Packaging for semiconductor sensor devices and methods
View Patent ↗A pressure sensor includes a first housing having a cavity. The pressure sensor further includes a pressure sensing device attached to a bottom of the cavity. The pressure sensor further includes a layer of gel over the pressure sensing device. The pressure sensor further includes a baffle in contact with the gel to reduce movement of the gel.
1. A pressure sensor, comprising:
a first housing having a cavity;
a pressure sensing device attached to a bottom of the cavity;
an electrical connection coupled between the pressure sensing device and another component in the cavity;
a layer of gel, the pressure sensing device and at least a portion of the electrical connection being buried in the layer of gel;
a lid over the layer of gel; and
a baffle in the cavity in contact with the layer of gel to reduce movement of the gel across the electrical connection.
2. The pressure sensor of claim 1 , wherein the baffle comprises fabric on a top surface of the layer of gel.
3. The pressure sensor of claim 2 , wherein the fabric comprises a flexible woven material.
4. The pressure sensor of claim 2 , wherein the fabric comprises a flexible non-woven material.
5. The pressure sensor of claim 1 , wherein the baffle comprises a high modulus surface layer on the layer of gel.
6. The pressure sensor of claim 5 , wherein the high modulus surface layer comprises gel and particulate that causes the high modulus surface layer to have a higher modulus than the layer of gel.
7. The pressure sensor of claim 1 , wherein:
the lid has an opening; and
the baffle further comprises posts extending from the lid into the gel.
8. The pressure sensor of claim 1 , wherein:
the lid is over the cavity;
the lid has a portion extending to at least a portion of a top surface of the layer of gel; and
the lid has an opening.
9. The pressure sensor of claim 8 , wherein the portion of the lid has posts extending further into the gel.
10. The pressure sensor of claim 1 , wherein the lid has an opening:
the baffle further comprises a plurality of wall baffles;
each wall baffle surrounds the opening;
each wall baffle extends from the lid; and
for each wall baffle there is a path for air to move from one side of the wall opposite the opening to the opening.
11. A pressure sensor, comprising:
a first housing having a cavity;
a pressure sensing device attached to a bottom of the cavity;
an electrical connection in the cavity between the pressure sensing device and another component;
a layer of low modulus gel in the cavity, the pressure sensing device and at least a portion of the electrical connection are buried in the gel;
a lid over the layer of low modulus gel; and
a baffle for moderating movement of the gel across the electrical connection and the pressure sensing device, wherein the baffle is in contact with the layer of low modulus gel in the cavity.
12. The pressure sensor of claim 11 , wherein the lid includes an opening, and the baffle comprises one of a group consisting of a fabric on a top surface of the gel and a moderating layer on the top surface of the gel comprising gel and a particulate so that the moderating layer has a higher modulus than the layer of low modulus gel.
13. The pressure sensor of claim 11 , further comprising:
the lid includes an opening:
the lid is over the cavity;
the lid is spaced from a top surface of the layer of gel; and
the baffle extends from the lid to the layer of gel for contacting the layer of gel.
14. The pressure sensor of claim 13 , wherein the baffle has a surface that contacts at least a portion of the top surface of the layer of gel.
15. The pressure sensor of claim 13 , wherein the baffle has a plurality of posts extending from the lid to extend into the layer of gel.
16. The pressure sensor of claim 13 , wherein:
the baffle has a plurality of wall baffles;
each of the wall baffles surrounds the opening;
each of the wall baffles is configured to allow passage of air through the opening and a side of the wall baffle opposite the opening.