Semiconductor device and method for manufacturing the same
A metal oxide layer is in contact with an interlayer insulating layer covering a transistor, and has a stacked-layer structure including a first metal oxide layer having an amorphous structure and a second metal oxide layer having a polycrystalline structure. In the first metal oxide layer, there are no crystal grain boundaries, and grid intervals are wide as compared to those in a metal oxide layer in a crystalline state; thus, the first metal oxide layer easily traps moisture between the lattices. In the second metal oxide layer having a polycrystalline structure, crystal parts other than crystal grain boundary portions have dense structures and extremely low moisture permeability. Thus, the structure in which the metal oxide layer including the first metal oxide layer and the second metal oxide layer is in contact with the interlayer insulating layer can effectively prevent moisture permeation into the transistor.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming a semiconductor layer including a source region and a drain region;
forming a gate insulating layer over the semiconductor layer;
forming a gate electrode over the gate insulating layer;
forming a pair of electrodes electrically connected to the source region and the drain region of the semiconductor layer;
forming an insulating layer over the gate electrode;
forming a first metal oxide layer having an amorphous structure over the insulating layer; and
forming a second metal oxide layer having a polycrystalline structure over the first metal oxide layer,
wherein the first metal oxide layer and the second metal oxide layer are formed so as to cover the pair of electrodes.
2. The method for manufacturing the semiconductor device according to claim 1 , wherein the first metal oxide layer and the second metal oxide layer are successively formed in a same apparatus.
3. The method for manufacturing the semiconductor device according to claim 1 , wherein the first metal oxide layer and the second metal oxide layer are formed using a same target.
4. The method for manufacturing the semiconductor device according to claim 1 , wherein a film including an oxide semiconductor material is formed as the semiconductor layer.
5. The method for manufacturing the semiconductor device according to claim 1 , wherein the first metal oxide layer and the second metal oxide layer are formed at a pressure of 0.7 Pa.
6. A method for manufacturing a semiconductor device, comprising the steps of:
forming a semiconductor layer including a source region and a drain region;
forming a gate insulating layer over the semiconductor layer;
forming a gate electrode over the gate insulating layer;
forming a pair of electrodes electrically connected to the source region and the drain region of the semiconductor layer;
forming a first metal oxide layer having an amorphous structure over the gate electrode;
forming a second metal oxide layer having a polycrystalline structure over the first metal oxide layer; and
forming an insulating layer over the second metal oxide layer,
wherein the first metal oxide layer and the second metal oxide layer are formed so as to cover the pair of electrodes.
7. The method for manufacturing the semiconductor device according to claim 6 , wherein the first metal oxide layer and the second metal oxide layer are successively formed in a same apparatus.
8. The method for manufacturing the semiconductor device according to claim 6 , wherein the first metal oxide layer and the second metal oxide layer are formed using a same target.
9. The method for manufacturing the semiconductor device according to claim 6 , wherein a film including an oxide semiconductor material is formed as the semiconductor layer.
10. The method for manufacturing the semiconductor device according to claim 6 , wherein the first metal oxide layer and the second metal oxide layer are formed at a pressure of 0.7 Pa.
11. The method for manufacturing the semiconductor device according to claim 1 , wherein the first metal oxide layer and the second metal oxide layer contain at least one of aluminum oxide, gallium oxide, titanium oxide, zirconium oxide, hafnium oxide, vanadium oxide, niobium oxide, and molybdenum oxide.
12. The method for manufacturing the semiconductor device according to claim 6 , wherein the first metal oxide layer and the second metal oxide layer contain at least one of aluminum oxide, gallium oxide, titanium oxide, zirconium oxide, hafnium oxide, vanadium oxide, niobium oxide, and molybdenum oxide.
13. A method for manufacturing a semiconductor device, comprising the steps of:
forming a semiconductor layer including a source region and a drain region;
forming a gate insulating layer over the semiconductor layer;
forming a gate electrode over the gate insulating layer;
forming a pair of electrodes electrically connected to the source region and the drain region of the semiconductor layer;
forming a first metal oxide layer over the pair of electrodes; and
forming a second metal oxide layer over the first metal oxide layer,
wherein the second metal oxide layer has a higher crystallinity than the first metal oxide layer, and
wherein the first metal oxide layer and the second metal oxide layer are formed so as to cover the pair of electrodes.
14. The method for manufacturing the semiconductor device according to claim 13 , wherein the first metal oxide layer and the second metal oxide layer are successively formed in a same apparatus.
15. The method for manufacturing the semiconductor device according to claim 13 , wherein the first metal oxide layer and the second metal oxide layer are formed using a same target.
16. The method for manufacturing the semiconductor device according to claim 13 , wherein a film including an oxide semiconductor material is formed as the semiconductor layer.
17. The method for manufacturing the semiconductor device according to claim 13 , wherein the first metal oxide layer and the second metal oxide layer are formed at a pressure of 0.7 Pa.
18. The method for manufacturing the semiconductor device according to claim 13 , wherein the first metal oxide layer and the second metal oxide layer contain at least one of aluminum oxide, gallium oxide, titanium oxide, zirconium oxide, hafnium oxide, vanadium oxide, niobium oxide, and molybdenum oxide.