Electric component having a shallow physical shape, and method of manufacture
View Patent ↗Electric components and methods of manufacture are specified. An electric component comprises a carrier having a recess which penetrates the carrier and also a first chip and external contact area. The first chip is arranged in the recess in the carrier. The external contact area is provided for connecting up the first chip to an external circuit environment.
1. An electric component having a shallow physical shape, the electric component being a microphone comprising
a carrier having a cutout, a first chip and an external contact area, wherein
the cutout having a section, the section penetrating through the carrier,
the first chip is arranged in the cutout, the section being filled with the first chip, the first chip being a Microelectromechanical Systems (MEMS) chip,
the external contact area is provided for an interconnection of the first chip with an external circuit environment,
wherein the carrier has a depression leading to the cutout, the depression defining a hollow space when covered by a cover,
wherein the carrier includes a sidewall forming the depression, the electric component further comprising a second chip electrically connected to the first chip and disposed in the hollow space, and
wherein a height contribution of the carrier and of the first chip to the height of the electric component when the first chip is arranged in the cutout is less than a sum of the height of the carrier plus the height of the first chip.
2. The electric component according to claim 1 , furthermore comprising an adhesive, which is arranged in a gap between the first chip and the cutout and connects the first chip to the carrier.
3. The electric component according to claim 1 , further comprising a coating, which is arranged on a part of the surface of the carrier or of the first chip and which can support a wetting of the part of the surface with an adhesive.
4. The electric component according to claim 1 , further comprising a cover, which covers a part of the top side of the carrier or a part of the top side of the first chip.
5. The electric component according to claim 1 , wherein
the carrier has a multilayered construction comprising two dielectric layers and a metallization layer arranged therebetween,
conductor tracks or impedance elements are structured in the metallization layer and
an internal interconnection interconnects the first chip the impedance elements and the external contact area.
6. The electric component according to claim 1 , further comprising an ASIC chip, which is fixed to the carrier and is interconnected via an internal interconnection with the first chip.
7. The electric component according to claim 1 , wherein
the first chip has a membrane and a backplate, and
a back volume is arranged in the carrier or in the MEMS chip.
8. A method for manufacturing an electric component comprising a first chip and a carrier for carrying the first chip, the electric component being a microphone having a shallow physical shape, comprising the following steps in the following order of:
providing the carrier having a cutout penetrating through the carrier,
providing the first chip, wherein the first chip is a Microelectromechanical Systems (MEMS) chip,
arranging (a) the carrier on an auxiliary film and (b) the first chip in the cutout, and
fixing the first chip in the cutout.
9. The method according to claim 8 , wherein the film has an adhesive layer on the side facing the carrier and the chip.
10. The method according to claim 9 , further comprising the following steps of:
providing a cover film,
structuring a cover from the cover film, and
arranging the cover on a part of the carrier or of the chip.
11. The electric component according to claim 1 , wherein the second chip is an ASIC chip, which is fixed to the carrier in the depression and is interconnected via an internal interconnection with the first chip.
12. The electric component according to claim 1 , in which the cover, when present, covers a part of the top side of the carrier or a part of the top side of the first chip, the cover forming the hollow space.
13. The electric component according to claim 12 , wherein
the first chip has a membrane and a backplate,
a back volume of the microphone is in the MEMS chip or is formed by the hollow space, and
a height contribution of the carrier and of the MEMS chip to the height of the electric component when the MEMS chip is arranged in the cutout is less than a sum of the height of the carrier plus the height of the first chip.
14. The electric component according to claim 8 , wherein a height contribution of the carrier and of the first chip to the height of the electric component when the first chip is arranged in the cutout is less than a sum of the height of the carrier plus the height of the first chip.
15. The electric component according to claim 8 , further comprising an adhesive, which is arranged at least (1) in a gap between the first chip and the cutout and connects the first chip to the carrier and (2) on at least part of the bottom of the depression under the second chip.
16. The method according to claim 8 , wherein the carrier has a depression, the cutout penetrating a bottom of the depression, wherein the carrier includes a sidewall forming the depression, the electric component further comprising a second chip electrically connected to the first chip and disposed in the hollow space.
17. The method according to claim 16 , wherein a height contribution of the carrier, the first chip, and the second chip to the height of the electric component when the first chip is arranged in the cutout is less than a sum of the height of the carrier plus the height of the first chip.