Semiconductor structure and manufacturing method thereof
View Patent ↗A semiconductor structure and a manufacturing method thereof are provided. The method includes the following steps. Firstly, a semiconductor substrate having an active surface and a back surface is provided. The active surface is opposite to the back surface, and the semiconductor substrate includes at least one grounding pad disposed on the active surface. Secondly, at least one through silicon via is formed through the semiconductor substrate from the back surface to the active surface thus exposing the grounding pad. Then, a conductive layer is formed on the back surface of the semiconductor substrate and filled into the through silicon via to electrically connect to the grounding pad and the semiconductor substrate.
1. A method for manufacturing semiconductor structure, the method comprising:
forming a via from a first surface of a semiconductor substrate to a ground pad on a second surface of the semiconductor substrate; and
forming a conductive layer on the first surface of the semiconductor substrate and within the via to form an electrical connection with the ground pad;
wherein, after said forming a conductive layer, there is no electrically-insulative layer between the conductive layer and the semiconductor substrate.
2. The method of claim 1 , further comprising adhering the second surface of the semiconductor substrate to a carrier substrate before said forming a via.
3. The method of claim 2 , further comprising separating the semiconductor substrate from the carrier substrate after said forming a conductive layer.
4. The method of claim 3 , wherein the semiconductor substrate further comprises a power supply/signal pad disposed on the second surface, and wherein the method further comprises performing a wire bonding process to electrically connect the power supply/signal pad to an external circuit after said separating the semiconductor substrate from the carrier substrate.
5. A semiconductor structure comprising:
a semiconductor substrate including:
a first surface;
a second surface opposite the first surface;
a ground pad disposed on the second surface; and
a via formed through the semiconductor substrate from the first surface to the second surface and exposing the ground pad; and
a conductive layer disposed on the first surface of the semiconductor substrate and within the via, wherein the conductive layer is electrically connected to the ground pad;
wherein no electrically-insulative layer is disposed between the conductive layer and the semiconductor substrate.
6. The semiconductor structure of claim 5 , wherein the semiconductor substrate further comprises a power supply/signal pad disposed on the second surface.
7. The semiconductor structure of claim 6 , wherein the power supply/signal pad is disposed closer to an edge of the semiconductor substrate than the ground pad is disposed to the edge of the semiconductor substrate.
8. The semiconductor structure of claim 5 , wherein the conductive layer comprises copper or aluminum.
9. The semiconductor structure of claim 5 , further comprising an adhering layer formed between the carrier substrate and the semiconductor substrate.
10. The semiconductor structure of claim 5 , wherein the conductive layer completely fills the via.
11. The semiconductor structure of claim 5 , wherein the conductive layer only partially fills the via.
12. The method of claim 1 , further comprising forming the ground pad on the second surface of the semiconductor substrate prior to said forming a via.
13. The method of claim 2 , wherein said adhering the second surface of the semiconductor substrate to a carrier substrate comprises spreading an adhering layer completely between the carrier substrate and the semiconductor substrate.
14. The method of claim 2 , wherein said adhering the second surface of the semiconductor substrate to a carrier substrate comprises patterning an adhering layer between the carrier substrate and the semiconductor substrate.
15. The method of claim 1 , wherein said forming a conductive layer comprises electrically connecting the conductive layer to multiple ground pads, and wherein each of the multiple ground pads has a uniform grounding power.
16. The method of claim 1 , wherein said forming a conductive layer comprises only partially filling the via with the conductive layer.
17. The method of claim 1 , wherein said forming a conductive layer comprises completely filling the via with the conductive layer.
18. The method of claim 1 , further comprising connecting the ground pad to an external ground device.