IP Library Granted Patent US 8,979,611
Granted Patent B2
US 8,979,611 · App. 13/696,759 · Granted Mar 17, 2015

Polishing pad, production method for same, and production method for glass substrate

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,979,611
App. No.
13/696,759
Granted
Mar 17, 2015
Kind
B2
Abstract

A polishing pad having a polishing layer comprising a thermoset polyurethane foam, wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1): Y <5 X −150  (1) wherein Y represents the tensile storage modulus E′ (MPa), and X represents the Asker C hardness value (60-second value) after the foam is immersed in water for 24 hours.

Claims (11)

1. A polishing pad having a polishing layer comprising a thermoset polyurethane foam,

wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1):

Y< 5 X− 150  (1)

wherein Y represents the tensile storage modulus E′ (MPa), and X represents the Asker C hardness value (60-second value) after the foam is immersed in water for 24 hours.

2. The polishing pad according to claim 1 , wherein the thermoset polyurethane foam comprises, as raw material components, an isocyanate component, and active-hydrogen-containing compounds comprising 5 to 20% by weight of a polyol compound having a functional group number of 2 and a hydroxyl group value of 1,100 to 1,400 mg KOH/g, and 10 to 40% by weight of a polyol compound having a functional group number of 3 and a hydroxyl group value of 200 to 600 mg KOH/g.

3. The polishing pad according to claim 1 , wherein about the thermoset polyurethane foam, the Asker C hardness value thereof, as the 60-second value, is 75 or less, the hardness value being a value after the foam is immersed in water for 24 hours.

4. The polishing pad according to claim 1 , wherein the value of the tensile storage modulus E′ (30° C.) at the frequency of 1.6 Hz is 100 MPa or less.

5. The polishing pad according to claim 1 , wherein the thermoset polyurethane foam has substantially spherical continuous bubbles having an average bubble diameter of 20 to 300 μm.

6. A method for producing a glass substrate, comprising the step of:

providing the polishing pad of claim 1 ; and

polishing a glass substrate using the polishing pad.

Assignments (7)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS CMP HOLDINGS INC.
To: DUPONT ELECTRONIC MATERIALS HOLDING, INC.
Reel/Frame 069274/0160 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2016
From: TOYO TIRE & RUBBER CO., LTD.
To: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
Reel/Frame 038053/0218 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 029442 FRAME: 0171. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jan 15, 2015
From: SATO, AKINORI; ISHIZAKA, NOBUYOSHI
To: TOYO TIRE & RUBBER CO., LTD.
Reel/Frame 034773/0132 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE PROPERTY NUMBER FROM 13/696,659 TO 13/696,759 PREVIOUSLY RECORDED ON REEL 029410 FRAME 0551. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT TO TOYO TIRE & RUBBER CO., LTD.. Recorded Dec 11, 2012
From: SATO, AKINORI; ISHIZAKA, NOBUYOSHI
To: TOYO TIRE & RUBBER CO., LTD
Reel/Frame 029442/0171 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 5, 2012
From: SATO, AKINORI; ISHIZAKA, NOBUYOSHI
To: TOYO TIRE & RUBBER CO., LTD
Reel/Frame 029410/0551 →