sculpting of tunneling junction for nanopore DNA sequencing

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Quick Facts
Patent No.
US 8,858,764
App. No.
13/606,815
Granted
Oct 14, 2014
Kind
B2
Abstract

A technique for a nanodevice is provided that includes a reservoir filled with a conductive fluid and a membrane separating the reservoir. The membrane includes an electrode layer having a tunneling junction formed therein. A nanopore is formed through the membrane, and the nanopore is formed through other layers of the membrane such that the nanopore is aligned with the tunneling junction of the electrode layer. When a voltage is applied to the electrode layer, a tunneling current is generated by a base in the tunneling junction to be measured as a signature for distinguishing the base. When an organic coating is formed on an inside surface of the tunneling junction, transient bonds are formed between the electrode layer and the base.

Claims (15)

1. A method of configuring a nanodevice, the method comprising:

filing a reservoir with a conductive fluid;

configuring a membrane to separate the reservoir in the nanodevice, the membrane comprising an electrode layer having a tunneling junction formed therein; and

configuring the membrane to have a nanopore formed through other layers of the membrane such that the nanopore is aligned with the tunneling junction of the electrode layer;

wherein when a voltage is applied to the electrode layer, a tunneling current is generated by a base in the tunneling junction to be measured as a current signature for distinguishing the base;

wherein when an organic coating is formed on an inside surface of the tunneling junction, transient bonds are formed between the electrode layer and the base; and

wherein the organic coating includes a selection from hydroxamic acid, resorcinol functionality, adnine monophosphonic acid, guanine monophosphonic acid, sulfonamides, and sulfonic acid.

2. The method of claim 1 , wherein the tunneling junction is cut into the electrode layer by a focused electron beam.

3. The method of claim 1 , wherein a first insulating layer is underneath a substrate and a second insulating layer is above the substrate; and

wherein the electrode layer having the tunneling junction is above the second insulating layer.

4. The method of claim 3 , wherein a third insulating layer is above the electrode layer; and

wherein the second insulating layer and the third insulating layer are the other layers through which the nanopore is formed.

5. The method of claim 4 , wherein the nanopore formed through the second insulating layer and the third insulating layer is aligned to the tunneling junction in the electrode layer.

6. The method of claim 1 , wherein the transient bonds hold the base in place against thermal motion.

7. The method of claim 1 , wherein the transient bonds improve the current signature of the base.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 11, 2016
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 037766/0371 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 25, 2016
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 037591/0225 →